• Title/Summary/Keyword: Micro-Electro-Mechanical Systems

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Performance verification methods of an inertial measurement unit in flight environment using the real time dual-navigation (실시간 다중항법을 이용한 관성측정기의 비행환경 성능 검증 기법)

  • Park, ByungSu;Lee, SangWoo;Jeong, Sang Mun;Han, KyungJun;Yu, Myeong-Jong
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.45 no.1
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    • pp.36-45
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    • 2017
  • Abstract It is necessary to verify the properties of an inertial measurement unit in the flight environment before applying to military applications. In this paper, we presented a new approach to verify an inertial measurement unit(IMU) in regard to the performance and the robustness in flight environments for the high-dynamics vehicle systems. We proposed two methods for verification of an IMU. We confirmed normal operation of an IMU and properties in flight environment by using direct comparison method. And we proposed real time multi-navigation system to complement the first method. The proposed method made it possible to compare navigation result at the same time. Therefore, it is easy to analyze the performance of an inertial navigation system and robustness during the vehicle flight. To verify the proposed method, we carried out a flight test as well as an experimental test of flight vibration on the ground. As a result of the experiment, we confirmed flight environment properties of an IMU. Therefore, we shows that the proposed method can serve the reliability improvement of IMU.

Fabrication of MEMS Test Socket for BGA IC Packages (MEMS 공정을 이용한 BGA IC 패키지용 테스트 소켓의 제작)

  • Kim, Sang-Won;Cho, Chan-Seob;Nam, Jae-Woo;Kim, Bong-Hwan;Lee, Jong-Hyun
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.47 no.11
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    • pp.1-5
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    • 2010
  • We developed a novel micro-electro mechanical systems (MEMS) test socket using silicon on insulator (SOI) substrate with the cantilever array structure. We designed the round shaped cantilevers with the maximum length of $350{\mu}m$, the maximum width of $200{\mu}m$ and the thickness of $10{\mu}m$ for $650{\mu}m$ pitch for 8 mm x 8 mm area and 121 balls square ball grid array (BGA) packages. The MEMS test socket was fabricated by MEMS technology using metal lift off process and deep reactive ion etching (DRIE) silicon etcher and so on. The MEMS test socket has a simple structure, low production cost, fine pitch, high pin count and rapid prototyping. We verified the performances of the MEMS test sockets such as deflection as a function of the applied force, path resistance between the cantilever and the metal pad and the contact resistance. Fabricated cantilever has 1.3 gf (gram force) at $90{\mu}m$ deflection. Total path resistance was less than $17{\Omega}$. The contact resistance was approximately from 0.7 to $0.75{\Omega}$ for all cantilevers. Therefore the test socket is suitable for BGA integrated circuit (IC) packages tests.

MEMS Fabrication of Microchannel with Poly-Si Layer for Application to Microchip Electrophoresis (마이크로 칩 전기영동에 응용하기 위한 다결정 실리콘 층이 형성된 마이크로 채널의 MEMS 가공 제작)

  • Kim, Tae-Ha;Kim, Da-Young;Chun, Myung-Suk;Lee, Sang-Soon
    • Korean Chemical Engineering Research
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    • v.44 no.5
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    • pp.513-519
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    • 2006
  • We developed two kinds of the microchip for application to electrophoresis based on both glass and quartz employing the MEMS fabrications. The poly-Si layer deposited onto the bonding interface apart from channel regions can play a role as the optical slit cutting off the stray light in order to concentrate the UV ray, from which it is possible to improve the signal-to-noise (S/N) ratio of the detection on a chip. In the glass chip, the deposited poly-Si layer had an important function of the etch mask and provided the bonding surface properly enabling the anodic bonding. The glass wafer including more impurities than quartz one results in the higher surface roughness of the channel wall, which affects subsequently on the microflow behavior of the sample solutions. In order to solve this problem, we prepared here the mixed etchant consisting HF and $NH_4F$ solutions, by which the surface roughness was reduced. Both the shape and the dimension of each channel were observed, and the electroosmotic flow velocities were measured as 0.5 mm/s for quartz and 0.36 mm/s for glass channel by implementing the microchip electrophoresis. Applying the optical slit with poly-Si layer provides that the S/N ratio of the peak is increased as ca. 2 times for quartz chip and ca. 3 times for glass chip. The maximum UV absorbance is also enhanced with ca. 1.6 and 1.7 times, respectively.

A Time Synchronization Scheme for Vision/IMU/OBD by GPS (GPS를 활용한 Vision/IMU/OBD 시각동기화 기법)

  • Lim, JoonHoo;Choi, Kwang Ho;Yoo, Won Jae;Kim, La Woo;Lee, Yu Dam;Lee, Hyung Keun
    • Journal of Advanced Navigation Technology
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    • v.21 no.3
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    • pp.251-257
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    • 2017
  • Recently, hybrid positioning system combining GPS, vision sensor, and inertial sensor has drawn many attentions to estimate accurate vehicle positions. Since accurate multi-sensor fusion requires efficient time synchronization, this paper proposes an efficient method to obtain time synchronized measurements of vision sensor, inertial sensor, and OBD device based on GPS time information. In the proposed method, the time and position information is obtained by the GPS receiver, the attitude information is obtained by the inertial sensor, and the speed information is obtained by the OBD device. The obtained time, position, speed, and attitude information is converted to the color information. The color information is inserted to several corner pixels of the corresponding image frame. An experiment was performed with real measurements to evaluate the feasibility of the proposed method.

K-DEV: A Borehole Deviation Logging Probe Applicable to Steel-cased Holes (철재 케이싱이 설치된 시추공에서도 적용가능한 공곡검층기 K-DEV)

  • Yoonho, Song;Yeonguk, Jo;Seungdo, Kim;Tae Jong, Lee;Myungsun, Kim;In-Hwa, Park;Heuisoon, Lee
    • Geophysics and Geophysical Exploration
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    • v.25 no.4
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    • pp.167-176
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    • 2022
  • We designed a borehole deviation survey tool applicable for steel-cased holes, K-DEV, and developed a prototype for a depth of 500 m aiming to development of own equipment required to secure deep subsurface characterization technologies. K-DEV is equipped with sensors that provide digital output with verified high performance; moreover, it is also compatible with logging winch systems used in Korea. The K-DEV prototype has a nonmagnetic stainless steel housing with an outer diameter of 48.3 mm, which has been tested in the laboratory for water resistance up to 20 MPa and for durability by running into a 1-km deep borehole. We confirmed the operational stability and data repeatability of the prototype by constantly logging up and down to the depth of 600 m. A high-precision micro-electro-mechanical system (MEMS) gyroscope was used for the K-DEV prototype as the gyro sensor, which is crucial for azimuth determination in cased holes. Additionally, we devised an accurate trajectory survey algorithm by employing Unscented Kalman filtering and data fusion for optimization. The borehole test with K-DEV and a commercial logging tool produced sufficiently similar results. Furthermore, the issue of error accumulation due to drift over time of the MEMS gyro was successfully overcome by compensating with stationary measurements for the same attitude at the wellhead before and after logging, as demonstrated by the nearly identical result to the open hole. We believe that the methodology of K-DEV development and operational stability, as well as the data reliability of the prototype, were confirmed through these test applications.