• Title/Summary/Keyword: Micro-array lens

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LPE meltaback-etch and re-epitaxy of GaAs/AlGaAs for optical micro-lenses fabrication (광소자용 미소렌즈 제작을 위한 GaAs/AlGaAs계 액상식각 및 에피택시)

  • 함성호;권영세
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.34D no.9
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    • pp.64-71
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    • 1997
  • A new etching technique of meltback was investigated for GaAs lensed optical devices with selective windows opending in the LPE (liquid phase epitaxy) system. In the meltback process, the etch depth and the etch shape were controlled by the degree of under-saturation, etch time and other parameters. A GaAs/AlGaAs DH layer was grown on the selectively etched hemispherical well for optical device application such as lensed surface emitting LED. The regrowth process were related with the coolin grate and the well to well spacing. A novel surface emitting LED with hemispherical AlGaAs lens was fabricated using the meltbakc and regrowth as the key process for AlaAs lens array. The light emitting efficiency of the LED was upto three times higher than the similar structure LED without lens. The meltback and regrowth technique was applicable to manufacture the optical device in LPE.

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Micromachining for plastic mold steel using DPSS UV laser and wet etching (DPSS UV Laser와 습식 식각을 이용한 금형강 미세 가공)

  • Min, Kyoung-Ik;Kim, Jae-Gu;Cho, Sung-Hak;Choi, Doo-Sun;Whang, Kyung-Hyun
    • Laser Solutions
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    • v.12 no.3
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    • pp.1-6
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    • 2009
  • This paper describes the method for the fabrication of micro dot array on a plastic mold steel using DPSS (diode pumped solid-states) UV laser and wet etching process. We suggest the process of the ablation of a photoresist (PR) coated on plastic mold steel and wet etching process using solutions of various concentrations of $FeCl_3$, $HNO_3$ in water as etchant. This method makes it possible to fabricate metallic roller mold because the microstructures are directly fabricated on the metal surface. In the range of operating conditions studied, $17\;{\mu}J$ laser pulse energy and 50 ms laser exposure time, an etchant containing 40wt% $FeCl_3$, 5wt% $HNO_3$ and etch time for 45 s gave the $10\;{\mu}m$ of micro dot pattern on plastic mold steel.

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다이아몬드 미세형상가공에서 자려진동의 발생경향과 안전성 평가

  • 이언주;임한석;안중환
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1995.10a
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    • pp.71-74
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    • 1995
  • Diamond shaping is one of the machining strategies to make the optical micro-groove molds,and it is especially useful when rhe component is an assembly of the linear micro-groove array. A mirror-like surface and arbitrary crose-sectional curve can be easily made by diamond. Howerver, the cutting speed of shaping is relatively lower than that of the other cutting methods, and there exist an unstable cutting conditions that generate the chatter. This study is focused on the modeling of the simplified self-induced chatter of the diamond shapping. Form the chatter model and experiments, it is found that the unstable cutting conditions exist wwhen the depth of cut is low and cutting speed is high.

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CCD Scanning type MTF Measuring System for Microlens Arrays (CCD를 이용한 미세렌즈의 MTF 측정)

  • 이윤우;조현모;이인원;박태호;윤성균;서형원
    • Korean Journal of Optics and Photonics
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    • v.5 no.3
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    • pp.364-371
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    • 1994
  • Real-time MTF measuring system for testing microlens arrays with a linear CCD array is developed. The spread function of slit image that is relayed and magnified by a microscopic object lens can be measured at several times in a second. The signal uniformity and MTF of CCD is also calibrated. The experimental result of micro lens arrays developed for contact image sensor is presented.sented.

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Integral-floating Display with 360 Degree Horizontal Viewing Angle

  • Erdenebat, Munkh-Uchral;Baasantseren, Ganbat;Kim, Nam;Kwon, Ki-Chul;Byeon, Jina;Yoo, Kwan-Hee;Park, Jae-Hyeung
    • Journal of the Optical Society of Korea
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    • v.16 no.4
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    • pp.365-371
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    • 2012
  • A three-dimensional integral-floating display with 360 degree horizontal viewing angle is proposed. A lens array integrates two-dimensional elemental images projected by a digital micro-mirror device, reconstructing three-dimensional images. The three-dimensional images are then relayed to a mirror via double floating lenses. The mirror rotates in synchronization with the digital micro-mirror device to direct the relayed three-dimensional images to corresponding horizontal directions. By combining integral imaging and the rotating mirror scheme, the proposed method displays full-parallax three-dimensional images with 360 degree horizontal viewing angle.

3D Measurement System of Wire for Automatic Pull Test of Wire Bonding (Wire bonding 자동 전단력 검사를 위한 wire의 3차원 위치 측정 시스템 개발)

  • Ko, Kuk Won;Kim, Dong Hyun;Lee, Jiyeon;Lee, Sangjoon
    • Journal of Institute of Control, Robotics and Systems
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    • v.21 no.12
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    • pp.1130-1135
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    • 2015
  • The bond pull test is the most widely used technique for the evaluation and control of wire bond quality. The wire being tested is pulled upward until the wire or bond to the die or substrate breaks. The inspector test strength of wire by manually and it takes around 3 minutes to perform the test. In this paper, we develop a 3D vision system to measure 3D position of wire. It gives 3D position data of wire to move a hook into wires. The 3D measurement method to use here is a confocal imaging system. The conventional confocal imaging system is a spot scanning method which has a high resolution and good illumination efficiency. However, a conventional confocal systems has a disadvantage to perform XY axis scanning in order to achieve 3D data in given FOV (Field of View) through spot scanning. We propose a method to improve a parallel mode confocal system using a micro-lens and pin-hole array to remove XY scan. 2D imaging system can detect 2D location of wire and it can reduce time to measure 3D position of wire. In the experimental results, the proposed system can measure 3D position of wire with reasonable accuracy.

Fabrication of Scattering Layer for Light Extraction Efficiency of OLEDs (RIE 공정을 이용한 유기발광다이오드의 광 산란층 제작)

  • Bae, Eun Jeong;Jang, Eun Bi;Choi, Geun Su;Seo, Ga Eun;Jang, Seung Mi;Park, Young Wook
    • Journal of the Semiconductor & Display Technology
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    • v.21 no.1
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    • pp.95-102
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    • 2022
  • Since the organic light-emitting diodes (OLEDs) have been widely investigated as next-generation displays, it has been successfully commercialized as a flexible and rollable display. However, there is still wide room and demand to improve the device characteristics such as power efficiency and lifetime. To solve this issue, there has been a wide research effort, and among them, the internal and the external light extraction techniques have been attracted in this research field by its fascinating characteristic of material independence. In this study, a micro-nano composite structured external light extraction layer was demonstrated. A reactive ion etching (RIE) process was performed on the surfaces of hexagonally packed hemisphere micro-lens array (MLA) and randomly distributed sphere diffusing films to form micro-nano composite structures. Random nanostructures of different sizes were fabricated by controlling the processing time of the O2 / CHF3 plasma. The fabricated device using a micro-nano composite external light extraction layer showed 1.38X improved external quantum efficiency compared to the reference device. The results prove that the external light extraction efficiency is improved by applying the micro-nano composite structure on conventional MLA fabricated through a simple process.

Tilt Aberration Compensation Using Interference Patterns in Digital Holography

  • Cho, Hyung-Jun;Kim, Doo-Cheol;Yu, Young-Hun;Shin, Sang-Hoon;Jung, Won-Gi
    • Journal of the Optical Society of Korea
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    • v.13 no.4
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    • pp.451-455
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    • 2009
  • We present a numerical procedure that compensates for tilt phase aberration in in-line digital holography by computing the period of interference patterns in the reconstructed phase image. This method enables the reconstruction of correct and accurate phase information, even if strong tilt aberrations exist. Example applications of tilt aberration compensation are shown for a tilted plate, a micro-lens array, and a thin film transistor. This method is convenient because it uses only one hologram and no hardware to minimize the tilt aberration.

Combination Treatment of Nd:YAG Picosecond-domain Laser and Fractional CO2 Laser for Contracted Neck Scar with Hyperpigmentation

  • Choi, Woo Jung;Park, Eun Soo;Tak, Min Sung;Kang, Sang Gue
    • Medical Lasers
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    • v.10 no.1
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    • pp.52-54
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    • 2021
  • There is growing interest in minimizing postoperative scarring after a thyroidectomy. Among the many treatment types, laser therapy, especially picosecond-domain laser therapy, is accepted as a standard method. In the present case, a patient with a pigmented, contracted scar was treated using the combination of a picosecond laser and ablative fractional (AF) CO2 laser. After 15 sessions of 1,064-nm picosecond with micro lens array (MLA) and AF CO2 laser application, the patient showed significant improvement in their pigmented lesions and scar contracture with no noticeable side effects for 16 months. These results suggest that a combination of picosecond laser with MLA and AF CO2 laser can treat pigmented, contracted scars safely and effectively.

Design of Ultrasonic Vibration Device using PZT Actuator for Precision Laser Machining (압전구동기를 이용한 정밀 가공용 초음파 진동장치 설계)

  • Kim, W.J.;Fei, L.;Cho, S.H.;Park, J.K.;Lee, M.G.
    • Laser Solutions
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    • v.14 no.2
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    • pp.8-12
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    • 2011
  • As the aged population grows around the world, many medical instruments and devices have been developed recently. Among the devices, a drug delivery stent is a medical device which requires precision machining. Conventional drug delivery stent has problems of residual polymer and decoating because the drug is coated on the surface of stent with the polymer. If the drug is impregnated in micro hole array on the surface of the stent, the problem can be solved. Micro sized holes are generally fabricated by laser machining; however, the fabricated holes do not have an enough aspect ratio to contain the drug or a good surface finish to deliver it to blood vessel tissue. To overcome these problems, we propose a vibration-assisted machining mechanism with PZT (Piezoelectric Transducers) for the fabrication of micro sized holes. If the mechanism vibrates the eyepiece of the laser machining head, the laser spot on the workpiece will vibrate vertically because objective lens in the eyepiece shakes by the mechanism's vibration. According to the former researches, the vibrating frequency over 20kHz and amplitude over 500nm are preferable. The vibration mechanism has cylindrical guide, hollowed PZT and supports. In the cylinder, the eyepiece is mounted. The cylindrical guide has upper and low plates and side wall. The shape of plates and side wall are designed to have high resonating frequency and large amplitude of motion. The PZT also is selected to have high actuating force and high speed of motion. The support has symmetrical and rigid characteristics.

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