• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2003.10a
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• pp.54-54
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• 2003

DLC films were deposited on Si(100) substrates by inductively coupled plasma (ICP) assisted chemical vapor deposition (CVD). A mixture of acetylene (C$_2$H$_2$) and argon (Ar) gases was used as the precursor and plasma source, respectively. The structure of the films was characterized by the Raman spectroscopy. Results from the Raman spectroscopy analysis indicated that the property change of the DLC films is due to the sp$^3$ and sp$^2$ ratio in the films under various conditions such as ICP power, working pressure and RF substrate bias. The hydrogen content in the DLC films was determined by an electron recoil detector (ERB). The roughness of the films was measured by atomic force microscope (Am). A microhardness tester was used for the hardness and elastic modulus measurement. The DLC film showed a maximum hardness of 37㎬. In this work, the relationship between deposition parameters and mechanical properties were discussed.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.44-44
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• 2003

Growth mechanism of carbon nanotubes(CNTs) synthesized by chemical vapor deposition is abided by two growth modes. These growth modes are classified by the position of activated catalytic metal particle in the CNTs. Growth mode can be also affected by interaction between substrate and catalytic metal and induced energy such as thermal and plasma. We studied the reaction of catalytic metal to the substrate and growth mode of CNTs. Various substrates such as Si(100), graphite plate, coming glass, sapphire and AAO membrane are used to study the relation between catalytic metal and substrate in the synthesis of CNTs. For catalytic metal, thin film was deposited on various substrate via sputtering technique with a thickness of ∼20nm and magnetic fluids with none-sized particles were dispersed on AAO membrane. After laying process on AAO membrane, it was dried at 80$^{\circ}C$ for 8 hour. Synthesizing of CNTs was carried out at 900$^{\circ}C$ in NH3/C2H2 mixture gases flow for 10minutes.

• Proceedings of the Korean Magnestics Society Conference
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• 2003.06a
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• pp.194-194
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• 2003

As a result of the recent miniaturization an enhancement in the performance of thin film inductors and thin film transformers, there are increased demands for the thin films with high magnetic permeability in the high frequency range, high saturation magnetization, in high electrical resistivity, and low coercive force. In order to improve high frequency properties, we will investigate anisotropy field by shape and size of pattern. The Fe-Al-O thin films of 16mm and 1 $\mu\textrm{m}$ thickness were deposited on Si wafer, using RF magnetron reactive sputtering technique with the mixture of argon and oxygen gases. The fabricating conditions are obtained in the working partial pressure of 2mTorr, O$_2$ partial pressure of 5%, input power of 400W, and Al pellets on an Fe disk with purity of 99,9%. Magnetic properties of the continuous films as followed: the 4$\pi$M$\_$s/ of 19.4kG, H$\_$c/ of 0.6Oe, H$\_$k/ of 6.0Oe and effective permeability of 2500 up to 100㎒ were obtained. In this work, we expect to enhance effect of magnetic anisotropy on patterned of Fe-Al-O thin films.

• Journal of the Korea Safety Management & Science
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• v.25 no.1
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• pp.51-58
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• 2023

Determination of explosion reference pressure is important in designing and testing flameproof enclosures (Ex d). Although relative humidity affects to explosion pressure, its effect is not well investigated for the gas group IIB, IIA, and I. This study tested explosion pressure for Ethylene (8 vol.%), Propane (4.6 vol.%), and Methane (9.8 vol.%), which are the representative gas of the gas group IIB, IIA, and I, at ambient temperature and atmospheric pressure (1 atm) under different relative humidity (0% ~ 80%). Ethylene- and Propane-air mixed gases generally tended to decrease as the relative humidity increased; however, explosion pressure was largely dropped at 20% of relative humidity compared to 0% and 10% of relative humidity. On the other hand, Methane-air mixture gas showed similar pressures at 0% and 10% of relative humidity; but no explosion occurred at more than 20%. The results of this study can be used in setting a testing protocol of explosion reference pressure for designing and testing a flameproof enclosure.

• Membrane Journal
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• v.21 no.3
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• pp.290-298
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• 2011

The influence of co-existing gases on the hydrogen permeation was studied through a Pd-coated $V_{53}Ti_{26}Ni_{21}$ alloy membrane. The hydrogen permeation characteristics of Pd-coated $V_{53}Ti_{26}Ni_{21}$ alloy membrane have been investigated in the pressure range 1-3 bar under pure hydrogen and hydrogen mixture gas with carbon dioxide and carbon monoxide at $450^{\circ}C$. Preliminary hydrogen permeation experiments have been confirmed that hydrogen flux was $5.36mL/min/cm^2$ for a Pd-coated $V_{53}Ti_{26}Ni_{21}$ alloy membrane (thick: 0.5 mm) using pure hydrogen as the feed gas. In addition, hydrogen fluxes were 4.46, 5.20, $3.91mL /min/cm^2$ for$V_{53}Ti_{26}Ni_{21}$ alloy membrane using $H_2/CO_2$, $H_2/CO$ and $H_2/CO_2/CO$ as the feed gas respectively. Therefore, the hydrogen permeation flux decreased with decrease of hydrogen partial pressure irrespective of temperature and pressure when $H_2/CO_2$, $H_2/CO$ and $H_2/CO_2/CO$ mixture applied as feed gas respectively and permeation fluxes were satisfied with Sievert's law in different feed conditions. It was found from XRD results after permeation test that the Pd-coated $V_{53}Ti_{26}Ni_{21}$ alloy membrane had good stability and durability for various mixtures feeding condition.

• Journal of Energy Engineering
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• v.6 no.1
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• pp.96-103
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• 1997

Coal gasification experiments were performed to characterize the bench scaled unit of 0.5∼1.0 T/D entrained coal gasifier developed by KIER. Datong coal from China was selected for this study. The system was operated at the temperature range of 1300∼1550$^{\circ}C$, with 62.5% of coal water mixture on the basis of dry coal. Oxygen and slurry mixture were preheated prior to feeding into burner and the ratio of oxygen/coal was in the range of 0.8∼1.2. In the preparation of coal water mixture, 0.3 wt% of CWM1002 and 0.05 wt% of NaOH wire added to reduce viscosity as well as to enhance theological properties of slurry. The resultant gaseous products consist primarily of hydrogen, carbon monoxide, carbon dioxide, and minor amounts of methane. Formation of H$_2$and CO was increased, while CO$_2$was decreased as the reacting temperature being increased due to the char-CO$_2$reaction. Maximum production of H$_2$and CO occurred in the O$_2$/coal ratio of 0.9 at 1530$^{\circ}C$. Heating values of product gases were in the range of 1700∼2400 kcal/N㎥.

• Applied Chemistry for Engineering
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• v.7 no.4
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• pp.605-613
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• 1996

The permeation characteristics were investigated for pure carbon dioxide and methane through asymmetric cellulose acetate(CA) membrane, composite cellulose acetate membrane and asymmetric cellulose triacetate(CTA) membrane. In particular, the effect of operating pressure on the permeation performance was examined. And the permeation behavior for a mixture of carbon dioxide and methane ($CO_2/CH_4=57.6/42.4$) was also investigated and compared to the characteristics obtained from pure gases. The experiments were run at the range of partial pressure from 25 to 125 psig, and room temperature. The permeation behaviors of the CA composite and CTA membrane were similiar to those of the CA membrane. The permeation rates of pure carbon dioxide for CA, CA composite and CTA membrane were increased slightly with an increase in upstream partial pressure, while in the case of pure methane they were independent of upstream partial pressure. For a binary mixture of carbon dioxide and methane, abnormal permeation behaviors were observed due to the plasticization of carbon dioxide and the competition effect of each gas. The separation factor and permeation rate for CTA membrane were found to be higher than those for CA membrane, but the mechanical strength of CTA membrane was very poor. And the permeation rate for CA composite membrane was higher than that for CA membrane. Consequently, it can be said that the CA composite membrane is a strong candidate for the separation of $CH_4$ and $CO_2$.

• Korean Journal of Environmental Agriculture
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• v.24 no.4
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• pp.386-390
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• 2005

This study was conducted to develop the biofilter fur reducing ammonia $(NH_3)$ and hydrogen sulfide $(H_2S)$ gas emission from a pig house. A biofilter was designed and constructed by a type of squeeze air into the column type of air flow upward. Its column size was ${\Phi}260{\times}360mm$. It was used pressure drop gauge, turbo blower, air temperature, velocity sensor and control program that was programed by LabWindows CVI 5.5. Mixing materials were consisted with composted pine tree bark and perlite with 7:3 ratio (volume). The biofilter media inoculated with ammonia (Rhodococcus equi A3) and hydrogen sulfide (Alcaligenes sp. S5-5.2) oxidizing microorganisms was installed in a commercial pig house to analyzed the effectiveness of biogas removal for 10 days. Removal rates of ammonia and hydrogen sulfide gases were 90.8% and 81.5%, respectively. This result suggests that the pine compost-perlite mixture biofilter is effective and economic for reducing ammonia ana hydrogen sulfide gases.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.122-122
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• 2008

Recently, Metal/Alumina/Silicon-Nitride/Silicon-Oxide/Silicon (MANOS) structures are one of the most attractive candidates to realize vertical scaling of high-density NAND flash memory [1]. However, as ANO layers are miniaturized, negative and positive bias temperature instability (NBTI/PBTI), such as the flat band voltage shift, ${\Delta}V_{FB}$, the interfacial trap density increase, ${\Delta}D_{it}$, the gate leakage current, ${\Delta}I_G$. and the retention characteristics, in MONOS capacitors, becomes an important issue in terms of reliability. It is well known that tunnel oxide degradation is a result of the oxide and interfacial traps generation during FN (Fowler-Nordheim) stress [2]. Because the bias temperature stress causes an increase of both interfacial-traps and fixed oxide charge could be a factor, witch can degrade device reliability during the program and erase operation. However, few studies on NBTI/PBTI have been conducted on improving the reliability of MONOS devices. In this work, we investigate the effect of post-annealing gas on bias temperature instability (BTI), such as the flat band voltage shift, ${\Delta}V_{FB}$, the interfacial trap density shift, ${\Delta}I_G$ retention characteristics, and the gate leakage current characteristics of MANOS capacitors. MANOS samples annealed at $950^{\circ}C$ for 30 s by a rapid thermal process were treated via additional annealing in a furnace, using annealing gases $N_2$ and $N_2-H_2$ (2 % hydrogen and 98 % nitrogen mixture gases) at $450^{\circ}C$ for 30 min. MANOS samples annealed in $N_2-H_2$ ambient had the lowest flat band voltage shift, ${\Delta}V_{FB}$ = 1.09/0.63 V at the program/erase state, and the good retention characteristics, 123/84 mV/decade at the program/erase state more than the sample annealed at $N_2$ ambient.

• Applied Chemistry for Engineering
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• v.29 no.1
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• pp.10-17
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• 2018

POU (point of use) scrubbers were applied for the treatment of waste gases including PFCs (perfluorocompounds) exhausted from the CVD (chemical vapor deposition), etching, and cleaning processes of semiconductor and display manufacturing plant. The GWP (global warming potential) and atmosphere lifetime of PFCs are known to be a few thousands higher than that of $CO_2$, and extremely high temperature more than 3,000 K is required to thermally decompose PFCs. Therefore, POU gas scrubbers based on the thermal plasma technology were developed for the effective control of PFCs and industrial application of the technology. The thermal plasma technology encompasses the generation of powerful plasma via the optimization of the plasma torch, a highly stable power supply, and the matching technique between two components. In addition, the effective mixture of the high temperature plasma and waste gases was also necessary for the highly efficient abatement of PFCs. The purpose of this paper was to provide not only a useful technical information of the post-treatment process for the waste gas scrubbing but also a short perspective on R&D of POU plasma gas scrubbers.