• 한국전기전자재료학회논문지
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• 제14권7호
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• pp.557-561
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• 2001

Chemical mechanical polishing (CMP) process has been widely used to planarize dielectric layers, which can be applied to the integraded circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of in the defect-free inter-level dielectrics (ILD). Especially, defects such as micro-scratch lead to severe circuit failure which affect yield. CMP slurries can contain particles exceeding 1㎛ in size, which could cause micro-scratch on the wafer surface. The large particles in these slurries may be caused by particles agglomeration in slurry supply line. To reduce these defects, slurry filtration method has been recommended in oxide CMP. In this work, we have studied the effects of filtration and the defect trend as a function of polished wafer count using various filters in inter-metal dielectrics(IMD)-CMP process. The filter installation in CMP polisher could reduce defects after IMD-CMP process. As a result of micro-scratch formation, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. We have concluded that slurry filter lifetime is fixed by the degree of generating defects.

• 대한치과의사협회지
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• 제54권12호
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• pp.985-995
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• 2016

Titanium (Ti) has been widely used for dental implant due to great biocompatibility and bonding ability against natural alveolar bone. A lot of titanium surface modification has been introduced in dentistry and, among them, methods to introduce micro/nano-roughened surface were considered as clinically approved strategy for accelerating osseointegration of Ti dental implant. To have synergetic effect with topography oriented favors in cell attachment, chair-side surface treatment with reproducibility of micro/nano-topography is introduced as next strategy to further enhance cellular functionalities. Extensive research has been investigated to study the potential of micro/nano-topography preserved chair-side surface treatment for Ti dental implant. This review will discuss ultraviolet, low level of laser therapy and non-thermal atmospheric pressure plasma on Ti dental implant with micro/nano-topography as next generation of surface treatment due to its abilities to induce super-hydrophilicity or biofunctionality without change of topographical cues.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2011년도 추계학술대회 논문집
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• pp.178-185
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• 2011

The micro-perforated panel absorber (MPPA) is one of promising noise control elements because of its applicability to extreme environments where general porous materials cannot be used. Since the MPPA is inherently non-porous sound absorber, it can be a good candidate of acoustic protection system of a space launcher. The overall sound pressure level inside payload fairings of commercial launch vehicles is so high (around 140 dB OASPL) that the conventional linear impedance model cannot be directly applied to the design of the acoustic protection systems. In this paper an acoustic impedance models of a micro-perforated panel absorber at high sound pressure environment were reviewed and the use of the impedance on the practical design of MPPAs was addressed. The variation of absorption characteristics of MPPA was discussed according to the design parameters, e.g., perforation ratio, the minute hole diameter, the thickness of MPP and the incident sound pressure level.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1988-1991
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• 2005

A micro fluid actuator driven by electromagnetic force at MEMS(Micro Electro Mechanical System) level has been designed. The operation of the actuator was simulated in three steps. First, fluid flow analysis has been performed to determine the actuator load. With the load, dynamic behavior of the actuator structure has been analysed. Finally, fluid-structure interaction analysis has been performed to predict the performance of the actuator. To avoid excessive amount of computation, axisymmetric and plane strain 2-D models were used.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2001년도 춘계학술대회논문집
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• pp.961-966
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• 2001

Micro fans of randomly swept-blades were designed to provide C.P.U. in a personal computer with effective cooling in a very quiet mode. The proto--type axial micro-fans machined by a laser sintering machine were tested against manufactured products by comparing the performance and overall sound pressure level with spectral measurements in an environment suggested by ASHRAE and ANSI standards. The predicted OSPLs and directivity patterns of fans by iDesignFan software were in good agreements with measured data. The newly introduced fans of randomly swept-blades were proved to provide a very promising mode of low noise at small loading conditions.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1816-1818
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• 1996

A micro-size nonthermal plasma generator, using a $SiO_2$ film as a dielectric barrier, has been studied experimentally for a high frequency ac voltage in 2LPM oxygen gas fed. The $SiO_2$ film as a micro-size dielectric barrier was made by the wet oxidation of n-type Si wafer($220[{\mu}mt]$). It can be generated ozone, as a nonthermal plasma intensity parameter, at very low level of applied voltage about 1[kV] by using the micro-size dielectric barrier. As a result, in case that have no air gap spacing i.e. surface discharge case shows relatively higher ozone concentration rather than that case of the micro-airgap spacing.

• 산경연구논집
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• 제7권3호
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• pp.27-36
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• 2016

Purpose - Considering the importance of housing needs to real estate market, domestic studies on real estate prices from the perspective of demand are basically based on macro-data, but relatively few are associated with micro-data of urban real estate demand. We try to find a reliable relation of elasticity of demand and commercial housing market. Research design, data, and methodology - In this paper, we have derived housing demand theoretic method and have utilized micro-data of residential family housing survey of downtown area in Kunming City in October, 2015 to estimate income elasticity and price elasticity of housing demand respectively and make a comparative analysis. Results - The results indicate that income elasticity and price elasticity of families with owner-occupied housing are both larger than those of families with rental housing. Income elasticity of housing demand of urban residential families in Kunming is far below the foreign average and eastern coastal cities level, however, the corresponding price elasticity is far higher. Conclusions - We suggest that housing affordability of urban families in western China are constrained by the level of economic development, and the current housing price level has exceeded the economic affordability and psychological expectation of ordinary residents. Furthermore, noticing the great rigidity of housing demand, the expansion space of housing market for improvement and for commodity is limited.

• Applied Science and Convergence Technology
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• 제23권4호
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• pp.192-199
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• 2014

The electronic property of graphene was investigated by hydrazine treatment. Hydrazine ($N_2H_4$) highly increases electron concentrations and up-shifts Fermi level of graphene based on significant shift of Dirac point to the negative gate voltage. We have observed contact resistance and channel length dependent mobility of graphene in the back-gated device after hydrazine monohydrate treatment and continuously monitored electrical characteristics under Nitrogen or air exposure. The contact resistance increases with hydrazine-treated and subsequent Nitrogen-exposed devices and reduces down in successive Air-exposed device to the similar level of pristine one. The channel conductance curve as a function of gate voltage in hole conduction regime keeps analogous value and shape even after Nitrogen/Air exposure specially whereas, in electron conduction regime change rate of conductance along with the level of conductance with gate voltage are decreased. Hydrazine could be utilized as the highly effective donor without degradation of mobility but the stability issue to be solved for future application.

• Asian Journal of Business Environment
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• 제13권2호
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• pp.9-20
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• 2023

Purpose: This study aims to map the spatial distribution of poverty using nighttime light satellite images as a proxy indicator of economic activities and infrastructure distribution in D.I Yogyakarta, Indonesia. Research design, data, and methodology: This study uses official poverty statistics (National Socio-economic Survey (SUSENAS) and Poverty Database 2015) to compare satellite imagery's ability to identify poor urban areas in D.I Yogyakarta. National Socioeconomic Survey (SUSENAS), as poverty statistics at the macro level, uses expenditure to determine the poor in a region. Poverty Database 2015 (BDT 2015), as poverty statistics at the micro-level, uses asset ownership to determine the poor population in an area. Pearson correlation is used to identify the correlation among variables and construct a Support Vector Regression (SVR) model to estimate the poverty level at a granular level of 1 km x 1 km. Results: It is found that macro poverty level and moderate annual nighttime light intensity have a Pearson correlation of 74 percent. It is more significant than micro poverty, with the Pearson correlation being 49 percent in 2015. The SVR prediction model can achieve the root mean squared error (RMSE) of up to 8.48 percent on SUSENAS 2020 poverty data.Conclusion: Nighttime light satellite imagery data has potential benefits as alternative data to support regional poverty mapping, especially in urban areas. Using satellite imagery data is better at predicting regional poverty based on expenditure than asset ownership at the micro-level. Light intensity at night can better describe the use of electricity consumption for economic activities at night, which is captured in spending on electricity financing compared to asset ownership.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.907-910
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• 1997

With increasing the needs for micro and precision parts, micro machining technology has been studied to fabricate a small part with high density such as electronics, optics, communications, and medicine industry more than before. But there are many problems to be solved requiring a high-level technology. So this research presents the new method to fabricate a small part through applying chemical mechanical micro machining (C3M) for the Al wafer. Al(thickness I ,u m) was sputtered on the Si substrate. Al is widely used as a lightweight material. However form defect such as burr has a bad effect on products. To improve machinability of ductile material, oxide layer was formed on the surface of AI wafcr before grooving by chemical reaction with HN03(10wt%). And then workpieces were machined to compare conventional micro-machining process with newly suggested method at different machining condition such as load and feed rate. To evaluate whether or not the machinability was improved by the effect of chemical condition, such as the size, the width of grooves 'and burr generation were measured. Finally, it is confirmed that C3M is one of the feasible tools for micro machining with the aid of effect of the chemical reaction.