• Design & Manufacturing
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• 제2권1호
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• pp.33-38
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• 2008

As consumer in optics, electronics, aerospace and electronics industry grow, the demand for ultra precision aspherical surface lens increases higher. Precision turning with single-diamond tools has a long history of development for fabrication of optical quality surfaces since the advent of aerostatic rotary spindles and precise linear motion guide ways. To enhance the precision and productivity of ultra precision aspherical surface micro lens, the following specification of ultra precision grinding system is required: the highest rotational speed of the grinder is 100,000rpm and its turning accuracy is $0.1{\mu}m$, positioning accuracy is $0.1{\mu}m$. The development process of the grinding system for the ultra precision aspherical surface micro lens for optoelectronics industry is introduced. In the work reported in this paper, an intelligent grinding system for ultra precision aspherical surface machining was designed by considering the factors affecting the surface roughness and profiles accuracy. An aerostatic form was adopted to build the spindle of the workpiece and the spindle of grinder and ultra precision LM guide way was adopted in this system. And this paper deals with mirror grinding of an aspheric surface micro lens by resin bonded diamond wheel and spherical lens of BK7. It results was that a form accuracy of $0.6{\mu}m$ P-V and a surface roughness of $0.006{\mu}m$ Rmax.

• 한국안전학회지
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• 제10권3호
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• pp.30-41
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• 1995

This paper proposed a simple method for measuring surface roughness of ground surface. Utilizing non-contact in-process measuring system using the diode laser. The measurement system is consisted of a laser unit with a diode laser and a cylindrical lens, a detecting unit with polygon mirror and CCD array sensor, and a signal processing unit with a computer and device. During operation, this measuring system can provide information on surface roughness in the measuring distance with a single sampling and simultaniously monitor the state of the grind wheel. The experimental results, showed that the Increase of the feed rate and the dressing speed an caused increase in the surface roughness and when the surface roughness is 4Rmax-10Rmax, the cutting speed is 1653m/min-1665m/min, the table speed is 0.2n1/min -0.9m/min, the dressing speed is 0.2mm/rev～0.4mm/rev, the stylus method and the in-process method can be obtained the same results. Thus, under limited working conditions, using the proposed system, the surface roughness of the ground surface during cylindrical grinding can be obtained through the in-process measurement method using the diode laser.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 춘계학술대회 논문집
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• pp.24-28
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• 1996

Mirror-like polishing system of hemisphericall high-speed precision bearing for digital VTR drum was developed. Mechamism of the polishing process was analyzed in the view point of polishing contact range and contact length between the tool and the workpiece surface. It was suggested that the two stage polishing process adoptiong the diamond grinding wheel and polishing tool instead of multistage lapping processes, which enables the mass production of the bearing by reduction of polishing time.

• 동력기계공학회지
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• 제6권2호
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• pp.60-67
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• 2002

연삭가공은 나노스케일(Nano-scale)의 미소한 입자 절삭날을 이용한 가공으로, 공작물의 표면을 경면(Mirror surface)으로 가공할 수 있어 제품의 최종 마무리공정으로 사용되어 왔다. 그러나 연삭공정에 있어서는 공구(연삭숫돌)의 수명이 다하거나 가공계(Machining system)가 불안정해지면 채터진동과 연삭버닝 등의 현상이 발생하여 가공물의 표면품위를 저하시키는 요인으로 작용하고 있다. 따라서 본 연구는 원통플른지 연삭공정을 대상으로 공작물에서 발생하는 음향방출 신호와 연삭기 주축 모터의 동력 신호를 연삭가공 중에 검출하고, 이를 신경회로망에 적용하여 연삭가공 상태를 진단하는 시스템을 구축하고, 그 성능을 평가하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1994년도 추계학술대회 논문집
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• pp.98-102
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• 1994

There are many difficulties in automatic polishing for die & mold surfaces. Even though the process has been studied in the past 15 years, it has not been achieved yet, but by the process of actual hand work of well-skilled workers. A new magentic assisted polishing process, which is one of the potential method for automation of surface finishing has been studied in the past 10 years by colleagues. The process has many merits, but on the other hand also has demerits, one being low efficiency of gridability by comparision with grinding wheel polish. Therefore, some attempts were tried to improve the grindability by adopting electropolishing, ultra-high speed milling, 5-axis controlled machine etc... most recently by collegues. This study also aims to improve the efficiency of polishing by introducing the easily-polished shape surface milling method equalizing the tool feed per tooth to the pick feed. This milling method was experimentally confirmed to have sufficient grindability to polish milled surface (with 10 .mu. mRmax surface roughness) into mirror surface (with 0.4 .mu. mRmax surface roughness).

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1992년도 추계학술대회 논문집
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• pp.115-120
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• 1992

Mirror-surface machining is very important machining technology to manufacture optical parts. especially brittle materials. In case of optical plastics, it is produced through both grinding and polishing till now. New machining method which is more efficient and contributed to the protection of the environmental pollution is, therefore, studied. In this , experimental results and an analysis of surface roughness in ultrasonic vibration cutting of optical plastic (CR-39) which is used for optical lens is presented. In results, a comparison of the micro-structure of machined surfaces produced by cutting with ultrasonic vibration and conventional turning is presented by analyzing S.E.M. photograph. Also, wavelength spectrum analysis is performed to investigate the surface-characteristics machined by ultrasonic vibration cutting.

• Journal of Mechanical Science and Technology
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• 제19권8호
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• pp.1576-1581
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• 2005

Generally, the optical components are fabricated by grinding, lapping, and polishing. And, those processes take long time to obtain such a high surface quality. Therefore, in the case of large optical component, the on-machine inspection (OMI) is essential. Because, the work piece is fragile and difficult to set up for fabricating and measuring. This paper is concerned about a swing-arm method for measuring surface profile of large optical concave mirror. The measuring accuracy and uncertainty for suggested method are studied. The experimental results show that this method is useful specially in lapping process with the accuracy of $3\~5\;{\mu}m$. Those inspection data are provided for correcting the residual figuring error in lapping or polishing processes.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.354-361
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• 2005

In high speed cutting process, due to the friction between the tool and workpiece, a temperature rise of contacting part is serious. It need to develop cutting tool for overcoming such a poor condition. So now, some studies, the optimization of tool shapes, the fine grains of tool material, multi-layer coating of tools are processing. If mirror finishing on the tool is processed, there is advantage of relation between chip and tool, because of less friction, and also tool's lift would be increased. As a result mirror like finishing is expected efficient enhancement of tool. Generally, it is too difficult to process by a general way for tools of complex shapes, it is required a new method to process such complex shape tools. The magnetic fluid polishing technique can polish the workpiece of complex shape, because the polishing method which polishes as compress the workpiece by the magnetism abrasives to arrange to the linear according to the line of magnetic force. In this paper, We polished the surface of the high speed cutting tool using the magnetic fluid polishing technique, to enhance the performance of the high speed cutting tool.

• 한국정밀공학회지
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• 제18권11호
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• pp.51-57
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• 2001

A light beam reflected from a machined surface generally containes information concerning about its surface roughness. This study examines and proposes a surface roughness measurement technique for on-machine measurement of machined surfaces. The technique is based on the measurement of a reflected laser beam pattern and the statistical analysis of its light intensity distribution. The surface roughness was found to be closely related to the standard deviation of the light intensity on the primary axis of the reflected pattern. An image acquisition device is made up of a laser diode, a half mirror, a screen, and a CCD camera. The exact image with the primary and secondary axes of a reflected laser beam pattern is calculated through such image processing algorithm as thresholding, edge detection, image rotation, segmentation, etc. A median filter and a surrounding light correction algorithm are improve the image quality and reduce the measuring error. Using the developed measuring device the effect of screen materials and workpiece and workpiece materials was investigated. Experimental results regarding to relatively high-quality surfaces machined by grinding, polishing, lapping processes have shown the measurement error is within 10% in the range of $0.1{mu}m~0.8{\mu}m R_q.$Therefore, the proposed method is thought to be effectively used when quick measurements is needed with workpieces fixed on the machine.

• 마이크로전자및패키징학회지
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• 제27권3호
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• pp.89-93
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• 2020

반도체 패키지의 경박단소화로 인해 발생하는 복잡한 휨 거동은 내부 응력을 발생시켜 박리나 균열과 같은 다양한 기계적인 결함을 야기한다. 이에 따른 수율 감소를 막기 위해 휨 거동을 정확하게 예측하려는 노력은 다양한 측면에서 그 접근이 이루어지고 있다. 이 중 패키지를 구성하는 주 재료인 실리콘 웨이퍼는 일반적으로 균질한 물질로 취급되어 열에 의한 휨 거동은 전혀 없는 것으로 묘사된다. 그러나 실리콘을 얇게 가공하기 위해서 진행되는 그라인딩과 폴리싱에 의해 상온에서 휨이 발생한다는 사실이 보고되어 있고, 이는 표면에 형성되는 damage layer가 두께 방향으로 불균질함을 발생시키는 것으로부터 기인한다. 이에 본 논문에서는 반도체 패키징 공정 중 최고온 공정 과정인 solder reflow 온도에서 단면 연마된 웨이퍼가 나타내는 휨 거동을 측정하고, 이러한 휨 량이 나타나는 원인을 연마된 면과 그렇지 않은 면의 열팽창계수를 측정함으로써 밝혀내었다. 측정에는 미세 변형률과 형상이 모두 측정 가능한 3차원 디지털 이미지 상관법(Digital Image Correlation; DIC)을 이용하였다.