• 한국소성가공학회:학술대회논문집
• /
• 한국소성가공학회 2005년도 춘계학술대회 논문집
• /
• pp.229-232
• /
• 2005

This paper presents the design and fabrication of backflow prevented Micropump using the metal membrane. The Micropump is consisted of the lower plate, metal membrane, upper plate and the piezoelectric-element. The lower plate includes the micro channel and the inlet, outlet of the Micropump. The upper plate includes the micro channel and connects the piezoelectric-element. These plate are fabricated on the Pyrex glass wafer by sandblasting process. The metal membrane does roll of check valve that is prevented backflow of the Micropump. The metal membrane is fabricated on the stainless steel by laser machining. Piezoelectric-element is actuated the Micropump and controlled flowing of fluid. The Micropump is fabricated by bonding process of these multi-layer.

• International Journal of Automotive Technology
• /
• 제8권2호
• /
• pp.219-224
• /
• 2007

Recently, atmospheric contaminations has become worse due to the increased number of automobile. The PCV (Positive Crankcase Ventilation) valve acts as a flow control to allow re-combustion of blow-by gas by having it flow from a crankcase to an inlet manifold suction tube. Also, during the fabrication of the PCV valve, micro cracks may occur in the valve body and be extended under operation. The excessive stress distribution and crack initiation on the PCV valve body would bring an unstable blow-by gas flow rate control and would cause valve failure. The purpose of this study is to examine the crack affects on the stress and strain variations on the PCV valve according to the inlet and outlet manifold under differential pressures. From the results, we can explain the behavior of the crack extension for a safe condition of PCV valve.

• 전기학회논문지
• /
• 제59권1호
• /
• pp.138-143
• /
• 2010

This paper presents the analysis, the fabrication and the test results of a micro passive gas pressure regulator to keep the outlet pressure costant even for a widely-varying inlet pressure. This device is to regulate the outlet pressure according to the applied reference pressure based on the pressure balancing mechanism of the structure including a membrane and a valve. This regulator consists of four layers; a bulk-micromachined silicon substrate, a sandblasted glass substrate, a PDMS valve seat layer and a glass valve layer. The device size is $10\times13\times1.7 mm3$. The device was fabricated by micromachining. The characteristic of the device was analyzed and tested. The characteristic of the fabricated pressure regulator is similar to that obtained from the analysis. The pressure regulator of this paper is feasible for portable systems and miniature drug delivery systems.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2008년도 제39회 하계학술대회
• /
• pp.663-664
• /
• 2008

In this study, A special quality analysis and experiment for low power consumption type pneumatic on-off micro valve was performed. And flow characteristics of the micro valve by stroke change was numerically investigated. As a result, it is shown that magnetic force(2.4N) is exerted enough to move poppet with 0.3mm stroke with 0.01 seconds of response time, and that there is no magnetic force emitted by yoke.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
• /
• pp.136-139
• /
• 2002

Previous valves have initial gap problem, high voltage or high pressure problem. In this paper, various micro valves with free floating structure have been fabricated and tested to solve the initial gap and high pressure problems. The paper presents how to etch Parylene-C which is a valve cap material without A1 mask layer. The maximum flow-rate of fabricated micro valve is$118{\mu\ell}$/min with $370{\mu}m$ orifice size and the leakage at the initial and reverse pressure is not observed.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 2002년도 ICCAS
• /
• pp.36.2-36
• /
• 2002

.Developing a skeletal framework artificial hand similar to real human hand. .Developing a micro artificial muscle actuated by pneumatic power. .Building a micro pneumatic system including micro atuators and its control devices. .Building a soft driving system for Service robots. .Designning and Fabricating a multi-channel micro pneumatic valve using MEMS technology.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2012년도 추계학술대회 논문집
• /
• pp.773-774
• /
• 2012

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2009년도 춘계학술대회 논문집
• /
• pp.337-338
• /
• 2009

• 대한기계학회논문집A
• /
• 제32권9호
• /
• pp.720-727
• /
• 2008

Microfluidic single chip integrating thermopneumatic micropump and micro check valve are developed. The micropump and micorvalve are made of biocompatible materials, glass and PDMS, so as to be applicable to the biochip. By using the passive-type check valve, backward flow and fluid leakage are blocked and flow control is stable and precise. The chip is composed of three PDMS layers and a glass substrate. In the chip, flow channel and pump chamber were made on the PDMS layers by the replica molding technique and pump heater was made on the glass substrate by Cr/Au deposition. Diameter of the pump chamber is 7 mm and the width and depth of the channel are 200 and $180{\mu}m$, respectively. The PDMS layers chip and the heater deposited glass chip are combined by a jig and a clamp for pumping operation, and they are separable so that PDMS chip is used as a disposable but the heater chip is able to be used repeatedly. Pumping performance was simulated by CFD software and investigated experimentally. The performance was the best when the duty ratio of the applied voltage to the heater was 33%.

• International Journal of Naval Architecture and Ocean Engineering
• /
• 제12권1호
• /
• pp.48-59
• /
• 2020

A traditional propeller can easily become entangled with floating objects while operating. In this paper, we present a newly developed Electromagnetic-valve-control-based Water-jet Propulsion System (ECWPS) for an unmanned surface cleaning vessel that can be flexibly controlled via a Micro Control Unit (MCU). The double-structure was adapted to the unmanned surface cleaning vessel for floating-collection missions. Computational Fluid Dynamics (CFD) software for operating effect simulation was also used to reveal the working principle of the ECWPS under different conditions. Neglecting the assembly technique, the design level, controlling strategy, and maneuvering performance of the ECWPS reached unprecedented levels. The ECWPS mainly consists of an Electromagnetic-valve Array (EA), pipeline network, control system, and water-jet source. Both CFD analyses and experimental results show that the hydraulic characteristic of the ECWPS was predicted reasonably, which has enormous practical value and development prospects.