• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1995년도 추계학술대회 논문집
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• pp.76-81
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• 1995

MgO single crystal is widely used as a the material of high temperature resistance, but is difficult to grind because of brittleness and crack generation. Therefore, superabrasive diamond wheel is required for mirror like grinding of this material. This study describes a newly proposed optimum in-process electrolytic dressing system for carrying out effective dressing of superbrasive diamond wheel. Using this system the grinding surface of MgO single crystal was improved, the grinding force was very l9ow and crack was removed. In conclusion, this system is good to obtain the efficient grinding and mirror-like grinding without crack of MgO single crystal.

• 한국표면공학회지
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• 제49권3호
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• pp.231-237
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• 2016

This article reports a new chemical bath for preparing a mirror-like surface of AZ31 Mg alloy. In order to find an appropriate chemical polishing solution, four different acidic solutions of sulphuric acid, nitric acid, acetic acid and a specially designed mixture of nitric acid and acetic acid were investigated in view of the changes in surface appearance, roughness and dissolution rate of AZ31 Mg alloy. The surface scales on AZ31 Mg alloy were readily removed by all the acidic solutions, but a reflective surface was produced only by etching in the specially designed solution, and only after a specific etching time. The surface roughness increased with etching time in sulphuric acid, nitric acid, and acetic acid, but it lowered after a specific etching time in the specially designed mixture of nitric acid and acetic acid. Dissolution rate of the alloy in the specially designed mixture of nitric acid and acetic acid appeared to be more than twice than that in separate nitric acid or acetic acid. In this work, we recommend the mirror-like surface of AZ31 Mg alloy obtained by polishing for an optimum time in a mixture of nitric acid and acetic acid for following surface finishings, chemical conversion coating, electroplating, electrophoretic painting and anodizing treatment.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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• pp.50-50
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• 2000

In this paper, a new measuring system is :proposed which can measure the fine 6-DOF displacement of rigid bodies. Its measurement principle is based on detection of laser beam reflected from a specially fabricated mirror that looks like a triangular pyramid having an equilateral cross-sectional shape. The mirror has three lateral reflective surfaces inclined 45$^{\circ}$ to its bottom surface. We call this mirror 3-facet mirror. The 3-facet mirror is mounted on the object whose 6-DOF displacement is to be measured. The measurement is operated by a laser-based optical system composed of a 3-facet mirror, a laser source, three position-sensitive detectors(PSD). In the sensor system, three PSDs are located at three corner points of a triangular formation, which is an equilateral triangular formation tying parallel to the reference plane. The sensitive areas of three PSDs are oriented toward the center point of the triangular formation. The object whose 6-DOF displacement is to be measured is situated at the center with the 3-facet mirror on its top surface. A laser beam is emitted from the laser source located at the upright position and vertically incident on the top of the 3-fatcet mirror. Since each reflective facet faces toward each PSD, the laser beam is reflected at the 3-facet mirror and splits into three sub-beams, each of which is reflected from the three facets and finally arrives at three PSDs, respectively. Since each PSD is a 2-dimensional sensor, we can acquire the information on the 6-DOF displacement of the 3-facet mirror. From this principle, we can get 6-DOF displacement of any object simply by mounting the 3-facet mirror on the object. In this paper, we model the relationship between the 6-DOF displacement of the object and the outputs of three PSDs. And, a series of simulations are performed to demonstrate the effectiveness of the proposed method. The simulation results show that the proposed sensing system can be an effective means of obtaining 3-dimensional position and orientation of arbitrary objects.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 춘계학술대회 논문집
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• pp.24-28
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• 1996

Mirror-like polishing system of hemisphericall high-speed precision bearing for digital VTR drum was developed. Mechamism of the polishing process was analyzed in the view point of polishing contact range and contact length between the tool and the workpiece surface. It was suggested that the two stage polishing process adoptiong the diamond grinding wheel and polishing tool instead of multistage lapping processes, which enables the mass production of the bearing by reduction of polishing time.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.131.5-131
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• 2001

A new measurement method to measure vibrational motions of objects is presented. The original principle is similar to the previous work that utilized a 3-facet mirror to obtain three dimensional positions and orientations of rigid bodies. While the previous work was presented for only stationary objects, in this paper, we newly investigate the feasibility of this method for dynamic applications. The 3-facet mirror that looks like a triangular pyramid having an equilateral cross-sectional shape. The mirror has three lateral reflective surfaces inclined 45 degrees to its bottom surface, and its mounted on the object whose motion is to be measured, As optical components, a He-Ne laser source and three position-sensitive detectors(PSD) are used. The laser beam is emitted from the He-Ne laser source located at the upright position and vertically incident to the top of the 3-facet ...

• 한국레이저가공학회지
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• 제1권1호
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• pp.24-29
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• 1998

A new wide laser beam optical system for the laser materials processing has been developed with a polygonal mirror. It consists of polygonal mirror and cooling part that prevents the surface of rotating polygonal mirror from damage by heat. The polygonal minors have been designed and made as 24 and 30 facets in pyramid type. This system provides a uniform linear laser heat source with the surface scanning width from 15 to 50mm according to the scanning height To examine the wide laser beam, He-Ne laser is used. Also, Acryl is used to confirm the laser beam pattern by bum-pattern print To analyze the energy distribution of the wide laser ben empirical values and theoretical values are compared and discussed. To improve the efficiency of the wide laser beam optical system, methods are suggested by the optical theories. For larger area processing like turbine blade, drawing blade, cold roller and guide plate, optimal overlapping locations have been calculated and analyzed by geometric and optical theories.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.918-921
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• 2002

Some investigators who have tried to achieve the highly smooth surface finish using electrochemical processes have reported that high current density produced lustrous surfaces while the opposite conditions produced a passive layer and had a tendency to produce a black surface. However, processing at a low current density may produce a non-lustrous surface but the improvement of dimensional accuracy of the surface is significant. The surface with pulse process was a bit more lustrous than with continuous current but the black passive layer still could be found at grooved surface. There are two ways to achieve highly smooth surface finish. One is brushing it with a brush the other is electrochemical machining (ECM) with high current. The former method is the most common polishing practice, but not only may the surface obtained differ from operator to operator, but precision smooth surface on micro grooves are difficult to obtain. The latter one recently has been used to produce a highly smooth surface after EDM process. However, the material removal rate in ECM with high current is relatively high. Hence the original shape of the micro grooves, which was formed by electrochemical micro-machining (EMM) process, may be destroyed. In this study, an electrochemical polishing process using pulse current is adopted as a possible alternative process when micro grooves formed by EMM process should be polished. Mirror-like micro grooves with lustrous and smooth surface can be produced electrochemically with pulse current because the voltage and current used can be lower than the case of continuous current. This study will discuss the accurate control of physical and electrical conditions so as to achieve mirror-like micro grooves with lustrous and smooth surface without destroying the original shape of micro grooves.

• 한국공작기계학회논문집
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• 제15권1호
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• pp.32-38
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• 2006

The magnetic fluid polishing technique can polish the tool of complex shape, because the polishing method which polishes as compress the workpiece by the magnetism abrasives to arrange to the linear according to the line of magnetic force. Therefore, we producted the magnetic fluid polishing device in order that mirror like finishing processes the tool surface. In order to a polishing condition selection, polishing characteristic was estimated by polishing conditions which are magnetic flux density, polishing speed, grain size, magnetic fluid. The tool was polished to the selected polishing condition. The result to evaluate the polished tool's performance with the cutting force and tool wear, the polished tool's performance was improved compared with the tool not to polish.

• 전자공학회논문지A
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• 제33A권10호
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• pp.98-106
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• 1996

A thin film of aluminum for ultra large scale integrated circuits metalization has been deposited on TiN and SiO$_{2}$ substrates by plasma assisted chemical vapor deposition using DMEAA (dimenthylethylamine alane) as a precursor. The effects of plasma on surface topology and growth characteristics were investigated. Thermal CVD Al could not be got continuous films on insulating subsrate such as SiO$_{2}$. However, it was found that Al films could be deposited on SiO$_{2}$ substate without any pretreatments by the hydrogen plasma for pyrolysis of DMEAA. Compared to the thermal CVD, PACVD films showed much better reflectance and resistance on TiN and SiO$_{2}$ substrate. We obtained mirror-like PACVD Al film of 90% reflectance and resistance on TiN and SiO$_{2}$ substrates. We obtained mirror-like PACVD Al film of 90% reflectance on TiN substrate. Excellent conformal step coverage was obtained on submicron contact holes ;by the PACVD blanket deposition.

• 한국기계가공학회지
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• 제7권3호
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• pp.81-86
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• 2008

I present a 3-D profiler specially devised for the profile measurement of specular surfaces that requires precision shape accuracy up to a few nanometer. A profile is reconstructed from the curvature of a test part of the surface at several locations along a line. The local curvature data are acquired with White-light Scanning Interferometry. Test measurement proves that the proposed profiler is well suited for the specular surface inspection like precision mirror.