• Applied Microscopy
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• v.51
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• pp.8.1-8.7
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• 2021

Growing demands for comprehending complicated nano-scale phenomena in atomic resolution has attracted in-situ transmission electron microscopy (TEM) techniques for understanding their dynamics. However, simple to safe TEM sample preparation for in-situ observation has been limited. Here, we suggested the optical microscopy based micro-manipulating system for transferring TEM samples. By adopting our manipulator system, several types of samples from nano-wires to plate-like thin samples were transferred on micro-electro mechanical systems (MEMS) chip in a single step. Furthermore, the control of electrostatic force between the sample and the probe tip is found to be a key role in transferring process.

• Proceedings of the KACD Conference
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• 2002.11a
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• pp.706-706
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• 2002

No Abstract, See Full Text

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.233.1-233.1
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• 2005

• Proceedings of the KIEE Conference
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• 1989.07a
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• pp.34-36
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• 1989

Since the linear step motor(LSM) has the merits which can be controlled the position and velocity by using the micro-computer and has no mechanical transducer such as belt and gear, it's usefullness has been fitted for the printer, x-y plotter, OA machinery and so on. In designing the LSM, we are faced up to the calculation of forces. in this paper, the permeance modeling method suited for the design of transverse flux type linear step motor(TFM) is presented and simulated.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.201-201
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• 2010

볼로미터 제작 공정 중 One step via 공정 시 via hole 모양에 의해 정기적 연결 및 구조적 안정성에 문제를 해결하기 위하여 다른 via 식각 방식으로 공정을 진행하였으며 그에 따른 via 공정 차이에 대한 결과를 연구하였다.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.69-69
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• 2003

최근 trench capacitor, isolation trench, micro-electromechanical system(MEMS), micro-opto-electromechanical system(MOEMS)등의 다양한 기술에 적용될 고종횡비(HAR) 실리콘 식각기술연구가 진행되어 지고 있다. 이는 기존의 습식식각시 발생하는 결정방향에 따른 식각률의 차이에 관한 문제와 standard reactive ion etching(RIE) 에서의 낮은 종횡비와 식각률에 기인한 문제점들을 개선하기 위해 고밀도 플라즈마를 이용한 건식식각 장비를 사용하여 고종횡비(depth/width), 높은 식각률을 가지는 이방성 트랜치 구조를 얻는 것이다. 초기에는 주로 HBr chemistry를 이용한 연구가 진행되었는데 이는 식각률이 낮고 많은양의 식각부산물이 챔버와 시편에 재증착되는 문제가 발생하였다. 또한 SF6 chemistry의 사용을 통해 식각률의 향상은 가져왔지만 화학적 식각에 기인한 local bowing과 같은 이방성 식각의 문제점들로 인해 최근까지 CHF3, C2F6, C4F8, CF4등의 첨가가스를 이용하여 측벽에 Polymer layer의 식각보호막을 형성시켜 이방성 구조를 얻는 multi_step 공정이 일반화 되었다. 이에 본 연구에서는 SF6 chemistry와 소량의 02/HBr의 첨가가스를 이용한 single_step 공정을 통해 공정의 간소화 및 식각 프로파일을 개선하여 최적의 HAR 실리콘 식각공정 조건을 확보하고자 하였다.

• 제어로봇시스템학회:학술대회논문집
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• 1995.10a
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• pp.211-214
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• 1995

A precise open-loop positioning system using linear pulse motor has been developed. The system is operated in a microstepping mode by controlling the electric current. One step of 508 .mu.m (tooth pitch of the linear pulse motor) is divided into 508 micro-steps equally. The displacement is measured with a system using a Fiezeau-type interferometer. Periodical positioning error with a period of the tooth pitch was observed in this system. Therefore, the position is corrected using the error. The error is stored into computer in advance, and the microstep current is corrected on basis of the stored data. Although the positioning error of the system without the correction was .+-.4.5 .mu.m, that with the correction was decreased to .+-.1.0 .mu.m.

• Korean Chemical Engineering Research
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• v.57 no.2
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• pp.259-266
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• 2019

Tuning of electro-optical properties of nano-structured $SnO_2:Ga$ powders in a micro drop fluidized reactor (MDFR) was highly effective to enhance the activities of powders to be used as sensor materials. The tuning was conducted continuously in a facile one-step process during the formation of powders. The microscopic hydrodynamic forces affected the band gap structure and charge transfer of $SnO_2:Ga$ powders through the oxygen and interfacial tin vacancies by providing plausible pyro-hydraulic conditions, which resulted in the decrease in the electrical resistance of the materials. The analyses of room-temperature photoluminescence (PL) spectra and FT-IR exhibited that the tuning could improve the surface activities of $SnO_2:Ga$ powders by adjusting the excitation as well as separation of electrons and holes, thus maximizing the oxygen vacancies at the surface of the powders. The scheme of photocatalytic mechanism of $SnO_2:Ga$ powders was also discussed.

• Journal of the korean academy of Pediatric Dentistry
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• v.36 no.3
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• pp.348-357
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• 2009

The purpose of this study was to evaluate the micro-tensile bond strength (${\mu}TBS$) of four luting resin to regional dentin of human primary teeth. Dentin from non-carious primary molars were prepared from different regions (s, superficial dentin; d, deep dentin; c, cervical dentin), and divided into groups based on anatomical locations and types of luting resins (Scotchbond Multi-purpose : SB ; One-Step : OS ; AdheSE Bond : ASE ; G-Bond : GB) : SB-s, SB-d, SB-c; OS-s, OS-d, OS-c; ASE-s, ASE-d, ASE-c ; GB-s, GB-d, GB-c. Luting resins were used according to the manufacturers' instructions, to bond $Light-Core^{TM}$ Core Build-Up Composite) to the exposed dentin specimens in the light-curing mode. After storage for 1 day, ${\mu}TBS$ was tested at a cross-head speed of 1 mm/min. Data were analyzed with T-test and two-way ANOVA. The bonding interface and fractography analyses were performed with SEM. The results were as follows : 1. ${\mu}TBS$ to superficial dentin was significantly higher than to deep dentin for SB(p<0.05). But there were no significant differences in regional ${\mu}TBS$ among OS, ASE, GB(p>0.05). 2. There were no significant differences in ${\mu}TBS$ to superficial dentin among each groups. But, in deep dentin, ${\mu}TBS$ of SB-d was significantly lower than those of OS-d, ASE-d, and GB-d(p<0.05). ${\mu}TBS$ of OS-d was significantly higher than those of GB-d(p<0.05), but there were no significant differences in ${\mu}TBS$ of ASEd. There were no significant differences among ${\mu}TBS$ of ASE-d, OS-d, and GB-d.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.421-422
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• 2006

According to the industrialization the using of polymers is increased by their mechanical or commercial demands. At now, the using of polymers is become bigger and bigger than yet. On the other words, our whole life is covered by the polymers. Due to the extended polymer using, the material cost is higher and higher. Therefore, the people used the polymer foaming process using the gas. The polymer foaming using the pentane or butane gas is prohibited by the government cause of the explosiveness and non-environmental friendly. Therefore, the members of MIT invented the Micro-cellular Polymer Foaming in 1980. The Micro-cellular Polymers has many cells in the polymer matrix. By compare between non-foamed polymers, the Micro-cellular Polymers have low material cost, soundproof and shock less. The purpose of this study is to study the twice foamed polymer by batch process. To know the reaction by step of microcellular foaming process, we measure the density of polymer. And to viewing the cell morphology, we used the scanning electron microscopy(SEM).