• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.977-980
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• 1997

Ultraprecision machining process and MEMS technology have been taken more and more important position in machining of micro parts such as PDP and IT components, as the application field of micro parts increases. A micro machining center is very effective equipment for the fabrication of micro parts, because of its benefits such as lower power consumption, high precision and lower machining cost. Therefore, we study the possibility of application to the micro machining of barrier ribs used in PDP and also analyse the machining characteristics. The fabricated barrier rib has 30~$200\mu\textrm{m}$ pitch and was made by the flat endmill with the diameter of 0.2mm, 40, 000rpm condition.

• International Journal of Precision Engineering and Manufacturing
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• 제6권2호
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• pp.5-11
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• 2005

Among the micro machining techniques, micro EDM is generally used for machining micro holes, pockets, and micro structures on difficult-cut-materials. Micro EDM parameters such as applied voltage, capacitance, peak current, pulse width, duration time are very important to fabricate the tool electrode and produce the micro structures. Developed micro EDM machine is composed of a 3-axis driving system and RC circuit equipped with pulse generator. In this paper, using micro EDM machine, the characteristics of micro EDM process are investigated and it is applied to micro holes, slots, and pockets machining. Through experiments, relations between machined surface and voltages and between MRR and feedrate are investigated. Also the trends of tool wear are investigated in case of hole and slot machining.

• 한국기계가공학회지
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• 제12권3호
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• pp.28-35
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• 2013

Micro electrical discharge machining (EDM) as a non-contact machining process is very effective for micromachining with a thin electrode because of its low machining reaction force. The micro-electrode machining device has the advantage of maintaining high precision through the whole processes and uses a feeding wire in the thin electrode tool manufacturing process. This study describes the design and evaluation of a micro-electrode machining device using optical photo-interrupter. The electrode was fabricated by reverse electrical discharge machining. The performance of designed system was evaluated to measure tension force according to feed speed of wire. This system for micro electrode fabrication proves the feasibility in the micro-EDM process of the micro holes and parts for industrial applications.

• 한국정밀공학회지
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• 제28권3호
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• pp.308-314
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• 2011

In micro electrochemical machining (micro ECM), machining conditions have been determined to maintain a small side gap and to machine a workpiece stably However, machining speed is slow. To improve machining speed while maintaining the form accuracy, the paper investigates machining parameters such as pulse amplitude, duty ratio, pulse on-time, and the electrolyte's temperature and concentration. The experiment in this study shows that the electrolyte's concentration is the key factor that can reduce machining time while maintaining the form accuracy Micro square columns were fabricated to confirm the machining parameters' effects.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1897-1901
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• 2003

Recently, with the development of semiconductor technology the miniaturization of products as well as parts and the products with high precision are being required. In addition as a national competitive power is increasingly effected by micro part development through micro machining and the secure of micro machining technology, the study of micro machining technology is being conducted in many countries. The goal of this study is to fabricate micro tool under the size of 30$\mu\textrm{m}$ and machine micro holes through micro tool fabrication by grinding, the application of ELID to grinding wheel and the measurement of surface roughness for micro tool.

• 한국생산제조학회지
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• 제25권2호
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• pp.143-148
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• 2016

A micro end mill is one of the precise tools used in machining ultra-precision products such as microchannel and micropatterned mold. To achieve the required precision of these products, several studies investigated the cutting force, burr formation, and burr generation mechanism of micro end mills; however, there are few studies on the alignment of micro tools, which is the foundation of machining. Hence, in this investigation, relation expressions were derived to determine the relation between the misalignment parameters and the machining accuracy. At the same time, the effect of the machining parameters was analyzed using a multiple linear regression analysis and the analysis of variance. The results indicate that the tilting angle of a micro tool has more influence on the machining accuracy than other parameters.

• 한국기계가공학회지
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• 제13권6호
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• pp.119-126
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• 2014

Micro-holes of conductive ceramic are required in micro structures. Micro-electrical discharge machining (Micro-EDM) is an effective machining method since EDM is as process for shaping hard metals and complex-shaped holes by spark erosion in all kinds of electro-conductive materials. However, as the depth of micro hole increases, the machining condition becomes more unstable due to inefficient removal of debris between the electrode and the workpiece. In this paper, micro-EDM was performed to evaluate machining characteristic such as electrode wear, machining time, taper angle, radial clearance with varying voltage and ultrasonic vibration on 10 vol.% Carbon-nanotube reinforced conductive $Al_2O_3$ composite fabricated by spark plasma sintering in previous research.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.963-966
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• 2000

Abrasive jet machining(AJM) process is similar to the sand blasting, and effectively removes hard and brittle materials. AJM has applied to rough working such as deburring and rough finishing. As the needs for machining of ceramics, semiconductor, electronic devices and LCD are increasing, micro AJM was developed, and became the inevitable technique to micromachining. This paper describes the performance of the micro AJM in micro groove cutting of glass. Diameter of hole and width of line in this groove cutting is 80${\mu}{\textrm}{m}$. Experimental results showed good performance in micro groove cutting in glass, but the size of machined groove was increased about 2~4${\mu}{\textrm}{m}$. therefore, this micro AJM could be effectively applied to the micro machining of semiconductor, electronic devices and LCD parts.

• 한국기계가공학회지
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• 제11권2호
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• pp.7-12
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• 2012

In order to cope with the requirements of smaller patterns, larger surfaces and lower costs in the fields of displays, optics and energy, greater attentions are now being paid to the development of micro-pattern machining technology. Compared with flat moulds, large drums with micro patterns (roll moulds) have the advantages of short delivery, ease of manufacturing larger surfaces, and continuous moulding. This paper introduced the machining process technology of the roll moulds for display industry. The environmental effects were discussed and the importance of temperature maintenance was experimentally emphasized. The real time monitoring system for micro machining was introduced. A commercial solution was used to simulate the micro grooving and a deformation model of micro machined pattern was finally introduced.

• 한국정밀공학회지
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• 제31권5호
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• pp.389-394
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• 2014

In this paper, we report a new manufacturing method for friction reduction using micro-AAJ (abrasive air-jet) machining. AAJ machining employs compressed air to accelerate a jet of high-speed particles to mechanically machine features, including micro-channels and micro-holes, into glass, metal, or polymer substrates for use in microfluidics, MEMS (micro electromechanical systems). And we introduce the micro-AAJ machining system, which consists of a micro-AAJ nozzle and a five-axis positioning system. Various micro-AAJ nozzles can be used, depending on the required surface structure, and three-dimensional machining is possible. We machined samples under six different conditions and describe machining results obtained while using it. We also measured the coefficient of friction of micro-textured surfaces. We report the coefficient of friction of micro-textured surfaces patterned using micro-AAJ machining for engine piston ring.