• 대한기계학회논문집
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• 제12권5호
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• pp.1071-1082
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• 1988

본 연구에서는 시편의 재료를 회주철(Grey Cast Iron:GC 30)을 선정하였으며 보올의 지름이 각각 다른 5종류의 강철 보올(steel ball)을 사용하였다.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 제35회 춘계학술대회
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• pp.25-33
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• 2002

Effect of surface topography on the water wetting nature and micro/nano tribological characteristics of Si-wafer and PTFE was experimentally studied. The ion beam treatment was performed with a hollow cathode ion gun in different argon don dose conditions in a vacuum chamber to change the surface topography, Micro/nano tribological characteristics, water wetting angles and roughness were measured with a micro tribo tester, SPM (scanning prove microscope), contact anglemeter and profilometer, respectively. Results showed that surface roughness increased with the argon ion dose. The water wetting angle of tile ion beam treated samples also increased with the ion dose. Results also showed that micro-adhesion and micro-friction depend on the wetting characteristics of the PTFE samples. However, nano-triboloSical characteristics showed little dependence on the wetting angles. The water wetting characteristics of modified PTFE samples were discussed in terms of the surface topographic characteristics.

• 한국기계가공학회지
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• 제12권4호
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• pp.81-86
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• 2013

For a 2-dimensional(2D) vibration milling, an excitation work-table was developed using two piezoelectric materials orthogonally arranged, where the trochoidal trajectory of a milling tool is combined with 2 dimensional elliptical vibration of a work-table. Applying 3kHz excitation frequency and 7~8mm amplitude of vibration to micro milling process with brass and nickel materials, the roughness in both bottom and side surface is much more improved compared to the surface by conventional milling process, which is attributed to decreased frictional force, increased cutting speed, and rubbing effect of a 2 dimensional vibration.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.970-976
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• 1997

The ultra-precision machining is widely used for final machining process of precision parts, so in this study, mirror surface finishing systems using the micro abrasive film, one of ultra-precision machining method, have to examine mirror surface characteristics of the cylindrical workpiece(SM45) such as surface roughness, workpiece removal and evaluated under the condition varing film feed rate, applied pressure, grinding speed after fixing other condition. It was found that varrious machining condition have significant influences on workpiece removal, surface roughness.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1994년도 추계학술대회 논문집
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• pp.273-278
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• 1994

The surface finishing systems using the micro abrasive film were designed and manufactured to make the mirror surface of the cylindrical workpiece. An experimental study of surface finishing was carried out to investigate the performance of mirror surface finishing system. The surface roughness of stainless steel was about Rmax 0.2~0.25 .mu.m, Ra 0.02~0.04 .mu.m in abrasive grain size 12, 9 .mu.m. the surface roughness of chrome coated workpiece was about Rmax 0.07~ 0.11 .mu. m, Ra 0.01 in abrasive grain size 3 .mu. m. Also, to measure the mirror finishing time by mirror surface finishing system, the experiment was carried out on the chrome coated and ground roller of diameter 76mm and length 650mm. The finishing time and surface roughness were 40min and Rmax 0.1~0.13 .mu.m, Ra 0.01 .mu.m.

• 한국레이저가공학회지
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• 제12권2호
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• pp.7-10
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• 2009

In this paper, we study experimentally the local polishing of $SiO_2$ surface using the $CO_2$ laser. For laser local polishing, we polished to remove the grooves or to be reformed the surface of grooves after forming the grooves on the material surface. We measured the reflectance, transmittance, and beam profile in order to measure the roughness of polished surface. The Atom Force Microscope (AFM) is used to measure roughness of local polishing surface. We can predict that the laser polishing contribute to the removal of generated debris and surface roughness on the micro processing.

• 한국공작기계학회논문집
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• 제16권6호
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• pp.49-54
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• 2007

Electropolishing, the anodic dissolution process without contact with tools, is a surface treatment method to make a surface planarization using an electrochemical reaction with low current density. Nitinol is a metal alloy composed of Ni and Ti around 50% respectively which has shape memory effect. Nitinol can be put various applications which require purity and high pricision surface of products. The aim of this study is to investigate the characteristic of electropolishing effect for nitinol workpieces. In order to analyze the characteristics of electropolishing effect, surface roughness and micro-burr size were measured in terms of machining conditions such as current density, machining time and electrode gap. The tendencies about improvement of surface roughness and deburring effect by electropolishing for nitinol workpieces were determined.

• Advances in materials Research
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• 제1권2호
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• pp.129-146
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• 2012

Polycrystalline diamond is an ideal material for parts with micro-holes and has been widely used as dies and cutting tools in automotive, aerospace and woodworking industries due to its superior wear and corrosion resistance. In this research paper, the modeling and simultaneous optimization of multiple performance characteristics such as material removal rate and surface roughness of polycrystalline diamond (PCD) with ultrasonic machining process has been presented. The fuzzy logic and taguchi's quality loss function has been used. In recent years, fuzzy logic has been used in manufacturing engineering for modeling and monitoring. Also the effect of controllable machining parameters like type of abrasive slurry, their size and concentration, nature of tool material and the power rating of the machine has been determined by applying the single objective and multi-objective optimization techniques. The analysis of results has been done using the MATLAB 7.5 software and results obtained are validated by conducting the confirmation experiments. The results show the considerable improvement in S/N ratio as compared to initial cutting conditions. The surface roughness of machined surface has been measured by using the Perthometer (M4Pi, Mahr Germany).

• 한국진공학회지
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• 제10권3호
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• pp.361-367
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• 2001

CMP(Chemical Mechanical Polishing)는 반도체 소자 제조공정 중 다층 배선구조의 평탄 경면화에 널리 이용되고 있다. 차세대 웨이퍼로 각광받는 SOI(Silicon On Insulator) 웨이퍼 제조공정 중 웨이퍼 표면 미소 거칠기를 개선하기 위해서 본 논문에서는 여러 가지 가공변수(슬러리와 연마패드)에 따른 CMP 연마능률과 표면 미소 거칠기 변화에 대해 연구하였다. 결과적으로 연마능률은 슬러리의 입자 크기가 증가할수록 이에 따라 증가하였으며, 미소 거칠기는 슬러리의 연마입자보다는 연마패드에 영향이 더욱 지배적이다. AFM(Atomic Force Microscope)에 의한 평가에서 표면 미소 거칠기가 27 $\AA$ Rms에서 0.64 $\AA$ Rms로 개선됨을 확인할 수 있었다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2002년도 금형가공 심포지엄
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• pp.239-244
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• 2002

In this study, we developed the manufacturing technology of micro-hole and micro-shaft for micro punching system using micro electrical discharge machining and micro electro chemical machining. Micro punching dies of tungsten carbide with $55\;{\mu}m\;and\;110\;{\mu}m$ diameter and $250\;{\mu}m$ depth were made by micro electrical discharge machining. The form accuracy and surface roughness of die hole were pretty good and it was shown that the punched hole quality was fine. WC micro-shaft with $30\;{\mu}m$ diameter was made by the multistep micro electro chemical machining. The developed technologies can be effectively used in precision manufacturing of micro punching die and mass production of micro-shaft.