• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 1995년도 춘계학술대회 논문집
• /
• pp.75-79
• /
• 1995

A cutting experiment using diamond tool was performed to make the die cabity which is composed of micro groove with mirror surface. Fine cutting depth was generated by the elastic recovery of the modified tool holder on the conventional M/C. Surface roughness and profile were investigated with cutting speed and depth and through the low cutting speed of 10mm/min, Rmax 0.005 .mu. m or less of machined surface could be achieved.

• Tribology and Lubricants
• /
• 제11권5호
• /
• pp.128-135
• /
• 1995

Atomic force microscopy/friction force microscopy (AFM/FFM) techniques are increasingly used for tribological studies of engineering surfaces at scales, ranging from atomic and molecular to microscales. These techniques have been used to study surface roughness, adhesion, friction, scratching/wear, indentation, detection of material transfer, and boundary lubrication and for nanofabrication/nanomachining purposes. Micro/nanotribological studies of single-crystal silicon, natural diamond, magnetic media (magnetic tapes and disks) and magnetic heads have been conducted. Commonly measured roughness parameters are found to be scale dependent, requiring the need of scale-independent fractal parameters to characterize surface roughness. Measurements of atomic-scale friction of a freshly-cleaved highly-oriented pyrolytic graphite exhibited the same periodicity as that of corresponding topography. However, the peaks in friction and those in corresponding topography were displaced relative to each other. Variations in atomic-scale friction and the observed displacement has been explained by the variations in interatomic forces in the normal and lateral directions. Local variation in microscale friction is found to correspond to the local slope suggesting that a ratchet mechanism is responsible for this variation. Directionality in the friction is observed on both micro- and macro scales which results from the surface preparation and anisotropy in surface roughness. Microscale friction is generally found to be smaller than the macrofriction as there is less ploughing contribution in microscale measurements. Microscale friction is load dependent and friction values increase with an increase in the normal load approaching to the macrofriction at contact stresses higher than the hardness of the softer material. Wear rate for single-crystal silicon is approximately constant for various loads and test durations. However, for magnetic disks with a multilayered thin-film structure, the wear of the diamond like carbon overcoat is catastrophic. Breakdown of thin films can be detected with AFM. Evolution of the wear has also been studied using AFM. Wear is found to be initiated at nono scratches. AFM has been modified to obtain load-displacement curves and for nanoindentation hardness measurements with depth of indentation as low as 1 mm. Scratching and indentation on nanoscales are the powerful ways to screen for adhesion and resistance to deformation of ultrathin fdms. Detection of material transfer on a nanoscale is possible with AFM. Boundary lubrication studies and measurement of lubricant-film thichness with a lateral resolution on a nanoscale have been conducted using AFM. Self-assembled monolyers and chemically-bonded lubricant films with a mobile fraction are superior in wear resistance. Finally, AFM has also shown to be useful for nanofabrication/nanomachining. Friction and wear on micro-and nanoscales have been found to be generally smaller compared to that at macroscales. Therefore, micro/nanotribological studies may help def'me the regimes for ultra-low friction and near zero wear.

• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 2004년도 춘계학술대회 논문집
• /
• pp.27-33
• /
• 2004

Electro-theological fluid is recently used for the micro polishing of 3-dimensional micro-aspherical lens. It's also used for polishing small area defects on the wide flat wafer. Since ER fluid shows a behavior of viscosity changing under certain electric fields. micro polishing efficiency may be enhanced for certain cases. In this paper, a perfluorinated carbonyl fluoride oil based ER fluids was used to improve surface polishing rate and submicron-scale accuracy. As the polishing electrodes, micro size cylindrical tools had been used for maximizing the electric field. An experimental device, which was applied for micro polishing a number of wafers of 4inches in size and other workpiece. was made on a precision polishing system. It consisted of a steel electrode. a wafer fixture. l0㎃ current and DC 5㎸ power supply unit, and a controller unit. From the Experiments. the ER fluid is applicable for micro polishing of small parts.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2004년도 추계학술대회 논문집
• /
• pp.97-100
• /
• 2004

In recent years, a demand for micro-structure machining is increasing by the development of information and optics industries. Micro machining technology is in general well known in the field of lithograghy. However, the requirement of producing micro machine and/or micro mechanism with metal materials will be increased since a variety of workpiece configurations can be easily made. In this paper, ultra precision machine is developed to obtain micro groove and mirror surface using single crystal diamond tool. According to the cutting experiment, no burr was found at the edge of V-grooves, and the surface roughness of copper is about 1～3nm Ra. It is verified that ultra precision machine is effective to high precision machining.

• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 2003년도 추계학술대회
• /
• pp.313-317
• /
• 2003

Micro-Channel ultra-precision polishing is a new technology used in magnetic field-assisted relishing. In this paper, an electromagnet or the i18 of test system was designed and manufactured. A size of magnetic abrasive is used on 25~75${\mu}{\textrm}{m}$ and for the polish a micro-channel upper part. A surface of channel which is not even is manufactured using magnetic abrasive finishing at upper surface of micro-channel. As a result, the surface roughness rose by 80％ after upper surface of micro- channel was polished up 8 minutes by polishing.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2000년도 춘계학술대회 논문집
• /
• pp.1047-1050
• /
• 2000

As the progress of new industrial products or parts technology, the precise and fine machining technologies are needed more and more. Micro fabrication technology of these products are usally consisted of mechanical machining or MEMS technology. Direct machining by mechanical method is not applicable to mass production. MEMS technology also has several problems such as low mechanical strength, bad surface roughness and difficulty of 3 dimensional machining. In this study, we introduce several micro fabrication technology to make micro molds and dies and our project to develop these machining technology.

• 한국지반공학회:학술대회논문집
• /
• 한국지반공학회 1999년도 토목섬유 학술발표회 논문집
• /
• pp.57-68
• /
• 1999

This paper summarizes the results of a study which uses the recently developed Optical Profile Microscopy technique (Dove and Frost, 1996) as the basis for investigating the role of geomembrane surface roughness on the shear mechanism of geomembrane/geotextile interfaces. The alternative roughness parameters which consider the direction of shearing are described. These directional parameters are compared with the existing roughness parameters, and the relationship between these directional and non-directional parameters are investigated. Then, the relationship between interface shear strength and surface roughness quantified at the interface is investigated. The results show that interface friction can be quantitatively related to the surface roughness of the geomembrane. The peak and residual interface strengths increase dramatically through the use of textured geomembranes as opposed to smooth geomembranes. For the smooth geomembranes, the sliding of the geotextile is the main shear mechanism. For the textured geomembranes, the peak interface strength is mainly mobilized through the micro-texture of the geomembrane, however, the residual interface strength is primarily attributed to macro scale surface roughness which pulls out and breaks the filaments from the geotextile. The results of this study can be extended to the other interfaces such as joints in rock mass, and also can be used to provide a quantitative framework that can lead to a significantly improved basis for the selection and design of geotextiles and geomembranes in direct contact.

• 한국광학회지
• /
• 제13권3호
• /
• pp.209-214
• /
• 2002

기판의 표면거칠기가 반사경의 산란에 미치는 영향을 조사하였다. 기판의 표면거칠기가 다른 다섯 종류의 기판에 이온빔 스퍼터링 방법과 전자총 증착 방법으로 각각 반사율이 1에 가까운 고반사율 박막을 증착하고 산란을 TIS 방법으로 측정하였다. 기판의 표면거칠기가 2$\AA$ 이상인 경우의 기판의 산란에 대한 반사경 산란 비율은 표면거칠기가 2$\AA$ 미만인 경우의 산란 비율에 비하여 급격한 증가를 나타냄을 알 수 있었으며, 기판의 표면거칠기가 낮은 경우 반사경의 산란은 기판의 표면거칠기보다 반사경을 구성하는 박막의 미세구조에 의존하는 것으로 판단되었다. 한편 반사경 중에서 가장 작은 산란은 2.1 ppm이었고, 이것은 표면거칠기 0.23$\AA$인 기판에 이온빔 스퍼터링 방법으로 제작되었다.

• Tribology and Lubricants
• /
• 제40권3호
• /
• pp.71-77
• /
• 2024

Hydrogen has emerged as an eco-friendly and sustainable alternative to fossil fuels. However, the utilization of hydrogen requires high-pressure compression, storage, and transportation, which poses challenges to the durability of compressor components, particularly the diaphragm. This study aims to improve the durability of 304 stainless steel diaphragms in hydrogen compressors by optimizing their surface roughness and corrosion resistance through wet etching. The specimens were prepared by immersing 304 stainless steel in a mixture of sulfuric acid and hydrogen peroxide, followed by etching in hydrochloric acid for various durations. The surface morphology, roughness, and wettability of the etched specimens were characterized using optical microscopy, surface profilometry, and water contact angle measurements. The friction and wear characteristics were evaluated using reciprocating sliding tests. The results showed that increasing the etching time led to the development of micro/nanostructures on the surface, thereby increasing surface roughness and hydrophilicity. The friction coefficient initially decreased with increasing surface roughness owing to the reduced contact area but increased during long-term wear owing to the destruction and delamination of surface protrusions. HCl-30M exhibited the lowest average friction coefficient and a balance between the surface roughness and oxide film formation, resulting in improved wear resistance. These findings highlight the importance of controlling the surface roughness and oxide film formation through etching optimization to obtain a uniform and wear-resistant surface for the enhanced durability of 304 stainless steel diaphragms in hydrogen compressors.

• 소성∙가공
• /
• 제15권5호
• /
• pp.366-372
• /
• 2006

The effect of coating time in arc ion plating on surface properties of the TiN-coated high speed steel(SKH51) is presented in this paper. Surface roughness, micro-hardness, coated thickness, atomic distribution of TiN and adhesion strength are measured for various coating times. It has been shown that the coating time has a deep influence on the micro-hardness, the coated thickness, the atomic distribution of Ti and the adhesion strength of the SKH51 steels but that it has little influence on the surface roughness.