• Journal of Mechanical Science and Technology
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• v.18 no.5
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• pp.789-797
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• 2004

The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in micro robotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a micro robotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.4 s.181
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• pp.22-28
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• 2006

• Tribology and Lubricants
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• v.12 no.4
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• pp.52-59
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• 1996

The results of the electrical contact conductivity of multi-contact spots accounting the surface roughness and the non-conductive films of different origins such as air, water, cutting oil, and machining oil are presented. The array of metal spheres compressed between two flat plates has been used for simulation of the contact behavior of multiple contact of solids, under normal loading. Measurement of electrical contact resistance has been made using the equipment providing the adequate accuracy in the range of micro Ohms. The data on electrical contact resistance have been compared with theoretical predictions using the multiple contact model of constriction resistance. The effect of single spot number and array on conductivity of contact has been evaluated. The results of the experiments show that the contact resistance are closely related to the number of loading cycles, form of surface roughness, and presence of non-conductive films that reduce the size of the real electrical contact spots.

• International Journal of Aeronautical and Space Sciences
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• v.18 no.3
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• pp.414-424
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• 2017

This paper introduces an experimental device which can measure accurate aerodynamic forces without support interference in wide experimental region for wind tunnel test of micro aerial vehicles (MAVs). A stereo pattern recognition (SPR) method was introduced to a magnetic suspension and balance system (MSBS), which can eliminate support interference by levitating the experimental model, to establish wider experimental region; thereby MSBS-SPR integrated system was developed. The SPR method is non-contact, highly accurate three-dimensional position measurement method providing wide measurement range. To evaluate the system performance, a series of performance evaluations including SPR system measurement accuracy and 6 degrees of freedom (DOFs) position/attitude control of the MAV model were conducted. This newly developed system could control the MAV model rapidly and accurately within almost 60mm for translational DOFs and 40deg for rotational DOFs inside of $300{\times}300mm$ test section. In addition, a static wind tunnel test was conducted to verify the aerodynamic force measurement capability. It turned out that this system could accurately measure the aerodynamic forces in low Reynolds number, even for the weak forces which were hard to measure using typical balance system, without making any mechanical contact with the MAV model.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.2445-2450
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• 2003

Recently, biological technology industry shows great development. Instruments and systems related biological technology have been developed actively. In this paper, we developed a new micro end-effector for biological cell manipulation. The existing micro end-effector for biological cell manipulation has not any force sensing mechanism. Usually, excessive contact force occurring when the end-effector and a cell collide might make a damage on the cell. However, unfortunately, user can not notice the condition in case of using the existing end-effector. In order to overcome we proposed the improved micro end-effector having a force sensing mechanism. This paper presents the design concepts of the new micro end-effector. We carried out calibration of the force sensor and tested the performance of the proposed micro end-effector. Through a series of experiments the new micro end-effector shows the possibility of application for precision biological cell manipulation such as DNA operation

• Transactions of the Korean Society of Mechanical Engineers
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• v.18 no.11
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• pp.2967-2972
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• 1994

The multiple character of the contact interaction and the collective behavior of elementary microcontacts play a significant role in all the processes occurring in the surface layers, including the failure due to friction and wear. The array of metal spheres compressed between flat plates has been used for simulation of the contact behavior of multiple contact of solids under normal loading. An experimental design has been made providing regular array of the spheres at the same size with different spatial order. Measurement of electrial contact resistance has been made using the equipment providing the adequate accuracy in the range of micro Ohms. The data on electrical contact resistance have been compared with theoretical predictions using the multiple contact model of constriction resistance. The effect of single spots number and array on conductivity of contact has been evaluated.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.30 no.3
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• pp.110-116
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• 2020

Grains in the BaTiO₃, which is used for a dielectric layer in MLCC(Multi-Layer Ceramic Capacitor) are necessary to form core/shell structure for a stable TCC(Temperature Coefficient of Capacitance) behavior. The shell property has been deduced from the whole TCC behavior of core/shell structure due to its tiny size, ~ few ㎛. This study demonstrates the individual TCC behavior of the shell phase measured by micro-contact measurement in a temperature range between 35 and 135℃. Pt electrode pairs deposited on an enlarged core/shell structure in a diffusion couple sample made the measurement possible. As a result, the DPT (Diffusion Phase Transition) behavior of the shell phase was revealed as a different TCC behavior from that of the core: a broad peak with T_m at 65℃. This would be also useful experimental data for a modelling that depicts dielectric-temperature behavior of core/shell structure.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.413-418
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• 2005

This paper proposes a measurement method for the surface of micro-parts by using AFM(Atomic Force Microscope). To this end, two techniques are presented to extend the capacity of AFM. First, the measurement range is extended by using an image matching method based on correlation coefficients. To account for the inaccuracy of the coarse stage implemented in AFM's, the image matching technique is applied to two neighboring images intentionally overlapped with each other. Second, a method to measure the shape of relatively large specimen is presented by using the inherent trigger mechanism due to the atomic force. The proposed method is proved effective through a series of experiments.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.14 no.6
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• pp.22-30
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• 2005

This paper proposes a measurement method for the surface shape of micro-parts by using an atomic force microscope(AFM). To this end, two techniques are presented: First, the measurement range is expanded by using an image matching method based on correlation coefficients. To account for the inaccuracy of the coarse stage implemented in AFM, the image matching technique is applied to two neighboring images intentionally overlapped with each other. Second, a method to measure the shape of relatively large specimen is proposed that utilizes the inherent trigger mechanism due to the atomic force. The proposed methods are proved effective through a series of experiments.

• Journal of ILASS-Korea
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• v.16 no.2
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• pp.104-109
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• 2011

The present study investigated experimentally the spreading characteristics of a single liquid impinging on the inclined micro-textured aluminum (Al 6061) surfaces manufactured by using a micro computerized numerical control (${\mu}$-CNC) milling machine. The textured surfaces were composed of patterned micro-holes (diameter of $125\;{\mu}m$ and depth of $125\;{\mu}m$). In our experiment, the de-ionized (DI) water droplet of $4.3\;{\mu}l$ was impinged normally on the non-textured and textured surfaces at two different Weber numbers, and the droplet impinged on the inclined surfaces with different angles. A high speed camera was used to capture sequential digital images for measurement of the maximum spreading distance. It was found that for the textured surface, the measured apparent equilibrium contact angle (ECA) increased up to $105.8^{\circ}$, higher than the measured ECA of $87.6^{\circ}$ for the non-textured (bare) surface. In addition, it is conjectured that the spreading distance decreased because of a liquid penetration during droplet spreading through the holes, the increase in hydrophobicity, and viscous dissipation during impact process.