• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1440-1441
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• 2006

In this study, we synthesized CNTs(carbon nanotubes) on the glass substrate by microwave plasma enhanced chemical vapor deposition (MPECVD), Effect of bias voltage on the grown behavior and morphology of CNTs were investigated. Recently, it has been proposed that aligned CNTs can also be achieved by the application of electric bias to the substrate during growth, the first time reported the bias effect such that the nanotube alignment occurred only when a positive bias was applied to the substrate whereas no aligned growth occurred under a negative bias and no tube growth was observed without bias. On the country, several researchers reported some different observations that aligned nanotubes could also be grown under negative substrate biases. This discrepancy as for the effect of positive and negative bias may indicate that the bias effect is not fully understood yet. The glass and Si wafers were first deposited with TiN buffer layer by r.f sputtering method, and then Ni catalyst same method, The thickness of TiN and Ni layer were 200 nm and 60 nm, respectively. The main process parameters include the substrate bias (0 to - 300 V), and deposition pressure (8 to 20 torr).

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1571-1573
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• 2003

Diamond films including nanocystalline and graphite phase are grown by microwave plasma chemical vapor deposition using $N_2$ additives and negative substrate bias at growth step. The microstructure of the films is controlled by changing $N_2$ gas ratio and negative bias. Defects and grain boundaries between diamond and graphite are proposed to be crucial factors for forming the conducting path of electron emissions. The effect of growth parameters on the film microstructure are investigated by Raman spectroscopy and scanning electron microscopy(SEM). Electron emission characteristics are also examined in terms of the film growth conditions.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.97-97
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• 2000

In this thesis, the metastable state diamond thin films have been deposited on Si substrates from methane-hydrogen and oxygen mixture using Microwave Plasma Enhanced Chemical Vapor deposition (MWPCVD) method. Effects of each experimental parameters of MWPCVD including methane concentrations, oxygen additions, operating pressure, deposition time, etc. on the growth rate and crystallinity were investigated. SEM, XRD, and Raman spectroscopy were employed to analyze the growth rate and morphology, crystallinity and prefered growth direction, and relative amounts of diamond and non-diamond phases respectively. As a methane concentration below 4%, the deposited films having well-defined facets could be obtained. As the methane concentration increases over 4%, the shape of films gradually changed into a amorphos form. The best crystallinity of the film at 3% in the Raman spectroscopy. Addition of oxygen to the methane-hydrogen mixture gave an improved film crystallinity at 50% oxygen concentration due to its more effectiveness in the selective removal of the non-diamond phased compared to the of H atom. on the contrary, the growth rate generally decreased by oxygen to from the more stable CO and CO2 is responsible for such an effect. Upon increasing the operating pressure and time, increased of growth rate and crystallinity were increased simultaneously.

• Korean Journal of Materials Research
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• v.6 no.11
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• pp.1113-1120
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• 1996

다이아몬드 박막을 이용한 반도체소자를 실현시키기 위해서는 다이아몬드가 아닌 다른 재료의 기판위에 대면적에 걸쳐 다이아몬드막을 에피텍셜 성장시키는 것이 필수적이다. 그러나 이 분야의 연구는 아직 초보상태로 그 목표가 실현되지 못하고 있다. 본 논문에서는 저압의 ECR 마이크로파 플라즈마 CVD에 의하여 대면적의 Si(100)기판상에 방향성을 갖는 다이아몬드막을 성공적으로 성장시킨 결과를 보고자한다. 지금까지 얻어진 최적 핵생성 공정조건은 다음과 같다 : 반응압력 10Pa, 기판온도 80$0^{\circ}C$(마이크로파 전력이 3kW일 때), 원료가스 CH4/He 계로 농도비 3%/97%, 가스총유량 100sccm, 바이어스 전압 + 30V, 마이크로파 전력(microwave power)4kW, 바이어스 처리 시간 10분간이며, 성장단계에서의 증착공정 조건은 기판온도 80$0^{\circ}C$, 원료가스 CH4/CO2/H2계로 농도비 5%/15%/85%, 가스 총유량 1000sccm, 바이어스 전압 +30V, 마이크로파 전력 5kW, 성막시간 2시간으로 일정하게 유지하였다. 이 조건하에서 기판 면적 3x4$\textrm{cm}^2$의 대면적에 대해서 약 2x109cm-2의핵생성 밀도를 균일하게 재현성있게 얻었다. 원료가스로 CH4/H2를 사용한 경우보다 CH4/H2를 사용할 경우에 라디칼밀도의 증가에 의하여 더 높은 핵생성밀도를 얻을 수 있었다. 또한 저압의 ECR플라즈마 CVD의 경우에는 양의 바이어스전압이 막의 손상이 없어 다이아몬드 핵생성에 더 적합하였다.

• Analytical Science and Technology
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• v.20 no.6
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• pp.524-528
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• 2007

Variations of the twenty one metal components (Mg, Al, V, Cr, Co, Sr, Ba, Na, K Mn, Fe, Cu, Zn, As, Hg, Pb, Ca, P, Mo, Cd, Sb) were analyzed in human hair sample by inductively coupled plasma mass spectrometry (ICP-MS). The effect of bleach and permanent wave manipulation on the elemental composition of hair were investigated. It was found that the composition of hair varied with hair bleach and permanent wave. Hair sample was collected from male in the age of thirties. Hair sample (0.05 g) was added to the Teflon digestion bomb together with 1.5 mL of nitric acid and an appropriate amount of In as an internal standard. The sample was then decomposed in the microwave digestion system. In normal hair, the contents of V, Cr, Mn, Fe, Co, Cu, Zn, As, Mo, Cd, Sb and P were increased in permanent wave hair, and Mg, Al, V, Co, Sr, Ba, Na and K were increased in bleached hair. But Mg, Al, Sr, Ba, Hg, Pb, Na, K, and Ca contents were decreased with permanent wave hair, Mn, Fe, Cu, Zn, As, Hg, Pb and Ca contents were decreased with bleached hair.

• Korean Journal of Environmental Agriculture
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• v.35 no.1
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• pp.55-61
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• 2016

BACKGROUND: This study was carried out to survey the levels of heavy metals in perennial root vegetables and to assess dietary exposure and risk to the Korean population health.METHODS AND RESULTS: Perennial root vegetables (n=214) including Panax ginseng C.A mayer, Woodcultivated ginseng, Codonopsis lanceolata, and Platycodon granditloum were collected from markets or harvested from farmhouse in Korea. Lead(Pb), cadmium(Cd) and arsenic (As) analysis were performed with microwave device and inductively coupled plasma mass spectrometer. Limit of detection for heavy metals were 0.010~0.050 μg/kg, while limit of quantitation were 0.035~0.175 μg/kg. The recovery results were in the range of 76~102%. The average contents of heavy metals in perennial root vegetables were in the range of Pb 0.013(Panax ginseng C.A Mayer)~0.070 (Wood-cultivated ginseng) mg/kg, Cd 0.009(Panax ginseng C.A Mayer)~0.034(Codonopsis lanceolata) mg/kg, and As 0.002(Panax ginseng C.A Mayer)~0.004(Plafycodon grandiflorum) mg/kg, respectively. For risk assessment, daily intakes of heave metals were estimated and risk indices were calculated in comparison with reference dose. The dietary exposures of heavy metals through usual intake were Pb 0.070 μg/day, Cd 0.041 μg/day and As 0.008 μg/day, taking 0.03%, 0.08% and 0.0003% as risk indices, respectively.CONCLUSION: The risk level for Korean population exposed to heavy metals through intake of perennial root vegetables was far low, indicating of little possibility of concern.

• Korean Journal of Food Science and Technology
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• v.46 no.3
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• pp.283-287
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• 2014

This study determined the hazardous heavy metal content of mushrooms from markets in Seoul, Korea. One hundred and fifty mushroom samples were digested by the microwave method then the hazardous heavy metal (Pb, Cd, As, Cr, Ni and Hg) content was determined by the inductively coupled plasma-mass spectrometry (ICP-MS) and mercury analyzer. The average values of heavy metals in the samples were as follows: (mean [minimum-maximum], ${\mu}g/kg$); Pb 7.8 (1.9-30.0), Cd 45.3 (0.7-292.4), As 54.6 (24.2-229.3), Cr 42.6 (8.4-334.3), Ni 22.4 (up to 180.4), and Hg 8.9 (2.0-25.0). The contents of hazardous heavy metal in mushrooms were lower than those reported previously and also lower than the Provisional Tolerable Weekly Intake (PTWI) limit prescribed by the FAO/WHO. Thus, it could be suggested that the hazardous heavy metals levels in the mushrooms of retail market were adequately safe for consumption.

• Applied Chemistry for Engineering
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• v.8 no.3
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• pp.395-402
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• 1997

The $SiO_2$ films were prepared by ECR(electron cyclotron resonance) plasma diffusion method, Deal-Grove model and Wolters-Zegers-van Duynhoven model were used to estimate the oxidation rate which was correlated with surface morphology for different orientation of Si(100) and Si(111). It was seen the $SiO_2$ thickness increased linearly with initial oxidation time. But oxidation rate slightly decrease with oxidation time. It was also shown that the oxidation process was controlled by the diffusion of the reactive species through the oxide layer rather than by the reaction rate at the oxide interface. The similar time dependency has been observed for thermal and plasma oxidation of silicon. From D-G model and W-Z model, the oxidation rate of Si(111) was 1.13 times greater than Si(100) because Si(111) had higher diffusion and reaction rate, these models more closely fits the experimental data. The $SiO_2$ surface roughness was found to be uniform at experimental conditions without etching although oxidation rate was increased, and to be nonuniform due to etching at experimental condition with higher microwave power and closer substrate distance.

• Journal of Environmental Health Sciences
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• v.43 no.2
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• pp.103-110
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• 2017

Objectives: This study was performed to provide basic data for the re-establishment of standards (criteria) and analytical methods for hazardous metals in nail enamel. Methods: Ten metals (lead; Pb, arsenic; As, cadminum; Cd, antimony: Sb, cobalt; Co, nikel; Ni, copper; Cu, chromium; Cr, aluminum; Al, and mercury; Hg) were measured in 67 commercial nail enamels containing glitter and/or pearls. The content of hazardous metals (excepting Hg) was determined by using an inductively coupled plasma-optical emission spectrophotometer (ICP-OES) after microwave digestion. Mercury content was measured by a mercury analyzer without any preparation. Results: The detected ranges of the intact samples were as follows: $ND-1.756{\mu}g/g$ for Pb, $ND-1.24{\mu}g/g$ for As, ND for Cd, $ND-20.41{\mu}g/g$ for Sb, $ND-12.36{\mu}g/g$ for Co, $ND-7.908{\mu}g/g$ for Ni, $0.088-79.27{\mu}g/g$ for Cu, $0.281-18.54{\mu}g/g$ for Cr, $13.78-3563{\mu}g/g$ for Al, and $ND-0.044{\mu}g/g$ for Hg. After centrifugation, the detected ranges of supernatant were as follows: $ND-0.435{\mu}g/g$ for Pb, $ND-0.504{\mu}g/g$ for As, ND for Cd, $ND-0.035{\mu}g/g$ for Sb, $ND-13.17{\mu}g/g$ for Co, $ND-0.232{\mu}g/g$ for Ni, $0.117-90.07{\mu}g/g$ for Cu, $0.174-2.787{\mu}g/g$ for Cr, and $9.459-1565{\mu}g/g$ for Al. The results of this analysis showed that the levels of heavy metals such as Pb, As, and Sb were much higher in the intact samples than those of supernatant. Conclusion: In the present study, we found that the levels of hazardous metals were significantly different depending on the status of the presence of glitter. Based on the results, we recommend that the product consumer refrain from prolonged application of nail enamel, avoid biting or chewing the nails, and wear gloves during cooking and washing dishes.

• Journal of the Optical Society of Korea
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• v.19 no.6
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• pp.705-710
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• 2015

The fabrication process of thin boron-doped nanocrystalline diamond (B-NCD) microelectrodes on fused silica single mode optical fiber cladding has been investigated. The B-NCD films were deposited on the fibers using Microwave Plasma Assisted Chemical Vapor Deposition (MW PA CVD) at glass substrate temperature of 475 ℃. We have obtained homogenous, continuous and polycrystalline surface morphology with high sp³ content in B-NCD films and mean grain size in the range of 100-250 nm. The films deposited on the glass reference samples exhibit high refractive index (n=2.05 at λ=550 nm) and low extinction coefficient. Furthermore, cyclic voltammograms (CV) were recorded to determine the electrochemical window and reaction reversibility at the B-NCD fiber-based electrode. CV measurements in aqueous media consisting of 5 mM K₃[Fe(CN)₆] in 0.5 M Na₂SO₄ demonstrated a width of the electrochemical window up to 1.03 V and relatively fast kinetics expressed by a redox peak splitting below 500 mV. Moreover, thanks to high-n B-NCD overlay, the coated fibers can be also used for enhancing the sensitivity of long-period gratings (LPGs) induced in the fiber. The LPG is capable of measuring variations in refractive index of the surrounding liquid by tracing the shift in resonance appearing in the transmitted spectrum. Possible combined CV and LPG-based measurements are discussed in this work.