• 대한기계학회논문집B
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• 제32권3호
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• pp.231-234
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• 2008

For the applications which need a micro-power supply such as thin and flat displays, micro-robot, and micro-system, it is especially necessary to integrate the passive components because they typically need more than 2/3 of the space of the conventional circuit. Therefore, we have designed and fabricated a novel piezoelectric micro transformer using the PZT thin film and MEMS technologies for application to the energy supply device of the micro-systems. The dimensions of the micro-transformer is $1000{\mu}m\;{\times}\;400{\mu}m\;{\times}\;4.8{\mu}m$ $(length{\times}width{\times}thickness)$. The dynamic displacement of around $9.2{\pm}0.064{\mu}m$ was observed at 10 V. The dynamic displacement varied almost linearly with applied voltage. The average voltage gain (step-up ratio) was approximately 2.13 at the resonant frequency $(F_r=8.006KHz)$ and load resistance $(R_L)$ of 1 $M{\Omega}$.

• 대한기계학회논문집
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• 제19권2호
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• pp.418-426
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• 1995

A bubble-powered microactuator is designed conceptually. And the actuation mechanism due to bubble growth and collapse is studied numerically and analytically. In this analysis, it is estimated that the time lag for bubble formation on micro line heater, the duration of the bubble growth and collapse and the pressure change in actuator due to the bubble evolution. Based on these calculations, the actuator control scheme is visualized. This actuator may be applicable to the system which needs to pump liquid correctly and regularly.

• 한국인터넷방송통신학회논문지
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• 제10권2호
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• pp.151-157
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• 2010

MEMS(Micro Electro-Mechanical Systems) 분야의 급격한 발전은 저비용의 정보 처리 센싱 능력을 갖춘 센서의 발전에 박차를 가했다. 이러한 기술의 흐름은 강력하고 높은 확장성을 가지는 WSNs(Wireless Sensor Networks)을 위하여 더 많은 센서 간 연결을 위한 연구가 진행되고 있는 실정이다. WSNs의 자원부족, Ad-hoc 배치방법, 보다 광대해지는 규모는 센서 간 통신에서 안전성을 보다 중요한 문제로 인식하게 하고 있다. 센서 네트워크의 주요 고려사항은 에너지 효율이기 때문에, 보안 기술은 통신에서의 보안 특징과 그것을 수행하기 위해 계산해야하는 오버헤드 간 균형을 맞춰야한다. 본 논문에서는 새로운 보안 인식 다중경로 위치기반 라우팅 프로토콜을 개발하기 위하여 위치정보와 전송확률을 결합한다. 네트워크 시뮬레이터(ns-2)를 실행한 결과 보다 나은 성능을 얻을 수 있음을 알 수 있다.

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2006년도 춘계종합학술대회
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• pp.924-926
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• 2006

저전력 집적회로 기술과 MEMS (micro electro-mechanical systems) 기술이 융합된 산물인 스마트 센서는 작은 크기, 저비용, 저전력의 특성을 가지고, 그와 더불어 임베디드 어플리케이션에 사용되기에 적합하므로 이동 환경 컴퓨팅 분야에서 주목을 받고 있다. 이 센서들이 이동 통신에 적용되면 어플리케이션의 특성에 따라 인간의 접촉이 쉽지 않은 곳과 원격 통신이 가능하다는 장점이 있다. 이러한 혁명적인 원격 네트워크 기술로 인하여 활동적인 연구자들에게 엄청난 연구의 장이 열린 것이다. 본 논문에서는 그 중 한가지의 어플리케이션인 열센서 카메라에 대한 응용 분야로, 적외선 열센서 카메라에 대한 미세 조정을 위한 시스템 구축 방안에 대하여 논의한다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회B
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• pp.2788-2793
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• 2008

A numerical analysis has been conducted for flow characteristics and performance of a micropump with piezodisk and MHD(Magnetohydrodynamics) fluid. Various micro systems which could not be considered in the past have been recently growing with the development of MEMS(Micro Electro Mechanical System) and micro machining technology. Especially, micropumps, essential part of micro fluidic devices, are being lively studies by many researchers. In the present study, the piezo electric micropump with electromagnetic resistance for electrically conducting fluids is considered. The prescribed grid deformation method is used for the displacement of the membrane. The change of the performance of the micropump and flow characteristics of the electrically conducting fluid with the magnitude of the magnetic fields, duct size, the position of the inlet and outlet duct are investigated in the present study.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 춘계학술대회 논문요약집
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• pp.140-140
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• 2004

마이크로 기술을 대변하는 Micro-Electro-Mechanical-Systems (MEMS)와 반도체, 각종 micro-sensor 및 actuator 등은 실리콘 위에 박막 코팅한 재료를 주로 사용하고 있다. 따라서 1 Um 이하의 박막코팅에 의해 원하는 성능을 얻으려는 시도가 널리 진행되고 있다 Hard Disk Drive (HDD)의 Head-Disk Interface (HDI)와 MEMS 접촉면에서는 발생하는 마찰 및 마멸에 대한 문제 등은 중요한 고려대상이다. 특히 코팅 층의 표면 파손 현상은 코팅 층의 파손 특성과 코팅 층과 기판 사이의 결합상태가 큰 영향을 미친다.(중략)

• 한국유체기계학회 논문집
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• 제19권1호
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• pp.24-30
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• 2016

In this study, a 2W micro-gas turbine engine was designed using micro-electro-mechanical systems (MEMS) technology, and experimental investigations of its potential under actual combustion conditions were performed. A micro-gas turbine (MGT) contains a turbo-charger, combustor, and generator. Compressor and turbine blades, and generator coil were manufactured using MEMS technology. The shaft was supported by a precision computer numerical control (CNC) machined static air bearing, and a permanent magnet was attached to the end of the shaft for generation. A heat transfer analysis found that the cooling effect of the air bearing and compressor was sufficient to cover the combustor's high temperature, which was verified in an actual experiment. The generator performance test showed that it can generate 2W at design rotational speed. Prototype micro-gas turbine generated maximum 1 mW electric power and lasted up to 15 minutes.

• Advances in Computational Design
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• 제2권2호
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• pp.107-119
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• 2017

The Micro circular diaphragm (MCD) is the mechanical actuator part used in the micro electro-mechanical sensors (MEMS) that combine electrical and mechanical components. These actuators are working under harsh mechanical and thermal conditions, so it is very important to study the mechanical and thermal behaviors of these actuators, in order to do with its function successfully. The objective of this paper is to determine the thermo-mechanical behavior of MCD by developing the traditional bulge test technique to achieve the aims of this work. The specimen is first pre-stressed to ensure that is no initial deflection before applied the loads on diaphragm and then clamped between two plates, a differential pressure (P) and temperature ($T_b$) is leading to a deformation of the MCD. Analytical formulation of developed bulge test technique for MCD thermo-mechanical characterization was established with taking in-to account effect of the residual strength from pre-stressed loading. These makes the plane-strain bulge test ideal for studying the mechanical and thermal behavior of diaphragm in both the elastic and plastic regimes. The differential specimen thickness due to bulge effect to describe the mechanical behavior, and the temperature effect on the MCD material properties to study the thermal behavior under deformation were discussed. A finite element model (FEM) can be extended to apply for investigating the reliability of the proposed bulge test of MCD and compare between the FEM results and another one from analytical calculus. The results show that, the good convergence between the finite element model and analytical model.

• 한국기계가공학회지
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• 제11권5호
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• pp.99-103
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• 2012

Presently, A glass is widely used in telecommunication system, optoelectronic devices and micro electro mechanical systems. Micro drilling of glass using the laser can save processing cost and improve the accuracy. This paper experiments micro drilling using KrF excimer laser on the pyrex glass of $500{\mu}m$ thickness. We have experiment to find out optimum laser machining conditions of micro drilling of glass and ablation depth and influence by processing parameter suc'h pulse repetition rate, energy density and number of pulses. Pulse repetition rate don't influence ablation depth at the micro drilling of pyrex glass. Energy density influence micro drilling of parallelism and maximum thickness that can be drilled. Ablation depth is most influenced by number of pulses.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.481-482
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• 2006

Chemical-mechanical polishing, the dominant technology for LSI planarization, is trending to play an important function in micro-electro mechanical systems (MEMS). However, MEMS CMP process has a couple of different characteristics in comparison to LSI device CMP since the feature size of MEMS is bigger than that of LSI devices. Preliminary CMP tests are performed to understand material removal rate (MRR) with blanket wafer under a couple of polishing pressure and velocity. Based on the blanket CMP data, this paper focuses on the consumable approach to enhance MEMS CMP by the adjustment of slurry and pad. As a mechanical tool, newly developed microstructured (MS) pad is applied to compare with conventional pad (IC 1400-k Nitta-Haas), which is fabricated by micro melding method of polyurethane. To understand the CMP characteristics in real time, in-situ friction force monitoring system was used. Finally, the topography change of poly-si MEMS structures is compared according to the pattern density, size and shape as polishing time goes on.