• Title/Summary/Keyword: Micro-process

Search Result 3,355, Processing Time 0.039 seconds

Fabrication of 3-D Micro Structure and Micro Tool Using MEDM (미세 방전을 이용한 3차원 미세 구조물 및 미세 공구 제작)

  • Kim B. H.;Yi S. M.;Chu C. N.;Kang Y. H.;Choi T. H.;Park H. J.;Lee Y. S.
    • Transactions of Materials Processing
    • /
    • v.14 no.3 s.75
    • /
    • pp.251-256
    • /
    • 2005
  • 3-D micro structures and micro tools were fabricated using Micro Electrical Discharge Machining (MEDM). To make micro structures, micro electrical discharge milling process was applied. During micro electrical discharge milling, electrode (tool) worn in the both axial and radial direction. To compensate tool wear which has significant influence on machining accuracy, machining path overlapping was proposed. Machining characteristics of micro electrical discharge milling was investigated in considering of depth of cut and capacitance of discharge circuit. Micro complex shaped tools were also fabricated using REDM (reverse electrical discharge machining). Sacrificial electrodes were machined through electrical discharge milling process and were used as electrode to make micro tools. Using this process several micro tools shape of 'ㄷ', 'ㅁ' and 'o' were fabricated. With these complex shaped tools, micro machining was successfully applied repeatedly.

Fabrication of 3-D Micro Structure and Micro Tool Using MEDM (미세 방전을 이용한 3차원 미세 구조물 제작 및 미세 공구 제작)

  • Lee Y. S.;Kim B. H.;Yi S. M.;Chu C. N.;Kang Y. H.;Choi T. H.;Park H. J.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
    • /
    • 2004.11a
    • /
    • pp.255-259
    • /
    • 2004
  • 3-D micro structures and micro tools are fabricated using MEDM (Micro Electric Discharge Machining). To make micro structures, micro electro discharge milling process is applied. During micro electro discharge milling, electrode (tool) wears both axial and radial direction. To compensate tool wear which influences significantly machining accuracy, overlap machining path is proposed. Machining characteristics of micro electro discharge milling is investigated in considering of depth of cut and capacitance of discharge circuit. Micro complex shaped tools are fabricated using REDM (reverse electro discharge machining). Sacrificial electrode is machined through electro discharge milling process and is used as electrode to make micro tools. Using this process several micro tools shape of 'ㄷ', 'ㅁ' and 'o' are fabricated. With these complex shaped tools, micro machining is successfully applied repeatedly.

  • PDF

Fabrication of plastic CE (capillary electrophoresis) microchip by hot embossing process (핫 엠보싱 공정을 이용한 플라스틱 CE(capillary electrophoresis) 마이크로 칩의 제작)

  • Cha Nam-Goo;Park Chang-Hwa;Lim Hyun-Woo;Park Jin-Goo
    • Proceedings of the Korean Society of Precision Engineering Conference
    • /
    • 2005.06a
    • /
    • pp.1140-1144
    • /
    • 2005
  • A plastic-based CE (capillary electrophoresis) microchip was fabricated by hot embossing process. A Si mold was made by wet etching process and a PMMA wafer was cut off from 1mm thick PMMA sheet. A micro-channel structure on PMMA substrate was produced by hot embossing process using the Si mold and the PMMA wafer. A vacuum assisted thermal bonding procedure was employed to seal an imprinted PMMA wafer and a blank PMMA wafer. The results of microscopic cross sectional images showed dimensions of channels were well preserved during thermal bonding process. In our procedure, the deformation amount of bonding process was below 1%. The entire fabrication process may be very useful for plastic based microchip systems.

  • PDF

Numerical Analysis of Micro-pattern Filling with Gas Dissolution by Injection Molding Process (가스 용해를 고려한 금형내압제어 사출성형공정의 마이크로패턴 충전 해석)

  • Park, Sung Ho;Yoo, Hyeong Min;Lee, Woo Il
    • Journal of the Korean Society of Manufacturing Process Engineers
    • /
    • v.13 no.4
    • /
    • pp.21-27
    • /
    • 2014
  • The injection molding process has several advantages enabling it to produce large quantities of molded plastic products using a repetitive process. In recent years, it has been necessary to develop an injection molding process with micro/nano-sized patterns for application to the semiconductor industry and to the bio/nano manufacturing industry. In this study, we apply gas pressure to the inside of a mold and consider the gas dissolution phenomenon for a resin filling into a micro pattern with a line structure. Using numerical analysis, we calculate the filling ratio with respect to time for various internal gas pressures and various aspect ratios of the micro-patterns.

Micro-lens Patterned LGP Injection Mold Fabrication by LIGA-reflow Process (LIGA-reflow 응용 Micro-lens Pattern 도광판 금형 제작)

  • Hwang C.J.;Kim J.D.;Chung J.W.;Ha S.Y.;Lee K.H.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
    • /
    • 2004.05a
    • /
    • pp.241-244
    • /
    • 2004
  • Microlens patterned micro-mold fabrication method for Light Guiding Plate(LGP), kernel part of LCD-BLU(Back Light Unit), was presented. Instead of erosion dot pattern for LCP optical design, microlens pattern, fabricated by LIGA-reflow process, was applied. Optical pattern design method was also developed not only for negative pattern LGP, but also positive pattern LGP. In order to achieve flow balance during the micro-injection molding process and dimensional accuracy, two LGP pattern was made in one micro-mold.

  • PDF

Development of Micro Punching System (미세 구멍 펀칭 기구 개발)

  • Joo B. Y.;Jeon B. H.;Oh S. I.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
    • /
    • 2001.05a
    • /
    • pp.213-216
    • /
    • 2001
  • A micro hole punching system was developed and micro holes of 100m in diameter were successfully made on brass sheets of loom in thickness. A micro punch made of tungsten carbide was designed to withstand the punch load, considering the buckling and the bending moment due to possible misalignment error. The punch was fabricated by the grinding process with diamond wheel. The die was designed considering the punch load and fabricated by micro electrodischarge machining process. In this system the stripper is designed to guide punch tip to minimize the possible misalignment. The punch was installed on a vertical stepper and the die was mounted on an X-Y translation unit. The precision motion controller controlled all motions of the micro hole punching system. In this study technical difficulties and solutions in the micro hole punching process were also discussed.

  • PDF

A Basic Study of replication and brightness for micro injection molding with ${\sim}50{\mu}m$ micro-lens pattern mold ($50{\mu}m$ Microlens 패턴 금형의 미세사출성형 전사성과 전광특성 기초연구)

  • Hwang C. J.;Ko Y. B.;Heo Y. M.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
    • /
    • 2004.10a
    • /
    • pp.280-283
    • /
    • 2004
  • Micro-lens patterned micro-mold fabrication method for Light Guiding Plate(LGP), kernel part of LCD-BLU(Back Light Unit), was presented. Instead of erosion dot pattern for LGP optical design, micro-lens pattern, fabricated by LIGA-reflow process, was applied. Optical pattern design method was also developed not only for negative pattern LGP, but also positive pattern LGP. During injection molding process, experimental study was conducted to improve replication quality and brightness of ${\sim}50um$ micro-lens pattern mold. The effect of mold temperature for the replication quality of micro-lens array was studied.

  • PDF

A Study on the Micro Structure Fabrication using Electrolytic In-process Dressing (전해 연속 드레싱을 이용한 마이크로 구조물 제작)

  • 이현우;최재영;정해도;이석우;최헌종
    • Proceedings of the Korean Society of Precision Engineering Conference
    • /
    • 2002.10a
    • /
    • pp.258-261
    • /
    • 2002
  • In this study, micro tools(WC) to produce micro-structure and parts, were fabricated ell a cylindrical grinding machine using ELID(Electrolytic In-process Dressing) technique. The shape of the micro-carbide tool was square, corn. The size of the micro-carbide tool was measured less than 10$\mu\textrm{m}$ respectively by SEM(Scanning Electron Microscope). Furthermore, we fabricated micro structure by different processing methods on the desk top cylindrical grinding machine. The manufactured shape was like a tower and the measurement showed that the endpoint of micro structure was $50{\times}50$$\mu{\textrm}{m}$.

  • PDF

Novel Fabrication Process for Micro-Fluidic Channels and the Effect of the Surface States on the Fluid Flow (미세유로채널의 새로운 제작공정 및 표면상태가 유동에 미치는 영향)

  • 박미석;김진산;성인하;김대은;신보성
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.21 no.1
    • /
    • pp.87-93
    • /
    • 2004
  • Recently, with the development of bio-technology the interests in the micro-fluidic devices for analysis in the fields of biology and medical science have been steadily increasing. Although polymer is considered as one of the best materials for micro-fluidic devices. glass or silicon molds fabricated by photo-lithographic technique have been commonly used. However, it is generally perceived that the conventional photolithographic technique has the limitation for fabricating micro-channels for micro-fluidic devices. In this work, the possibility of fabrication of micro-fluidic channels on PDMS by using the mechano-chemical process and the effect of surface states on the fluid flow were investigated. Experimental results revealed that PDMS mold fabricated by the mechano-chemical process could be used effectively to replicate micro-fluidic channels with high reproducibility and dimensional accuracy. It was also found that the fluid flow generation and flow speed were largely affected by the hydrophilicity and the surface roughness of the micro-channel surfaces.

Numerical Simulation of the Effect of Finite Diaphragm Rupture Process on Micro Shock Tube Flows (Micro shock tube 유동에 대한 유한 격막 파막과정의 영향에 관한 수치 해석적 연구)

  • Arun Kumar, R.;Kim, Heuy Dong
    • Journal of the Korean Society of Propulsion Engineers
    • /
    • v.17 no.3
    • /
    • pp.37-46
    • /
    • 2013
  • Recent years have witnessed the use of micro shock tube in various engineering applications like micro combustion, micro propulsion, particle delivery systems etc. The flow characteristics occurring in the micro shock tube shows a considerable deviation from that of well established conventional macro shock tube due to very low Reynolds number and high Knudsen number effects. Also the diaphragm rupture process, which is considered to be instantaneous process in many of the conventional shock tubes, will be crucial for micro shock tubes in determining the near diaphragm flow field and shock formation. In the present study, an axi-symmetric CFD method has been applied to simulate the micro shock tube, with Maxwell's slip velocity and temperature jump boundary conditions. The effects of finite diaphragm rupture process on the flow field and the shock formation was investigated, in detail. The results show that the shock strength attenuates rapidly as it propagates through micro shock tubes.