• 제목/요약/키워드: Mo electrode

검색결과 236건 처리시간 0.033초

신 공정을 이용한 멤브레인형 체적탄성파 공진기의 제작 및 하부전극이 주파수 응답특성에 미치는 영향 (Fabrication of a FBAR device using a novel process and the effect of bottom electrode on the frequency response)

  • 김보현;김도영;조동현;이진복;박진석
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2004년도 하계학술대회 논문집 C
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    • pp.1594-1596
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    • 2004
  • Film bulk acoustic resonator (FBAR) devices which adopt a membrane-type configuration are fabricated by a novel process. In contrast to the conventional FBAR structure, the newly fabricated resonator doesn't employ any supporting layer below or above it, so that the properties of piezoelectric layer are not influenced by the bottom electrode material. FBAR devices with Mo/AlN/Metal configuration are also fabricated. The frequency response characteristics ($S_{11}$) of the devices fabricated using the proposed process are compared with those of the conventional devices. The return losses are also estimated, in terms of the kind and thickness of bottom electrode materials.

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Amperometric Morphine Detection Using Pt-Co Alloy Nanowire Array-modified Electrode

  • Tao, Manlan;Xu, Feng;Li, Yueting;Xu, Quanqing;Chang, Yanbing;Wu, Zaisheng;Yang, Yun-Hui
    • Bulletin of the Korean Chemical Society
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    • 제31권7호
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    • pp.1968-1972
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    • 2010
  • Pt-Co alloy nanowire array was directly synthesized by electrochemical deposition with polycarbonate template at -1.0V and subsequent chemical etching of the template. The use of Pt-Co alloy nanowire array-modified electrode (Pt-Co NAE) for the determination of morphine (MO) is described. The morphology of the Pt-Co alloy nanowire array has been investigated by scanning electron microscopy (SEM) and energy disperse X-ray spectroscopy (EDS) analysis), respectively. The resulting Pt-Co NAE offered a linear amperometric response for morphine ranging from $2.35\times10^{-5}$ to $2.39\times10^{-3}$ M with a detection limit of $7.83\times10^{-6}$ M at optimum conditions. This sensor displayed high sensitivity and long-term stability.

Fabrication of NiS Thin Films as Counter Electrodes for Dye-Sensitized Solar Cells using Atomic Layer Deposition

  • 정진원;김은택;박수용;성명모
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.276.2-276.2
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    • 2016
  • Dye-sensitized solar cells (DSCs) are promising candidates for light-to-energy conversion devices due to their low-cost, easy fabrication and relative high conversion efficiency. An important component of DSCs is counter electrode (CE) collect electrons from external circuit and reduct I3- to I-. The conventional CEs are thermally decomposed Pt on fluorine-doped tin oxide (FTO) glass substrates, which have shown excellent performance and stability. However, Pt is not suitable in terms of cost effect. In this report, we demonstrated that nickel sulfide thin films by atomic layer deposition (ALD)-using Nickel(1-dimethylamino-2-methyl-2-butanolate)2 and hydrogen sulfide at low temperatures of $90-200^{\circ}C$-could be good CEs in DSCs. Notably, ALD allows the thin films to grow with good reproducibility, precise thickness control and excellent conformality at the angstrom or monolayer level. The nickel sulfide films were characterized using X-ray photoelectron spectroscopy, scanning electron microscopy, X-ray diffraction, hall measurements and cyclic voltammetry. The ALD grown nickel sulfide thin films showed high catalytic activity for the reduction of I3- to I- in DSC. The DSCs with the ALD-grown nickel sulfide thin films as CEs showed the solar cell efficiency of 7.12% which is comparable to that of the DSC with conventional Pt coated counter electrode (7.63%).

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기능성 유기 LB단분자막의 전기화학적 연구 (Electrochemical Study of Functional Organic Monomolecular Film prepared by Langmuir-Blodgett Method)

  • 박수길;임기조;전일철;이주성
    • 한국표면공학회지
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    • 제28권1호
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    • pp.34-45
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    • 1995
  • An amphiphilic nitroxide radical(2,2'6,6'-tetramethyl-4-octadecyioxy-1-piperidinyloxyl, TEMOPO) or mixture of TEMOPO and arachidic acid(Icosanoic acid, AA), was spread on water surface by the Langmuir-Blodgett(LB) method and surface pressure-area curve was measured. Such monolayer films of TEMOPO were transferred onto surfaces of photo transferable tin oxide electrodes(PTTO) by the LB method under various surface pressure with the transfer ratio of larger than 0.95 at the surface pressure higher than 15mN/m. The electrochemical effect of functional nitroxy radical monolayer onto semi-conductive electrode to electrolyte have been investigated by using LB method. Cyclic voltammetry technique was used for the electrochemical behavior measurement of TEMOPO monolayer onto the PTTO in 0.18 mo1/$dm^3$ $H_2SO_4$ solutions. The shape of voltammograms was found to change from one electrode to another. The amount of charge for the oxidation and the re-reduction of the cation to TEMOPO were evaluated from graphical integration. The amounts of charge were always smaller than those predicted from the $\pi$-$\sigma$ curves though the transfer ratio was unity. The poor reproducibility of the cyclic voltammograms was improved by the mixing with AA. Structure and arrangement of monomolecular layer on water surface and electrode were studied. Characteristics of monolayer film applied for the mediation reaction was also discussed by electrochemical method.

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Evaluation of Mixing Performance in Several Designs for Microfluidic Channel Mixers

  • 왕양양;서용권;강상모
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2007년도 춘계학술대회B
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    • pp.2811-2816
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    • 2007
  • We conducted a numerical study of AC-electroosmotic (alternating current) effect on the fluid flow and mixing in a 3-D microchannel. The microchannel used as an efficient micro-mixer is composed of a channel and a series of pairs of electrodes attached in zigzag pattern on the bottom wall. The AC electric field is applied to the electrodes so that a steady flow current takes place around the electrodes. This current is flowing across the channel and thus contributing to the mixing of the fluid within the channel. We performed numerical simulations by using a commercial code to obtain a steady flow field. This steady flow is then used in evaluation of the mixing performance via the concept of mixing index. It was found that good combination of two kinds of electrode, which gave us a good mixing, is not simple harmonic. And when the length ratio of these two kinds of electrode is 2:1, we can get the best mixing effect.

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전해 프로세스에 의한 초미세 펀치의 제작 (Fabrication of Ultrathin Punch by Electrochemical Process)

  • 임형준;임영모;김수현;곽윤근
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2000년도 춘계학술대회논문집A
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    • pp.792-796
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    • 2000
  • With the development of micro machining, it becomes an important part to fabricate an electrode which has tens of ${\mu}m$ or less. There are two methods to get a narrow hole; non-contact type such as EDM(Electro-discharge machining) and contact type such as punching. A punch which has a tapered shape with a cylindrical tip is fabricated in this paper. To make this punch, a method which was used to fabricate a cylindrical shape by electrochemical process was applied. The control factors for the shape and their limits are verified through an experiment.

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Gas sensing properties of polyacrylonitrile/metal oxide nanofibrous mat prepared by electrospinning

  • 이득용;조정은;김예나;오영제
    • 센서학회지
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    • 제17권4호
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    • pp.281-288
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    • 2008
  • Polyacrylonitrile(PAN)/metal oxide(MO) nanocomposite mats with a thickness of 0.12 mm were electrospun by adding 0 to 10 wt% of MO nanoparticles ($Fe_2O_3$, ZnO, $SnO_2$, $Sb_2O_3-SnO_2$) into PAN. Pt electrode was patterned on $Al_2O_3$ substrate by DC sputtering and then the PAN(/MO) mats on the Pt patterned $Al_2O_3$ were electrically wired to investigate the $CO_2$ gas sensing properties. As the MO content rose, the fiber diameter decreased due to the presence of lumps caused by the presence of MOs in the fiber. The PAN/2% ZnO mat revealed a faster response time of 93 s and a relatively short recovery of 54 s with a ${\Delta}R$ of 0.031 M${\Omega}$ at a $CO_2$ concentration of 200 ppm. The difference in sensitivity was not observed significantly for the PAN/MO fiber mats in the $CO_2$ concentration range of 100 to 500 ppm. It can be concluded that an appropriate amount of MO nanoparticles in the PAN backbone leads to improvement of the $CO_2$ gas sensing properties.

$Al/TiO_2-SiO_2/Mo$ 구조를 가진 Antifuse의 전기적 특성 분석 (Electrical characterizations of$Al/TiO_2-SiO_2/Mo$ antifuse)

  • 홍성훈;노용한;배근학;정동근
    • 한국진공학회지
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    • 제9권3호
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    • pp.263-266
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    • 2000
  • 본 논문에서는 낮은 구동 전압에서 동작하고 안정된 on/off 상태를 갖는 Al/$TiO_2-SiO_2$/Mo 형태의 안티퓨즈를 제작하였다. 하부전극으로 사용된 Mo 금속은 표면상태가 부드럽고 녹는점이 높은 매우 안정된 금속으로, 표면 위에 제조된 $SiO_2$ 특성을 매우 안정되게 유지시켰다. 또한 $TiO_2$절연막을 $SiO_2$절연막 위에 복층 구조로 증착하여, Ti 금속의 침투로 인한 $SiO_2$ 절연막의 약화로 동일 두께(100 $\AA$)의 $SiO_2$, 단일막에 비하여 향상된 절연파괴 전압을 얻을 수 있었다. $TiO_2-SiO_2$ 이중절연막을 사용하여 적정 절연파괴전압 및 ON-저항을 구현하였으며, 두께가 두꺼워짐으로 인해 바닥금속의 거칠기의 영향을 최소화시킬 수 있었다. 이중 절연막의 두께는 250 $\AA$이고 프로그래밍 전압은 9.0 V이고 약 65 $\Omega$의 on 저항을 얻을 수 있었다.

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CCFL의 세경화와 장수명에 대한 특성 분석 (The study of the CCFL for the fine diameter & the long life)

  • 박두성;배경운;임영진;김병현;황세연
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 춘계학술대회 논문집 디스플레이 광소자분야
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    • pp.169-172
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    • 2004
  • 최근 LCD 노트북 제품의 고유한 특정인 경박단소가 요구되면서, 백라이트의 박형화로 인해 광원으로써 램프의 세경화에 대한 개발도 진행되고 있다. 특히, 노트북용 램프의 경우 발열이 심해 도광판을 비롯한 시트류의 주름현상이 발생하며, 수명연장을 위해서 전극의 표면적이 넓거나 일함수(work functuon)가 작은 재질의 개발이 필요하다. 따라서 노트북용으로 저발열, 장수명을 위한 램프를 개발하고 있으며, 본 연구에서도 기존 Ni 전극을 사용한 램프 대비 Nb, Mo, Ta 전극을 사용했을때 통일한 구동조건에서 103%의 휘도특성 개선을 확인할 수 있었고 수명면에서도 기존 Ni 전극 대비 일함수가 낮은 Nb, Mo, Ta 전극을 사용한 램프의 경우 시간경과에 따른 휘도저하가 낮은 것으로 나타났다.

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자동차 에어컨용 압축기 사판의 표면 형태에 따른 마찰 마모 거동 (Wear and Friction Behavior on the Surface of Swash Plate of Compressor for Air Condition System of Automobile)

  • 권윤기;이건호;이기천
    • Tribology and Lubricants
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    • 제27권2호
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    • pp.88-94
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    • 2011
  • The tribological characteristics of the swash plate surface of a compressor which is for automobile were investigated. For surface treatments, PTFE and $MoS_2$ are used as a solid lubricant, together with copper alloy. Test condition is set considering actual driving condition. Wear testing is conducted using pin on disk type tester, and the coefficient of friction and the temperature on friction surface are measured. Also, to determine the wear patterns, cross-section of friction surface is analyzed by SEM(scanning electrode microscope). The $MoS_2$, both at dry and lubricated conditions, friction surface and the coefficient of friction maintained rather stable results. But, the PTFE, at oil less condition, sample resulted in rather unstable condition. In case of copper alloy, quite higher friction coefficients(higher than 0.1) were obtained at dry condition. At the temperature of $125^{\circ}C$, seizure has occurred.