• Title/Summary/Keyword: Micro-Electro-Mechanical Systems

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Miniaturization Development of Transmit/Receive Module using a 10W MEMS switch (10W급 MEMS 스위치를 이용한 송수신모듈 소형화 개발)

  • Yi, Hui-min;Jun, Byoung-chul;Lee, Bok-hyung
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.20 no.12
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    • pp.2417-2424
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    • 2016
  • Small size and light weight is very important for components used in radar mounted platform such as airborne radar. Recently, the active phased array radar is developed as an array of antennas for thousands of transmit/receive modules to be used as a multi-function radar that can detect and track targets. In this case, the size and weight of the transmit/receive modules are critical factor for developing the radar. In this paper, we developed a compact transmit/receive module using the 10W RF MEMS switch domestically localizing and reduced the circuit area to about 86.5% compared to using a circulator. The developed module satisfies not only electrical requirements but also MIL-STD's environmental specifications. So it can be used in a military device. It can be used at adaptive tunable receivers, reconfigurable smart active antennas and wide band beam electrical steering antennas.

Development of Android Smartphone App for Camera-based Remote Monitoring System (카메라 기반의 원격 모니터링 시스템을 위한 안드로이드 스마트폰 앱 개발)

  • Lee, Seong-Kyu;Kim, Jin-Soo;Kim, Young-Seup;Choi, Chul-Uong
    • Spatial Information Research
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    • v.19 no.5
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    • pp.87-96
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    • 2011
  • Recently mobile users can access to internet using smart phone at any place and any time, through which they can search and share information. In addition, as the sensors with high-tech functions become cheaper and miniaturized along with the development of MEMS (micro-electo mechanical systems) technology, the extent to utilize smart phone is increasing. Smart phone is equipped with various sensors such as high-resolution camera, GPS, gyroscope and magnetic sensor, which is an appropriate system configuration for remote monitoring research using camera. The remote monitoring system requires camera for video and internet network to send video, for which it has a limitation that it is influenced by the monitoring location. This study is aimed to design and develop the monitoring app. which can be remotely monitored using smart phone technology. The developed monitoring app was designed to take images of ROI (region of interest) within the specified time and to automatically send the images to the server. The developed app. is also possible to be remotely controlled by SMS (short message service). The monitoring proposed in this study can take high-resolution images using CMOS built in the smart phone and send the images and information to the server automatically at any place and any time using 3G and Wi-Fi networks.

Biomimetic Gyroscope Integrated with Actuation Parts of a Robot Inspired by Insect Halteres (평형곤을 모사한 생체모방형 구동부 일체형 각속도 센서)

  • Jeong, Mingi;Kim, Jisu;Jang, Seohyeong;Lee, Tae-Jae;Shim, Hyungbo;Ko, Hyoungho;Cho, Kyu-Jin;Cho, Dong-Il Dan
    • Journal of Institute of Control, Robotics and Systems
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    • v.22 no.9
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    • pp.705-709
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    • 2016
  • Micro-electro-mechanical systems (MEMS) gyroscopes are widely used in various robot applications. However, these conventional gyroscopes need to vibrate the proof mass using a built-in actuator at a fixed resonance frequency to sense the Coriolis force. When a robot is not moving, the meaningless vibration of the gyroscope wastes power. In addition, this continuous vibration makes the sensor vulnerable to external sound waves with a frequency close to the proof-mass resonance frequency. In this paper, a feasibility study of a new type of gyroscope inspired by insect halteres is presented. In dipterous insects, halteres are a biological gyroscope that measures the Coriolis force. Wing muscles and halteres are mechanically linked, and the halteres oscillate simultaneously with wing beats. The vibrating haltere experiences the Coriolis force if the insect is going through a rotational motion. Inspired by this haltere structure, a gyroscope using a thin mast integrated with a robot actuation mechanism is proposed. The mast vibrates only when the robot is moving without requiring a separate actuator. The Coriolis force of the mast can be measured with an accelerometer installed at the tip of the mast. However, the signal from the accelerometer has multiple frequency components and also can be highly corrupted with noise, such that raw data are not meaningful. This paper also presents a suitable signal processing technique using the amplitude modulation method. The feasibility of the proposed haltere-inspired gyroscope is also experimentally evaluated.

Development of Pulsating Type Electromagnetic Hammer Drive Systems (맥동파 전자해머 구동시스템의 개발)

  • Ahn, Dong-Jun;Nam, Hyun-Do
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.17 no.5
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    • pp.269-274
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    • 2016
  • This paper proposes the development of a low frequency electronic hammer drive system that is used to prevent scaling or clogging in the hopper process. The electro-mechanical hammering driving method involves the generation of vibration and impact energy. The operation principles of the electromagnetic hammer were considered by parallel/series spring coefficient analysis and the amount of kinetic energy generated was calculated from the product of the equivalent spring constant, which is coupled with the E core and the gap of between the E core and I core. In addition, the Pulsation Driving algorithm was applied to the proposed electromagnetic hammer to obtain the maximizing kinetic energy. This algorithm was then implemented by a logical AND operation process and micro-controller (atmega128) built in functions with a timer interrupt and PWM generation function. The driving circuit of the electromagnetic hammer was designed using the H-bridge type IGBT circuit. The experimental test was performed by usefulness of the developed electromagnetic hammer systems with the acceleration measurement method. The experimental result showed that the proposed system has good kinetic energy generation performance and can be applied to the hopper process.

The Extraction Method for the G-Sensitivity Scale-Factor Error of a MEMS Vibratory Gyroscope Using the Inertial Sensor Model (관성센서 오차 모델을 이용한 진동형 MEMS 자이로스코프 G-민감도 환산계수 오차 추출 기법)

  • Park, ByungSu;Han, KyungJun;Lee, SangWoo;Yu, MyeongJong
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.47 no.6
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    • pp.438-445
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    • 2019
  • In this paper, we present a new approach to extract the g-sensitivity scale-factor error for a MEMS gyroscope. MEMS gyroscopes, based on the use of both angular momentum and the Coriolis effect, have a g-sensitivity error due to mass unbalance. Generally, the g-sensitivity error is not considered in general use of gyroscopes, but it deserves our attention if we are to develop for tactical class performance and reliability. The g-sensitivity error during vehicle flight increases navigation error; so it must be analyzed and compensated for the use of MEMS IMU for high dynamics vehicle systems. Therefore, we analyzed how to extract the g-sensitivity scale-factor error from the inertial sensor error model. Furthermore we propose a new method to extract the g-sensitivity error using flight motion simulator. We verified our proposed method with experimental results.

Network Time Protocol Extension for Wireless Sensor Networks (무선 센서 네트워크를 위한 인터넷 시각 동기 프로토콜 확장)

  • Hwang, So-Young
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.15 no.12
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    • pp.2563-2567
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    • 2011
  • Advances in smart sensors, embedded systems, low-power design, ad-hoc networks and MEMS have allowed the development of low-cost small sensor nodes with computation and wireless communication capabilities that can form distributed wireless sensor networks. Time information and time synchronization are fundamental building blocks in wireless sensor networks since many sensor network applications need time information for object tracking, consistent state updates, duplicate detection and temporal order delivery. Various time synchronization protocols have been proposed for sensor networks because of the characteristics of sensor networks which have limited computing power and resources. However, none of these protocols have been designed with time representation scheme in mind. Global time format such as UTC TOD (Universal Time Coordinated, Time Of Day) is very useful in sensor network applications. In this paper we propose network time protocol extension for global time presentation in wireless sensor networks.

The analysis on properties of IR emitter unit device fabricated by using MEMS technology for Infrared Scene Projector (MEMS 기술을 이용하여 제작한 적외선 영상 투사용 에미터 단위 소자의 특성 분석)

  • Park, Ki Won;Shin, Young Bong;Kang, In-Ku;Lee, Hee Chul
    • Journal of the Institute of Electronics and Information Engineers
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    • v.54 no.3
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    • pp.31-36
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    • 2017
  • In this paper, designed infrared (IR) emitter device for infrared scene projector (IRSP) which is used for evaluating the performance of IR sensor systems was simulated by using finite element analysis (FEA) tool and fabricated by using MEMS (Micro Electro-Mechanical System) technology. The performance of the fabricated IR emitter unit device was characterized in the vacuum chamber by using IR image microscope for MWIR($3{\sim}5{\mu}m$), which showed 423K apparent temperature (Tapp) and 22msec time constant (${\tau}$).

Study on MEMS based IMU & GPS Performance in Urban Area for Light-Weighted Mobile Mapping Systems (경량 모바일매핑시스템을 위한 도심지 내 MEMS 기반 IMU/GPS 통합센서(MTi-G) 특성 연구)

  • Woo, Hee-Sook;Kwon, Kwang-Seok;Kim, Byung-Guk
    • Journal of Korean Society for Geospatial Information Science
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    • v.20 no.1
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    • pp.65-72
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    • 2012
  • With the development of MEMS, small and low-priced sensors integrating IMU and GPS have produced and exploited for diverse field. In this research, we have judged that MEMS-based IMU/GPS sensor is suitable for light-weighted mobile mapping system and carried out experiments to analyze the characteristics of MTi-G, which was developed from XSens company. From a sensor which fixed to dashboard, coordinates results with no post-processing were achieved for test area. On the whole, the results show satisfactory performances but some errors also were discovered from parts of the road due to sensor properties, XKF characteristics and GPS reception environment. We could confirm the potential of light-weighted mobile mapping system. Experiments considering various GPS reception environments and road condition and more detailed level of accuracy analysis will be performed for further research.

바이오 센서 응용을 위한 Tree-like 실리콘 나노와이어의 표면성장 및 특성파악

  • An, Chi-Seong;Kulkarni, Atul;Kim, Ho-Jung;Kim, Tae-Seong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.346-346
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    • 2011
  • 실리콘 나노와이어는 높은 표면적으로 인해 뛰어난 감지 능력을 가지는 재료 중 하나로 다양한 센서 응용 분야에 사용되고 있다. 이를 제작하는 방법에는 Micro Electro Mechanical Systems (MEMS) 공정을 이용한 Top-down 방식과 Vapor-Liquid-Solid (VLS) 공정을 이용한 Bottom-up 방식이 널리 사용되고 있다. 특히 Plasma-Enhanced Chemical Vapor Deposition(PECVD)와 Au 촉매를 이용한 Bottom-up 방식은 수십 나노미터 이하의 실리콘 나노와이어를 간단한 변수 조절을 통해 성장시킬 수 있다. 또한 Au/Si의 공융점인 363$^{\circ}C$보다 낮은 온도에서 $SiH_4$를 분해시킬 수 있어 열적 효과로 인한 손실을 줄일 수 있는 장점을 지니고 있다. 하지만 PECVD를 이용한 실리콘 나노와이어 성장은 VLS 공정을 통해 표면으로부터 수직으로 성장하게 되는데 이는 센서 응용을 위한 전극 사이의 수평 연결 어려움을 지니고 있다. 따라서 이를 피하기 위한 표면 성장된 실리콘 나노와이어가 요구된다. 본 연구에서는 PECVD VLS 공정을 이용하여 $HAuCl_4$를 촉매로 이용한 표면 성장된 Tree-like 실리콘 나노와이어를 성장시켰다. 공정가스로는 $SiH_4$와 이를 분해시키기 위해 Ar 플라즈마를 사용 하였고 웨이퍼 표면에 HAuCl4를 분사하고 고진공 상태에서 챔버 기판을 370$^{\circ}C$까지 가열한 후 플라즈마 파워(W) 및 공정 압력(mTorr)을 변수로 두어 실험을 진행하였다. 기존의 보고된 연구와 달리 환원된 금 입자 대신 $HAuCl_4$용액을 그대로 사용하였는데 이는 표면 조도(Surface roughness)를 가지는 Au 박막 상태로 존재하게 된다. 이 중 마루(Asperite) 부분에 PECVD로부터 발생된 실리콘 나노 입자가 상대적으로 높은 확률로 흡착하게 되어 실리콘 나노와이어의 표면성장을 유도하게 된다. 성장된 실리콘 나노와이어는 SEM과 EDS를 이용하여 직경, 길이 및 화학적 성분을 측정하였다. 직경은 약 100 nm, 길이는 약 10 ${\mu}m$ 정도로 나타났으며 Tree-like 실리콘 나노와이어가 성장되었다. 향후 전극이 형성된 기판위에 이를 직접 성장시킴으로써 이 물질의 I-V 특성을 파악 할 것이며 이는 센서 응용 분야에 도움이 될 것으로 기대된다.

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Efficiency Test for Low Electric Power Type and MEMS Based 3-axis Accelerometer (저전력 MEMS 기반 3축 가속도계의 성능 시험)

  • Lee, Byeung-Leul;Lee, Seung-Jae;Moon, Dae-Joong;Jung, Jin-Woo
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.18 no.1
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    • pp.160-165
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    • 2014
  • In this study, an efficiency test was performed by fabricating MEMS (Micro Electro Mechanical Systems) based 3-axis acceleration sensor modules and an earthquake monitoring system was composed. Data acquisition device (NI-9239) with a 24bit ADC (Analog to Digital Converter) was used for improving the performance of 3-axis acceleration sensor modules and filtered data (100Hz Low Pass Filter) was used for reducing noises. Also this paper focused on detecting meaningful vibration in the building by developing the earthquake monitoring software. If vector sum of 3-axis acceleration is greater than the preset value, the value will be recorded and saved to the file.