• Title/Summary/Keyword: Microwave probe

Search Result 71, Processing Time 0.02 seconds

The Gettering Effect of Boron Doped n-type Monocrystalline Silicon Wafer by In-situ Wet and Dry Oxidation

  • Jo, Yeong-Jun;Yun, Ji-Su;Jang, Hyo-Sik
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2012.08a
    • /
    • pp.429-429
    • /
    • 2012
  • To investigate the gettering effect of B-doped n-type monocrystalline silicon wafer, we made the p-n junction by diffusing boron into n-type monocrystalline Si substrate and then oxidized the boron doped n-type monocrystalline silicon wafer by in-situ wet and dry oxidation. After oxidation, the minority carrier lifetime was measured by using microwave photoconductance and the sheet resistance by 4-point probe, respectively. The junction depth was analyzed by Secondary Ion Mass Spectrometry (SIMS). Boron diffusion reduced the metal impurities in the bulk of silicon wafer and increased the minority carrier lifetime. In the case of wet oxidation, the sheet resistance value of ${\sim}46{\Omega}/{\Box}$ was obtained at $900^{\circ}C$, depostion time 50 min, and drive-in time 10 min. Uniformity was ~7% at $925^{\circ}C$, deposition time 30 min, and drive-in time 10 min. Finally, the minority carrier lifetime was shown to be increased from $3.3{\mu}s$ for bare wafer to $21.6{\mu}s$ for $900^{\circ}C$, deposition 40 min, and drive-in 10 min condition. In the case of dry oxidation, for the condition of 50 min deposition, 10 min drive-in, and O2 flow of 2000 SCCM, the minority carrier lifetime of 16.3us, the sheet resistance of ${\sim}48{\Omega}/{\Box}$, and uniformity of 2% were measured.

  • PDF

Growth and Resistance Properties of Carbon Nanowall According to the Variation of Reaction Gas (반응가스의 변화에 따른 탄소나노월의 성장 및 저항 특성)

  • Kim, Sung Yun;Lee, Sangjoon;Choi, Won Seok;Joung, Yeun-Ho;Lim, Dong-Gun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.27 no.4
    • /
    • pp.217-220
    • /
    • 2014
  • Graphite electrodes are used for secondary batteries, fuel cells, and super capacitors. Research is underway to increase the reaction area of graphite electrodes. In this study, we have investigated the growth properties of carbon nanowall (CNW) according to the ingredient of gas. Microwave plasma enhanced chemical vapor deposition (MPECVD) system was used to grow CNW on Si substrate with a variety of the reaction gas. The planar and vertical growth conditions of the grown CNWs according to the ingredient of the gas were characterized by a field emission scanning electron microscopy (FE-SEM) and energy dispersive spectroscopy (EDS). The electrical characteristics of CNWs were analyzed using a 4-point probe.

Cloud Physics Observation System (CPOS) and Validation of Its Products (구름물리 관측시스템 및 산출물 검정)

  • Chang, Ki-Ho;Oh, Sung-Nam;Jeong, Ki-Deok;Yang, Ha-Young;Lee, Myoung-Joo;Jeong, Jin-Yim;Cho, Yohan;Kim, Hyo-Kyung;Park, Gyun-Myeong;Yum, Seong-Soo;Cha, Joo-Wan
    • Atmosphere
    • /
    • v.17 no.1
    • /
    • pp.101-108
    • /
    • 2007
  • To observe and analyze the cloud and fog characteristics, the METeorological Research Institute (METRI) has established the Cloud Physics Observation System (CPOS) by implementing the cloud observation instruments: Forward Scattering Spectrometer Probe (FSSP), PARticle SIze and VELocity (PARSIVEL), Microwave Radiometer (MWR), Micro Rain Radar (MRR), and 3D-AWS at the Daegwallyeong Enhanced Mountain Weather Observation Center. The cloud-related products of CPOS and the validation status for the size distribution of FSSP, the precipitable water of MWR, and the rainfall rate of MRR and PARSIVEL are described.

Development and evaluation of MR compatible patch antenna for hyperthermia (온열치료를 위한 MR호환 평판가열안테나 개발 및 성능평가)

  • Kim, D.H.;Chun, S.I.;Jang, M.Y.;Yoon, M.S.;Kim, Y.B.;Jung, B.D.;Nam, S.H.;Mun, C.W.
    • Journal of the Korean Society of Radiology
    • /
    • v.3 no.2
    • /
    • pp.17-21
    • /
    • 2009
  • The thermal treatment have been combined with MRI which is able to acquire both an anatomical image with high-contrast and a thermal image, and have recently used for removing the tumor effectively. This study is to make a patch antenna which is designed to operate at 2.45GHz that has compatibility with MRI. The characteristic and specific absorption rate(SAR) were confirmed using computer simulation and confirmed a possibility of hyperthermia by performing experiment.

  • PDF

An MMIC VCO Design and Fabrication for PCS Applications

  • Kim, Young-Gi;Park, Jin-Ho
    • Journal of Electrical Engineering and information Science
    • /
    • v.2 no.6
    • /
    • pp.202-207
    • /
    • 1997
  • Design and fabrication issues for an L-band GaAs Monolithic Microwave Integrated Circuit(MMIC) Voltage Controlled Oscillator(VCO) as a component of Personal Communications Systems(PCS) Radio Frequency(RF) transceiver are discussed. An ion-implanted GaAs MESFET tailored toward low current and low noise with 0.5mm gate length and 300mm gate width has been used as an active device, while an FET with the drain shorted to the source has been used as the voltage variable capacitor. The principal design was based on a self-biased FET with capacitive feedback. A tuning range of 140MHz and 58MHz has been obtained by 3V change for a 600mm and a 300mm devices, respectively. The oscillator output power was 6.5dBm wth 14mA DC current supply at 3.6V. The phase noise without any buffer or PLL was 93dB/1Hz at 100KHz offset. Harmonic balance analysis was used for the non-linear simulation after a linear simulation. All layout induced parasitics were incorporated into the simulation with EEFET2 non-linear FET model. The fabricated circuits were measured using a coplanar-type probe for bare chips and test jigs with ceramic packages.

  • PDF

Noninvasive Method to Distinguish between Glucose and Sodium Chloride Solution Using Complementary Split-Ring Resonator (Complementary Split Ring Resonator(CSRR)를 이용한 포도당과 염화나트륨 수용액의 비침습적 구별)

  • Jang, Chorom;Park, Jin-Kwan;Yun, Gi-Ho;Yook, Jong-Gwan
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
    • /
    • v.29 no.4
    • /
    • pp.247-255
    • /
    • 2018
  • In this work, glucose solution and sodium chloride solution were distinguished noninvasively using a microwave complementary split-ring resonator (CSRR). Based on the electrical properties of the two solutions measured using a open-ended coaxial probe, a CSRR was designed and fabricated for operation at a specific frequency that facilitates differentiating the two solutions. Furthermore, a polydimethylsiloxane mold was fabricated to concentrate the solution at a region where the electric field of the resonator was strongest, and a laminating film was used to prevent contact between the solution and resonator. Experiments were performed by dropping $50{\mu}L$ of the solution in steps of 100 mg/dL up to a maximum human blood glucose level of 400 mg/dL. Our experiments confirmed that the transmission coefficients ($S_{21}$) of glucose solution and sodium chloride solution exhibit variations of -0.06 dB and 0.14 dB, respectively, per 100 mg/dL concentration change at the resonance frequency. Thus, the opposite trends in the variation of $S_{21}$ with change in the concentration of the two solutions can be used to distinguish between them.

Optical and Electrical Properties of Fluorine-Doped Tin Oxide Prepared by Chemical Vapor Deposition at Low Temperature (저온 증착된 불소도핑 주석 산화 박막의 광학적·전기적 특성)

  • Park, Ji Hun;Jeon, Bup Ju
    • Korean Journal of Materials Research
    • /
    • v.23 no.9
    • /
    • pp.517-524
    • /
    • 2013
  • The electrical and optical properties of fluorine-doped tin oxide films grown on polyethylene terephthalate film with a hardness of 3 using electron cyclotron resonance plasma with linear microwave of 2.45 GHz of high ionization energy were investigated. Fluorine-doped tin oxide films with a magnetic field of 875 Gauss and the highest resistance uniformity were obtained. In particular, the magnetic field could be controlled by varying the distribution in electron cyclotron deposition positions. The films were deposited at various gas flow rates of hydrogen and carrier gas of an organometallic source. The surface morphology, electrical resistivity, transmittance, and color in the visible range of the deposited film were examined using SEM, a four-point probe instrument, and a spectrophotometer. The electromagnetic field for electron cyclotron resonance condition was uniformly formed in at a position 16 cm from the center along the Z-axis. The plasma spatial distribution of magnetic current on the roll substrate surface in the film was considerably affected by the electron cyclotron systems. The relative resistance uniformity of electrical properties was obtained in film prepared with a magnetic field in the current range of 180~200A. SEM images showing the surface morphologies of a film deposited on PET with a width of 50 cm revealed that the grains were uniformly distributed with sizes in the range of 2~7 nm. In our experimental range, the electrical resistivity of film was able to observe from $1.0{\times}10^{-2}$ to $1.0{\times}10^{-1}{\Omega}cm$ where optical transmittance at 550 nm was 87~89 %. These properties were depended on the flow rate of the gas, hydrogen and carrier gas of the organometallic source, respectively.

VOIDS LENSING OF THE CMB AT HIGH RESOLUTION

  • SANGKA, ANUT;SAWANGWIT, UTANE;SANGUANSAK, NUANWAN
    • Publications of The Korean Astronomical Society
    • /
    • v.30 no.2
    • /
    • pp.397-399
    • /
    • 2015
  • Recently, cosmic voids have been recognized as a powerful cosmological probe. A number of studies have focused on the effects of the gravitational lensing by voids on the temperature (and in some cases polarization) anisotropy of the Cosmic Microwave Background (CMB) background at relatively large to medium scales, l ~ 1000. Many of these studies attempt to explain the unusually large cold spot in CMB temperature maps and dynamical evidence of dark energy via detections of late-time integrated Sachs Wolfe (ISW) effect. Here, the effects of lensing by voids on the CMB temperature anisotropy at small scales, up to l = 3000, will be investigated. This work is carried out in the light of the benefits of adding large catalogues of cosmic voids, to be identified by future large galaxy surveys such as EUCLID and LSST, to the analysis of CMB data such as those from Planck mission. Our numerical simulation utilizes two methods, namely, the small-de ectionangle approximation and full ray-tracing analysis. Using the fitted void density profiles and radius (RV ) distribution available in the literature from N-body simulations, we simulated the secondary temperature anisotropy (lensing) of CMB photons induced by voids along a line of sight from redshift 0 to 2. Each line of sight contains approximately 1000 voids of effective radius $RV_{,eff}=35h^{-1}Mpc$ with randomly distributed radial and projected positions. Both methods are used to generate temperature maps. The two methods will be compared for their accuracy and effciency in the implementation of theoretical modeling.

Intercomparison of Daegwallyeong Cloud Physics Observation System (CPOS) Products and the Visibility Calculation by the FSSP Size Distribution during 2006-2008 (대관령 구름물리관측시스템 산출물 평가 및 FSSP를 이용한 시정환산 시험연구)

  • Yang, Ha-Young;Jeong, Jin-Yim;Chang, Ki-Ho;Cha, Joo-Wan;Jung, Jae-Won;Kim, Yoo-Chul;Lee, Myoung-Joo;Bae, Jin-Young;Kang, Sun-Young;Kim, Kum-Lan;Choi, Young-Jean;Choi, Chee-Young
    • Korean Journal of Remote Sensing
    • /
    • v.26 no.2
    • /
    • pp.65-73
    • /
    • 2010
  • To observe and analyze the characteristics of cloud and precipitation properties, the Cloud physics Observation System (CPOS) has been operated from December 2003 at Daegwallyeong ($37.4^{\circ}N$, $128.4^{\circ}E$, 842 m) in the Taebaek Mountains. The major instruments of CPOS are follows: Forward Scattering Spectrometer Probe (FSSP), Optical Particle Counter (OPC), Visibility Sensor (VS), PARSIVEL disdrometer, Microwave Radiometer (MWR), and Micro Rain Radar (MRR). The former four instruments (FSSP, OPC, visibility sensor, and PARSIVEL) are for the observation and analysis of characteristics of the ground cloud (fog) and precipitation, and the others are for the vertical cloud characteristics (http://weamod.metri.re.kr) in real time. For verification of CPOS products, the comparison between the instrumental products has been conducted: the qualitative size distributions of FSSP and OPC during the hygroscopic seeding experiments, the precipitable water vapors of MWR and radiosonde, and the rainfall rates of the PARSIVEL(or MRR) and rain gauge. Most of comparisons show a good agreement with the correlation coefficient more than 0.7. These reliable CPOS products will be useful for the cloud-related studies such as the cloud-aerosol indirect effect or cloud seeding. The visibility value is derived from the droplet size distribution of FSSP. The derived FSSP visibility shows the constant overestimation by 1.7 to 1.9 times compared with the values of two visibility sensors (SVS (Sentry Visibility Sensor) and PWD22 (Present Weather Detect 22)). We believe this bias is come from the limitation of the droplet size range ($2{\sim}47\;{\mu}m$) measured by FSSP. Further studies are needed after introducing new instruments with other ranges.

Modified Traditional Calibration Method of CRNP for Improving Soil Moisture Estimation (산악지형에서의 CRNP를 이용한 토양 수분 측정 개선을 위한 새로운 중성자 강도 교정 방법 검증 및 평가)

  • Cho, Seongkeun;Nguyen, Hoang Hai;Jeong, Jaehwan;Oh, Seungcheol;Choi, Minha
    • Korean Journal of Remote Sensing
    • /
    • v.35 no.5_1
    • /
    • pp.665-679
    • /
    • 2019
  • Mesoscale soil moisture measurement from the promising Cosmic-Ray Neutron Probe (CRNP) is expected to bridge the gap between large scale microwave remote sensing and point-based in-situ soil moisture observations. Traditional calibration based on $N_0$ method is used to convert neutron intensity measured at the CRNP to field scale soil moisture. However, the static calibration parameter $N_0$ used in traditional technique is insufficient to quantify long term soil moisture variation and easily influenced by different time-variant factors, contributing to the high uncertainties in CRNP soil moisture product. Consequently, in this study, we proposed a modified traditional calibration method, so-called Dynamic-$N_0$ method, which take into account the temporal variation of $N_0$ to improve the CRNP based soil moisture estimation. In particular, a nonlinear regression method has been developed to directly estimate the time series of $N_0$ data from the corrected neutron intensity. The $N_0$ time series were then reapplied to generate the soil moisture. We evaluated the performance of Dynamic-$N_0$ method for soil moisture estimation compared with the traditional one by using a weighted in-situ soil moisture product. The results indicated that Dynamic-$N_0$ method outperformed the traditional calibration technique, where correlation coefficient increased from 0.70 to 0.72 and RMSE and bias reduced from 0.036 to 0.026 and -0.006 to $-0.001m^3m^{-3}$. Superior performance of the Dynamic-$N_0$ calibration method revealed that the temporal variability of $N_0$ was caused by hydrogen pools surrounding the CRNP. Although several uncertainty sources contributed to the variation of $N_0$ were not fully identified, this proposed calibration method gave a new insight to improve field scale soil moisture estimation from the CRNP.