• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.9
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• pp.686-689
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• 2013

The carbon nanowall (CNW) is a carbon-based nanomaterials and it was constructed with vertical structure graphenes and it has the highest surface density among carbon-based nanostructures. In this study, we have checked the growth properties of CNW according to the substrate angle. Microwave plasma enhanced chemical vapor deposition (PECVD) system was used to grow CNW on Si substrate with methane ($CH_4$) and hydrogen ($H_2$) gases. And, we have changed the substrate angle from $0^{\circ}$ to $90^{\circ}$ in steps of $30^{\circ}$. The planar and vertical conditions of the grown CNWs according to the substrate angle were characterized by a field emission scanning electron microscopy (FE-SEM) and energy dispersive spectroscopy (EDS). In case of the growth angle increases, our experimental results showed that the length of the CNW was shortened and the content of carbon component was decreased.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.7
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• pp.441-446
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• 2017

Aluminum nitride fibers were synthesized by carbothermal reduction and nitridation of precursor fibers obtained by electrospinning. The starting materials used to synthesize the AlN fibers were $Al(NO_3)_3{\cdot}9H_2O$ and urea. Polyvinylpyrrolidone with increasing viscidity was used as the carbon source to obtain a composite solution. The mixed solution was drawn into a plastic syringe with a stainless steel needle, which was used as the spinneret and connected to a 20 kV power supply. A high voltage was supplied to the solution to facilitate the formation of a dense net of fibers on the collector. The precursor fibers were dried at $100^{\circ}C$ and then heated to $1,400^{\circ}C$ for 1 h in a microwave furnace under $N_2$ gas flow for the carbothermal reduction and nitridation. X-ray diffraction studies indicated that the synthesized fibers consisted of the AlN phase. Field emission scanning electron microscopy studies indicated that the diameter of the calcined fibers was approximately 100 nm.

• Proceedings of the Materials Research Society of Korea Conference
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• 2010.05a
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• pp.42.2-42.2
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• 2010

Recently, highly porous bone substitutes, which have interconnected open pore structure, have been focused on improving their mechanical properties and modifying their functions. Especially, it is highly required to develop functional gradient structured bone substitute which is available for controlling their material properties such as bioresorption rate and elastic modulus. Porous $ZrO_2$ scaffold was fabricated by the sponge replica method using PU sponge. After 3 times of dip coating and the subsequent oven drying, burning out and microwave sintering were carried out. Various $ZrO_2$-BCP powder mixtures were prepared depending on the ratio and coated on the $ZrO_2$ scaffold by dip coating process. X-ray diffraction analysis was performed to characterize the phase identification of the scaffolds. Microstructures of the bone substitutes were observed using scanning electron microscopy.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.291-291
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• 2010

Electron-beam lithography (EBL) process is a versatile tool for a fabrication of nanostructures, nano-gap electrodes or molecular arrays and its application to nano-device. However, it is not appropriate for the fabrication of sub-5 nm features and high-aspect-ratio nanostructures due to the limitation of EBL resolution. In this study, the precision assembly and alignment of DNA molecule was demonstrated using sub-5 nm nanostructures formed by a combination of conventional electron-beam lithography (EBL) and plasma ashing processes. The ma-N2401 (EBL-negative tone resist) nanostructures were patterned by EBL process at a dose of $200\;{\mu}C/cm2$ with 25 kV and then were ashed by a chemical dry etcher at microwave (${\mu}W$) power of 50 W. We confirmed that this method was useful for sub-5 nm patterning of high-aspect-ratio nanostructures. In addition, we also utilized the surface-patterning technique to create the molecular pattern comprised 3-(aminopropyl) triethoxysilane (APS) as adhesion layer and octadecyltrichlorosilane (OTS) as passivation layer. DNA-templated gold nanoparticle chain was attached only on the sub-5 nm APS region defined by the amine groups, but not on surface of the OTS region. We were able to obtain DNA molecules aligned selectively on a SiO2/Si substrate using atomic force microscopy (AFM).

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.278-278
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• 2012

최근 폴리이미드(Polyimide) 고분자 물질을 기판으로 하는 플렉시블 전자소자 구현에 관한 연구가 활발히 진행 되고 있다. 폴리이미드는 수분 흡수율이 1% 이하인 소수성 물질로서 폴리이미드 기판 위 전극 형성에 있어 전극 물질이 분리되는 현상이 발생하게 된다. 따라서 본 연구에서는 소수성의 표면 성질을 갖는 폴리이미드 기판의 Asher 처리를 통한 표면 최적화에 대한 실험을 진행하였다. 유리기판 위에 액상 폴리이미드를 ${\sim}10{\mu}m$ 두께로 Spin coating 한 후 $120^{\circ}C$ hot plate에서의 soft bake와 $200^{\circ}C$, $320^{\circ}C$의 furnace에서의 단계적 cure 과정을 통해 표면의 defect을 최소화하였다. Microwave Asher 장비를 이용하여 폴리이미드 막에 10초, 15초, 20초 동안 asher 처리를 한 후 Atomic Force Microscopy (AFM) 장비로 시간에 따른 폴리이미드 기판 표면의 변화를 확인하였다. AFM 확인 결과 10 초의 공정 조건에서 가장 우수한 표면 morphology를 보였으며, 이는 표면의 탄소와 이물질을 제거하기 위해 사용되는 asher 처리 시간이 상대적으로 증가함에 따라 폴리이미드 막의 탄소 성분이 제거 되면서 표면의 형상이 최적화 이상으로 변화하기 때문이다. 본 실험은 폴리이미드를 기반으로 하는 플렉시블 전자소자 구현에 있어 전극 및 소자 제작에 크게 기여할 것으로 판단된다.

• Bulletin of the Korean Chemical Society
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• v.31 no.10
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• pp.2835-2840
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• 2010

A series of $MoO_3/CeO_2-ZrO_2$ catalysts with different Mo content (8 - 20 wt %) were prepared by simple co-precipitation followed by impregnation method and were characterized by X-ray diffraction (XRD), infrared spectroscopy (IR), scanning electron microscopy (SEM), energy dispersive spectroscopic (EDS) techniques. The prepared materials were tested for catalytic activity by the synthesis of benzimidazole derivatives using condensation of aromatic aldehydes and o-phenylenediamine by conventional and microwave method. Obtained results reveal that the catalytic activity increases with increase in Mo wt % loading. The best catalytic activity was obtained with 20 wt % $MoO_3/CeO_2-ZrO_2$. The particle size or crystallite size was estimated using Debye-Scherrer equation. After completion of reaction, the catalyst can be recovered efficiently and reused with consistent activity.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1571-1573
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• 2003

Diamond films including nanocystalline and graphite phase are grown by microwave plasma chemical vapor deposition using $N_2$ additives and negative substrate bias at growth step. The microstructure of the films is controlled by changing $N_2$ gas ratio and negative bias. Defects and grain boundaries between diamond and graphite are proposed to be crucial factors for forming the conducting path of electron emissions. The effect of growth parameters on the film microstructure are investigated by Raman spectroscopy and scanning electron microscopy(SEM). Electron emission characteristics are also examined in terms of the film growth conditions.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.28-28
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• 2007

Ferroelectric $(Ba_{0.5}Sr_{0.5})TiO_3$ (BST) thin films of thickness 500nm were deposited on $LaAlO_3$, (LAO) substrates by at $800^{\circ}C$. BST films were characterized for structure using X-ray diffraction (XRD). The surface morphology and thickness of BST the films were characterized by atomic force microscopy (AFM) and field emission scanning electron microscope (FESEM). We measured the dielectric properties at microwave frequencies (1~3 GHz) using a symmetrical stripline resonator with shorted ends and terahertz frequencies (0.2~2.5 THz) using a time-domain terahertz spectroscopy. The real and imaginary parts of the complex dielectric constant of the BST thin films on LAO substrates were in agreement with those previously reported.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.3
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• pp.229-233
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• 2011

Diamond thin films were deposited on pretreated Co cemented tungsten carbide (WC-6%Co) inserts as substrate by microwave plasma chemical vapor deposition (MPCVD) system, equipped with a 915MHz, 30kW generator for generating a large-size plasma. The substrates were pretreated with two solutions Murakami solution $[KOH:K_3Fe(CN)_6:H_2O]$ and nitric solution $[HNO_3:H_2O]$ to etch, WC and Co at cemented carbide substrates, respectively. The deposition experiments were performed at an input power of 10 kW and in a total pressure of 100 torr. The influence of various $CH_4$ contents on the crystallinity and morphology of the diamond films deposited in MPCVD was investigated using scanning electron microscopy (SEM) and Raman spectroscopy. The diamond film synthesized by the $CH_4$ plasma shows a triangle-faceted (111) diamond. As $CH_4$ contents was increased, the thickness of diamond films increased and the faceted planes disappeared. Finally, Faceted diamond changed into nano-crystalline diamond with random crystallinity.

• Elastomers and Composites
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• v.57 no.4
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• pp.181-187
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• 2022

CdSe-Mn nanocomposites were synthesized using a microwave method with sodium sulfite (Na₂SO₃), selenium (Se), cadmium sulfate octahydrate (3CdSO₄·8H₂O), ammonia solution (NH₃·H₂O), and manganese (II) sulfate monohydrate (MnSO₄·H₂O). We obtained CdSe-Mn-C₆₀ nanocomposites by calcining CdSe-Mn nanocomposites and fullerene (C₆₀) in an electric furnace at 700 ℃ for 2 h. X-ray diffraction, Raman spectroscopy, and scanning electron microscopy were used to characterize the crystal structures, lattice vibrations, and surface morphologies of the products, respectively. The photocatalytic activities of the CdSe-Mn-C₆₀ nanocomposites were investigated based on the photocatalytic degradations of organic dyes such as BG, MB, MO, and RhB under ultraviolet (UV) irradiation at 254 nm. UV-visible spectrophotometry was used to confirm the degradation process.