• Journal of the Korean Society for Precision Engineering
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• v.24 no.2 s.191
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• pp.13-18
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• 2007

• Journal of Sensor Science and Technology
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• v.11 no.1
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• pp.39-47
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• 2002

Optical disk drives read information by replacing a laser beam on the disk track. As information has become larger, the more accurate position control of a laser beam is necessary. In this paper, we report the analysis and fabrication of the micro mirror for optical disk drivers. The mirror was fabricated by using MEMS technology. Especially, the Process using the lapping and polishing step after the bonding of the mirror and electrode plates was employed for the process reliability. The mirror size was $2.5mm{\times}3mm$ and it needed about 35V for displacement of $3.2{\mu}m$.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.1 s.178
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• pp.97-104
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• 2006

ELID(Electrolytic In-process Dressing) grinding is an excellent technique for mirror grinding of various advanced metallic or nonmetallic materials. A polishing process is also required for elimination of scratches present on ELID grinded surfaces. MAP(Magnetic Assisted Polishing) has been used as polishing method due to its high polishing efficiency and to its resulting in a superior surface quality. This study is describing an effective fabrication method combining ELID and MAP of nano-precision mirror grinding for glass-lens molding mould. It also presents some techniques for achieving the nanometer roughness of the hard metals, such as WC-Co, which are extensively used in precision tooling material.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1985-1987
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• 2002

Silicon bulk micromachined micromirrors are designed and fabricated for out-of-plane right angle reflection. The micromirror is comprised of a minor plate, springs, magnetic bars and electrodes. Single crystalline silicon is used for a flatness improvement of a mirror plate. Out-of-plane right angle reflection requires a 45 degree operation of the micromirror. The micromirrors are operated by applying a magnetic field, which is generated by a coil located below a substrate. For an individual mirror operation, each mirror is clamped using an electrostatic force against the electromagnetic force. Angular deflections are measured and compared with theoretical data. The micro mirror operates up to 45 degree when magnetic field is 4 kA/m which is generated by a 115 mA coil current Simple addressing is tested, and it is shown that a clamping voltage is less than 5V.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.59-64
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• 2002

One of the exciting research areas of the X-ray microscope is the observation of a living cell. In order to study a living cell with high resolution the order of the several tens nm, we need to improve the efficiency of mirrors which are components of an X-ray microscope system. In this paper we present the mirror design and manufacture to give a high resolution and reflectivity. We designed Wolter type I the condenser and objective mirror with the several tens of nm resolution. According to mirror design. we made the program using the visual basic. Using the new processing method as well as the ultra-precision diamond cutting, we directly processed the inside of an aluminum hulk in order to manufacture mirrors. From the experimental result, we think that the new processing method will improve a high reflectivity through the improved cutting tools and optimum cutting conditions.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1995.11a
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• pp.183-186
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• 1995

The fabrication of dielectric multilayer mirror(DMM) optimized at the wavelength of 1.55$\mu\textrm{m}$ and its spectral properties were investigated. The materials used in the fabrication of DMM are TiO$_2$-SiO$_2$, which have the advantage of yielding high reflectance for relatively small numbers of layers. The optical constants of TiO$_2$single film were obtained by using a modified envelope method. The reflectances of DMMs with 3,7,11 and 23 layers were 58%, 89%, 97% and 99.9% at the wavelength of 1.55$\mu\textrm{m}$, respectively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.308-308
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• 2004

쾌속조형기술은 설계형상의 확인, 시작품의 제작, 금속 및 세라믹 부품에의 응용, 동시공학, 의료, 마이크로 머신 둥 제조업 전반에 걸쳐서 많은 응용이 이루어지고 있다 여러 가지의 기술들이 개발되고 이를 응용한 장비들이 생산되어 보급됨으로써 이러한 적용분야들은 점차 확대되고 있다. 본 연구에서는 분말을 소결, 적층하여 원하는 형상을 만들어내는 SLS(Selective Laser Sintering) 장비를 개발하는데 있어서 레이저 경로의 제어를 통한 분말을 소결시키는 부분인 레이저 주사 시스템(laser scanning system)을 개발하고자 한다.(중략)

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.367-368
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• 2012

• Proceedings of the Materials Research Society of Korea Conference
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• 1995.11a
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• pp.16-16
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• 1995

• Proceedings of the Optical Society of Korea Conference
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• 2005.02a
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• pp.314-315
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• 2005