• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.149-150
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• 2009

In this paper we study on the semiconductor characteristic by calculating the variation of reflection function in microstrip lines, which has open-ended termination containing an optically induced plasma region. The variation of impedances resulting from the presence of plasma has evaluated with time and frequency domain. The responses have been also evaluated theoretically for changing the phase of the variation in the reflection.

• 한국응용과학기술학회지
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• 제17권2호
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• pp.89-93
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• 2000

The oxidation of methane was carried out in six different configurations of plasma reactors in order to study the radical reactions inside and outside of the plasma zone and to explore the method to control them. Various radicals and reactive molecules, such as CH, $CH_{2}$, $CH_{3}$, H, and O(from $O_{2}$) were generated in the plasma. A variety of products were produced through many competing reaction pathways. Among them. partial oxidation products were usually not favored, because the intermediates leading to the partial oxidation products could be oxidized further to carbon dioxides easily. It is important to control the free radical reactions in the plasma reactor by controlling the experimental conditions so that the reactions leading to the desired products are the major pathways.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.508-508
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• 2012

CST microwave studio is used to simulate the plasma profile of the 450mm CCP source. Standing wave effect becomes important at the high frequency as the electrode radius increases. To solve plasma non-uniformity problem, we designed multi electrode chamber to decreasing standing wave effect. Simulation showed the ratio of input power of each electrode is related with electric field strength. The multi electrode was constructed and measured by 2D probe arrays using floating harmonic method. Uniformity of 450 mm CCP was changed by the ratio of input power of each electrode. We described this dependence with circuit model.

• 한국표면공학회지
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• 제29권5호
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• pp.593-598
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• 1996

Previously, in trying to prepare perovskite type oxide powders by microwave heating, we found out a non-equilibrium argon plasma is generated around the powders and discharge continues stable at atmospheric pressure. In this study, we tried the plasma decomposition of heat-stable higher organic compound such as palmitic acid which is the principal constituent of the fimger fats. It was proved that suitable amount of coexistence of oxygen radicals into the argon flow accelerates the decomposition of palmitic acid. The argon-oxygen mixed gas plasma was able to perform a complete elimination of higher organic compound.

• 한국자기학회지
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• 제13권2호
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• pp.47-52
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• 2003

DC 마그네트론 스파터법과 RLSA(Radial Line Slot Antenna)을 이용한 마이크로파 여기 프라즈마를 이용하여 Ta/Cu/Ta/NiFe/Cu/Mn$_{75}$Ir$_{25}$/ $Co_{70}$Fe$_{30}$/Al-oxide 구조의 접합을 제조한 후, contact-mode AM(Atomic Force Microscope)을 이용하여 Al 산화막의 국소전도 특성의 평가를 수행하였다. AFM 동시전류측정으로부터, 얻어지는 표면상과 전류상은 대응하지 않는다. 국소 전류-전압(I-V)의 측정 결과, 전류상은 절연층의 barrier height의 분포를 나타내고 있다는 것을 알았다.다.다.

• 분석과학
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• 제14권4호
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• pp.324-330
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• 2001

마이크로파 분해법과 유도결합 플라스마 원자방출분광법(ICP-AES)을 이용하여 윤활유내의 S, P와 Zn의 분석을 하였다. 윤활유는 질산 또는 질산-과산화수소의 혼합산을 분해용액으로 하여 밀폐형 마이크로파 분해장치로 분해시켰다. 기존의 분해방법과 비교하여 펄스 방식에 의해 작동되어지는 단계적인 가열 프로그램은 윤활유 매질을 안전하게 분해하는데 3~4배 빠르고 효율적이었다. 제의된 분해방법은 검출된 원소들에 대해 3% 미만의 상대표준편차(RSD)를 보여주었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.200-200
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• 2011

Although the cut-off probe, a precise measurement method for the electron density, is widely used in the industry, the physics on the wave spectrum of the cut-off is not understood yet, only cut-off point frequency containing the information of electron density has been analyzed well. This paper analyzes the microwave frequency spectrum of the cut-off probe to see the physics behind using both microwave field simulation (CST Microwave Studio) and simplified circuit simulation. The result shows that the circuit model well reproduces the cut-off wave spectrum especially in the low frequency regime where the wavelength of the driving frequency is larger than the characteristic length and reveals the physics of transmission characteristics with frequency as resonances between vacuum, plasma and sheath. Furthermore, by controlling the time domain in solver of the microwave simulator, the cut-off like transmission peaks above the cut-off frequency which has been believed as cavity effect is verified as chamber geometry effect. The result of this paper can be used as the basis for the improvement of cut-off probe.

• Medical Lasers
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• 제8권1호
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• pp.28-31
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• 2019

Superficial fungal infections with dermatophytes, nondermatophyte molds, or yeasts are treated primarily with topical and/or systemic antifungal agents. Additional or alternative treatment modalities, particularly energy-delivering modalities, however, are used widely to induce fungicidal effects via selective photothermal reactions. In addition to light- or laser-based devices, plasma therapy also has antifungal properties. This report describes a Korean male patient with mycologically confirmed tinea pedis that was treated effectively with two sessions of nitrogen plasma treatment at one-week intervals using a plasma delivering system. Nitrogen plasma was prepared by loading a 0.28-ml inert nitrogen gas/pulse that was activated by a microwave generator. The other treatment settings were a nozzle diameter of 5 mm, pulse energy of 0.75 J, pulse duration of 7 msec, and two passes. One week after the first session of nitrogen plasma treatment, the patient exhibited marked reductions in scale and inflammation. One month after the final treatment, no clinical features of recurrence were found, and successive potassium hydroxide testing revealed negative results.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2003년도 somma/kms meeting
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• pp.50-50
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• 2003

• 한국초전도학회:학술대회논문집
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• 한국초전도학회 2006년도 High Temperature Superconductivity Vol.XVI
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• pp.47-47
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• 2006