• 제목/요약/키워드: Micro-pattern

검색결과 923건 처리시간 0.033초

마찰제어를 위한 Surface texturing의 Micro-scale dimple 밀도영향 (Influence on a density of micro-scale dimple for surface texturing on friction control)

  • 채영훈;김석삼
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2004년도 추계학술대회
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    • pp.945-950
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    • 2004
  • Surface texturing of tribological application is another attractive technology of friction reducing. Also, reduction of friction is therefore considered to be a necessary requirement for improved efficiency of machine. In this paper attempts to investigate the effect of density for micro-scale dimple pattern on bearing steel flat mated with pin-on-disk. We demonstrated the lubrication mechanism for a Stribeck curve, which has a relationship between the friction coefficient and a dimensionless parameter for lubrication condition. It is found that friction coefficient is depended on the density of surface pattern. It was thus verified that micro-scale dimple could affect the friction reduction.Lubrication condition regime has an influence on the friction coefficient induced the density of micro dimple.

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마스크에 대한 기계적 가공을 이용한 단결정 실리콘의 미세 패턴 가공 (Selective Removal of Mask by Mechanical Cutting for Micro-patterning of Silicon)

  • 진원혁;김대은
    • 한국정밀공학회지
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    • 제16권2호통권95호
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    • pp.60-67
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    • 1999
  • Micro-fabrication techniques such as lithography and LIGA processes usually require large investment and are suitable for mass production. Therefore, there is a need for a new micro-fabrication technique that is flexible and more cost effective. In this paper a novel, economical and flexible method of producing micro-pattern on silicon wafer is presented. This method relies on selective removal of mask by mechanical cutting. Then micro-pattern is produced by chemical etching. V-shaped grooved of about 3 ${\mu}m$ wide and 2 ${\mu}m$ deep has been made on ${SiO_2}m$ coated silicon wafer with this method. This method may be utilized for making microstructures in MEMS application at low cost.

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Micro-scale surface texturing을 기반으로 한 저마찰효과에 대한 기초연구 (Fundamental study on the effect of friction reduction based micro-scale surface texturing)

  • 채영훈;김석삼
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2004년도 학술대회지
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    • pp.17-24
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    • 2004
  • Surrface texturing of tribological application is another attractive technology of friction reducing. Also, reduction of friction is therefore considered to be a necessary requirement for improved efficiency of machine. In this paper attempts to investigate the effect of density for micro-scale dimple pattern using photolithography on bearing steel flat mated with pin-on-disk. We demonstrated the lubrication mechanism for a Stribeck curve, which has a relationship between the friction coefficient and a dimensionless parameter for lubrication condition. It is found that friction coefficient is depended on the density of surface pattern. It was thus verified that micro-scale dimple could affect the friction reduction considerably under mixed and hydrodynamic lubrication conditions from based on friction map. Lubrication condition regime has an influence on the friction coefficient induced the density of micro dimple.

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Relationship between Replication and Structure of Micro/Nano Molded Parts

  • Ito, Hiroshi;Kazama, Kunihiko;Kikutani, Takeshi
    • 한국고분자학회:학술대회논문집
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    • 한국고분자학회 2006년도 IUPAC International Symposium on Advanced Polymers for Emerging Technologies
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    • pp.368-368
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    • 2006
  • Micro-molded parts can be defined as parts with microgram weight, parts with micro-structured surface, and parts with micro-precision. In this study, various micro-scale molded parts for various polymers were produced by using a precision micro-molding machine. Molded parts with nano-structure surface were also produced to analyze the effect of molding conditions on replication of surface pattern and higher-order structure development of molded parts. Replication of molded parts was influenced by material properties, molding conditions and size of surface pattern. Higher-order structure of molded parts was investigated by using polarized microscope. Skin-shear-core regions inside the molded parts were observed and shear region affected to surface replication.

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Roll-to-Roll (R2R) Fabrication of Micro Pillar Array for Biomimetic Functionalization of Surface

  • Jeon, Deok-Jin;Lee, Jun-Young;Yeo, Jong-Souk
    • Applied Science and Convergence Technology
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    • 제23권1호
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    • pp.54-59
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    • 2014
  • The roll-to-roll (R2R) fabrication method to make micro-scale pillar arrays for biomimetic functionalization of surfaces is presented. Inspired by the micro-structure of plants in nature, a surface with a synthetic micro-scale pillar array is fabricated via maskless photolithography. After the surface is SAM (self-assembled monolayer) coated with trichlorosilane in a vacuum desiccator, it displays a hydrophobic property even in R2R replicas of original substrate, whose properties are further characterized using various pitches and diameters. In order to perform a comparison between the original micro-pattern and its replicas, surface morphology was analyzed using scanning electron microscopy and wetting characteristics were measured via a contact angle measurement tool with a $10{\mu}L$ water droplet. Efficient roll-to-roll imprinting for a biomimetic functionalized surface has the potential for use in many fields ranging from water repelling and self-cleaning to microfluidic chips.

마이크로 다이레스 성형 시스템을 이용한 금속박판소재의 마이크로 패턴 성형 (Micro pattern forming on the metal thin foil Using micro dieless forming system)

  • 이혜진;이형욱;박진호;이낙규
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2007년도 춘계학술대회 논문집
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    • pp.379-382
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    • 2007
  • The MEMS (Micro Electro Mechanical Systems) process is used in a micro/nano pattern manufacturing method. This method is based on the lithography technology. But the MEMS process has some problems such as complicated process, long processing time and high production costs. Many researchers are doing research in substitute manufacturing method to work out a solution to these problems. In this paper, we apply a dieless incremental forming technology to a substitute method of MEMS process. This dieless forming technology is using in the commercial scale sheet forming such as a prototype of automobile sheet parts. 5-axes CNC (Computerized Numeric Control) method are applied in this system to get a micro-scale dieless forming results. These 5-axes system are composed of precision AC servo motor stages (4-axes) and PZT actuator (1-axis). A PZT actuator is used in a precision actuating axis because it can be operated in the nano scale stroke resolution. This micro dieless incremental forming system has the advantage of minimization in manipulating distance and working space. As equipment and tools become smaller in size, minute inertia force and high natural frequency can be obtained. Therefore, high precision forming performance can be obtained. This allows the factory to quickly provide the customer with goods because the manufacturing system and process are reduced. To construct this micro manufacturing system, many technologies are necessary such as high stiffness frame, high precision actuating part, structural analysis, high precision tools and system control. To achieve the optimal forming quality, the micro dieless forming system is designed and made with high stiffness characteristic.

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