• Current Optics and Photonics
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• v.4 no.4
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• pp.353-360
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• 2020

Adopting an elaborately designed reflective objective consisting of four mirrors, we have developed a rotating-polarizer-type microspot spectroscopic ellipsometer (SE) with an ultra-small spot size. The diameter of the focused beam, whether evaluated using a direct-image method or a knife-edge method, is less than 8.4 ㎛. After proper correction for the polarizing effect of the mirrors in the reflective objective, we unambiguously determine the dispersion of the complex refractive index and the thickness of monolayer MoS₂ using the measured microspot-spectroellipsometric data. The measured ellipsometric spectra are sensitive enough to identify small variations in thickness of MoS₂ flakes, which ranged from 0.48 nm to 0.67 nm.

• Korean Journal of Optics and Photonics
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• v.33 no.5
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• pp.201-209
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• 2022

The previously developed microspot spectroscopic ellipsometer (SE) is upgraded to a microspot SE compatible with the atomic force microscope (AFM). The focusing optical system of the previous microspot SE is optimized to incorporate an AFM head. In addition, the rotating compensator ellipsometer in polarizer-sample-compensator-analyzer configuration is adopted in order to minimize the negative effects caused by beam wobble. This research leads to the derivation of the expressions needed to get spectro-ellipsometric constants despite the fact that the employed rotating compensator is far from the ideal achromatic quarter-wave plate. The spot size of the developed microspot SE is less than 20 ㎛ while the AFM head is mounted. It operates in the wavelength range of 190-850 nm and has a measurement accuracy of δΔ ≤ 0.05° and δΨ ≤ 0.02°, respectively. Fast measurement of ≤3 s/sp is realized by precisely synchronizing the azimuthal angle of a rotating compensator with the spectrograph. The microspot SE integrated with an AFM is expected to be useful in characterizing the structure and optical properties of finely patterned samples.