• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.161-165
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• 1996

Recently, with a great interest in micromachine, it is more and more important to promote the way of manufacturing micromachine. The silicon process or the LIGA process was the main way to manufacture micromachine in the past. Because these processing method was 2.5-dimensional, there was the limit in processing perfect three-dimensional micromachine. In this study, we developed the rapid prototyping system for micromachine and tested its property. We also realized .mu. m - order processing and three-dimensional structure processing. The results showed the possibility of manufacturing micromachine with the rapid prototyping system

• Journal of the Korean Society for Precision Engineering
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• v.14 no.6
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• pp.99-105
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• 1997

Recently, with a great interest in micromachine, it is more and more important to promote the way of manufacturing micromachine. The silicon process or the LIGA process was the main method to manufacture micromachine in the past. But, these manufacturing method was 2.5-dimensinal, there was the limit in manufacturing perfect 3-dimensional structure micromachine. In this study, we developed the rapid prototyping system for micromachining and tested its property. We also realized .mu. m-order manu- facturing and 3-dimensional structure processing. The results showed the possibility of micromachining with the rapid prototyping system.

• Journal of Magnetics
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• v.8 no.1
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• pp.74-78
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• 2003

The largest advantage of magnetic micromachine is wireless operation. This advantage makes it suitable for medical micromachine working inside the human body. In the medical field, low invasion treatment is very important From this point of view, very small machines working in the body without power supply cables meet the needs of the medical field. In this paper, we report about magnetic wireless actuators for medical applications.

• Journal of Magnetics
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• v.12 no.2
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• pp.84-88
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• 2007

A micropump with spiral-type magnetic micromachine was fabricated. When a rotating magnetic field was applied, the machine rotated and pumped a surrounding liquid. We experimentally examined the basic properties of this pump. We found that the pressure and the flow rate could be controlled by the rotating frequency, and this pump could work under wide range kinematic viscosity. In addition, we proposed a disposable pump system using the machine. When a plate installed a fluid channel and the machine was set on a stage for generating a rotating magnetic field, the machine worked as the pump.

• Proceedings of the Materials Research Society of Korea Conference
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• 1993.05a
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• pp.110-111
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• 1993

• Proceedings of the KOSOMBE Conference
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• v.1995 no.11
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• pp.52-56
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• 1995

At present many kinds of micro actuators and micro mechanical components have been studied, but force transmission to arbitary direction is difficult using the current method. To solve this problem, a micro hydraulic system is expected to be useful. Force transmission to arbitary direction is necessary to development of medical use micromachine. In this paper, we studied about micro hydraulic system and magnetic fluid micro actuator and micro rapid prototyping system. The result of this studies indicated that possibility of the power transmission that using the micro cylinder system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.145-146
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• 2007

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.65-66
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• 2009

This paper describes a procedure developed to fabricate negative photo resist SUMS to a semi-insulating (SI)-GaAs-based substrate. SU-8 is attractive for micromachine multi-layer circuit fabrication, because it is photo-polymerizable resin, leading to safe, and economical processing. This work demonstrates SUMS photo resist can be used for RFIC/MMIC application.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.299-300
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• 2007

• Proceedings of the KIPE Conference
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• 2010.11a
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• pp.40-43
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• 2010

This paper deals with a new two dimensional clinometer based on dual axis micromachined accelerometers. The clinometer is a small and low-cost product, which is mainly developed to help golfers read easily the tilt of a putting green. First, this paper proposes the principle of two dimensional clinometer and also a calibration method with respect to the offset voltage and sensitivity of a accelerometer. Experimental results on the developed clinometer show that the proposed clinometer can provide useful information on the tilt angle and direction of an inclined plane.