• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.703-703
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• 2013

다이아몬드상 탄소 박막(Diamond-like carbon, DLC) 박막은 낮은 마찰 계수, 높은 내마모성, 화학적 안정성, 적외선 영역에서의 높은 투과율 등의 장점을 바탕으로 MEMS (Micro-Electro Mechanical System) 소자와 MMAs (Moving Mechanical Assemblies)의 고체윤활코팅, 마그네틱 미디어와 하드디스크의 슬라이딩 표면 등 다양한 분야에 코팅소재로써 응용되어왔다 [1,2]. 현재 전기철도용 집전판은 마찰이 적고 전도성을 지니는 카본 소재로 구성되어 있다. 그러나 그 마모 비율이 너무 심하여 이를 개선할 수 있는 방안으로 고경도 저마찰력을 지니는 DLC 박막을 코팅 소재로써 제안하고자 한다. 그러나 기존에 DLC 박막은 절연특성이 매우 우수하기 때문에 기존에 전도성을 지니는 카본 집전판에 적용하기에는 어려움이 따른다. 따라서 DLC 박막 내에 실리콘(Si) 또는 금속(Metal)을 첨가시키거나, 금속 중간층을 포함시켜 전기적으로 전도특성을 향상시키는 방안이 제시되고 있으며, 본 연구에서는 DLC 박막과 유사하게 우수한 경도특성을 지니고, 낮은 마찰계수등을 지니는 비정질 탄소박막을 연구하여 카본 집전판에 코팅하고자하며, 특히 비정질 탄소박막에 금속 Ti를 도핑하여 집전판과의 접착력과 전기적 전도 특성을 향상시키고자 한다. Ti가 도핑된 탄소박막(TiC) 박막은 비대칭 마그네트론 스퍼터링(unbalanced magnetron sputtering; UBMS) 시스템을 이용하여 제작하였으며, 스퍼터링 조건 중 기판에 인가되어지는 기판온도에 따라 변화되어지는 TiC 박막의 트라이볼로지(Tribology) 특성을 고찰하고자 하였다. 증착시 기판온도의 증가는 TiC 박막의 경도, 마찰계수 특성등 트라이볼로지 특성을 향상시켰으며, 전기적 전도 특성을 향상시켰다. 이러한 결과는 스퍼터링 방법에 의해 증착되어진 TiC 박막내에 존재하는 sp2 결합과 관계가 있음을 확인할 수 있으며, 트라이 볼로지 특성은 TiC 박막내에 sp2 탄소결합의 비율 증가와 관련되어졌다. 특히 sp2 탄소결합은 TiC 박막 증착시 증가된 기판온도와 밀접한 관계가 있으며 기판온도의 증가에 따라 나노결정 클러스터의 크기와 수의 변화와 밀접한 관계가 있음을 확인하였다. 결국 기판온도는 TiC 박막의 트라이볼로지 특성을 향상시켰으며, 전기적 특성 또한 향상시켜 전기철도 집전판에 응용을 위한 소재로 평가할 수 있다.

• Proceedings of the KWS Conference
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• 2002.10a
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• pp.53-58
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• 2002

Electrical insulation and mechanical properties of the plasma sprayed oxide ceramic coatings were studied before and after the sealing treatment of the ceramic coatings. Plasma sprayed A1$_2$O$_3$-TiO$_2$ coating as the reference coating was sealed using three commercial sealants based on polymer. Penetration depth of the sealants to the ceramic coating was evaluated directly from the optical microscope using a fluorescent dye. It is estimated that the penetration depth of the sealants to the ceramic coating is from 0.2 to 0.5 mm depending on the sealants used. The preliminary test results with a DC puncture tester imply that the dielectric breakdown voltage mechanism of plasma sprayed ceramic coatings has been determined to be a corona mechanism. Dielectric breakdown voltage of the as-sprayed and as-ground samples have shown a linear trend with regard to the thickness showing an average dielectric strength of 20 kV/mm for the thickness scale studied. It is also shown that grinding the coating before sealing and adding fluorescent dye do not agent the penetration depth of sealants. All of the microhardness, two-body abrasive wear resistance, bond strength, and surface roughness of the ceramic coating after the sealing treatment are improved. The extent of improvement is different from the sealants used. However, three-point bending stress of the ceramic coating after the sealing treatment is decreased. This is attributed to the reduced micro-crack toughening effect since the cracks propagate easily through the lamellar of the coating without crack deflection and/or branching after the sealing treatment.

• Journal of the Korean Vacuum Society
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• v.11 no.4
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• pp.194-200
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• 2002

MOCVD(metal-organic chemical vapor deposition) copper thin film was annealed at various conditions and the eletrical properties and micro-structures were investigated to find the optimal annealing condition and its effect. Cu thin film annealed at Ar 1 torr, $400^{\circ}C$ had the most improved resistivity of 1.98 $\mu\Omega$cm, and texture; the ratio of $I_{(111)}/I_{(200)}$ was varied from 2.03 to 3.11, and Cu thin film annealed at Ar 1 torr, $450^{\circ}C$ had the largest grain size and uniformity. After the annealing, the EM(electromigration) test was followed to ensure the improved properties by annealing. Compare to other conditions, Cu patterns annealed at Ar 1 torr, $400 ^{\circ}C$ had the most improved properties when it came to the EM resistance, which was due to the low resistivity, the preferential evolution of texture to (111) plane, and the reduction of surface roughness of annealed copper film.

• Tribology and Lubricants
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• v.29 no.1
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• pp.13-18
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• 2013

Slider bearing is a widely used load-carrying element in the industry. While a large number of studies have investigated the effect of overall surface curvature, very few have considered sinusoidal surface. Recently, consideration of surface roughness/waviness or intentional wave design has been identified as an important issue in the manufacture of hard disk driver, mechanical seal, hydraulic machine, and etc. This study investigated the load-carrying capacity of a finite-width slider bearing with a wavy surface. Film thickness ratios, length-width ratio, ambient pressure, amplitude, and partial distribution were selected as the simulation parameters. The calculation results showed that the load-carrying capacity rapidly varied at small film thickness ratio, but the waviness near the area of minimum film thickness made much more influence with an increase in film thickness ratio. As the length-width ratio of bearing was increased, ambient pressure became more influential at small film thickness ratios. Furthermore a particular partial distribution of the wavy area led to higher load-carrying capacity than did the whole distribution. Consequently, the results of this study are expected to be of use in surface micro-machining of finite-width slider bearings.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.12
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• pp.2581-2589
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• 2002

In this research, fretting tests were conducted in air to investigate the wear characteristics of fuel cladding materials with the fretting parameters such as normal load, slip amplitude, frequency and the number of cycles. A high frequency fretting wear tester was designed for this experiment by KAERI. After the experiments, the wear volume and the shape of wear contour were measured by the surface roughness tester. Tribologically transformed structures(TTS) were analysed by means of optical and scanning electron microscopes to identify the main wear mechanisms. The results of this study showed that the wear volume were increased with increasing slip amplitude, and the shape of wear contour was transformed V-type to W-type. Also, it was found that the critical slip amplitude was 168${\mu}{\textrm}{m}$. These phenomena mean that wear mechanism transformed partial slip to gross slip to accelerate wear volume. The wear depth increased with an increase of friction coefficient due to increase of normal load and frequency. The fretting wear mechanisms were believed that, after adhesion and surface plastic deformation occurred by relative sliding motion on the contact between two specimens, TTS creation was induced by surface strain hardening and wear debris were detached from the contact surface which were produced by the micro crack propagation and creation.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.6
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• pp.1456-1464
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• 1993

The achievable machining accuracy depends upon the level of the micro-engineering, and the dimensional tolerances in the order of 10 nm and surface roughness in the order of 1 nm are the accuracy targets to achieved today. Such requirements cannot be satisfied by the conventional machining processes. Single point diamond turning is one of the new techniques which can produce the parts with such accuracy limits. The aims of this thesis are to get a better understanding of the complex cutting forces. A cutting model for describing the influence of cutting conditions (cutting speed, feedrate and depth of cut), material properties of the workpiece and tool geometry has been proposed after estimating the two cutting force models-the Recht model and the Dautzenberg model. The experiments with Al-alloy workpieces, which have been carried out in order to estimate the models, show that the proposed model in this thesis is better than the two models. As the depth of cut and feedrate are increased in the operations settings (depth of cut 8-100$\mu{m}$, feedrate 8-140$\mu{m}$/rev, and cutting speed 8 m/sec), the relation of dimensionless cutting forces from experiments are similar to the proposed model. With the undeformed chip area of $30-80{\times}10^{2}$\mu{m}^2$, the experimental cutting forces accord with the force prediction.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.346-346
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• 2011

실리콘 나노와이어는 높은 표면적으로 인해 뛰어난 감지 능력을 가지는 재료 중 하나로 다양한 센서 응용 분야에 사용되고 있다. 이를 제작하는 방법에는 Micro Electro Mechanical Systems (MEMS) 공정을 이용한 Top-down 방식과 Vapor-Liquid-Solid (VLS) 공정을 이용한 Bottom-up 방식이 널리 사용되고 있다. 특히 Plasma-Enhanced Chemical Vapor Deposition(PECVD)와 Au 촉매를 이용한 Bottom-up 방식은 수십 나노미터 이하의 실리콘 나노와이어를 간단한 변수 조절을 통해 성장시킬 수 있다. 또한 Au/Si의 공융점인 363$^{\circ}C$보다 낮은 온도에서 $SiH_4$를 분해시킬 수 있어 열적 효과로 인한 손실을 줄일 수 있는 장점을 지니고 있다. 하지만 PECVD를 이용한 실리콘 나노와이어 성장은 VLS 공정을 통해 표면으로부터 수직으로 성장하게 되는데 이는 센서 응용을 위한 전극 사이의 수평 연결 어려움을 지니고 있다. 따라서 이를 피하기 위한 표면 성장된 실리콘 나노와이어가 요구된다. 본 연구에서는 PECVD VLS 공정을 이용하여 $HAuCl_4$를 촉매로 이용한 표면 성장된 Tree-like 실리콘 나노와이어를 성장시켰다. 공정가스로는 $SiH_4$와 이를 분해시키기 위해 Ar 플라즈마를 사용 하였고 웨이퍼 표면에 HAuCl4를 분사하고 고진공 상태에서 챔버 기판을 370$^{\circ}C$까지 가열한 후 플라즈마 파워(W) 및 공정 압력(mTorr)을 변수로 두어 실험을 진행하였다. 기존의 보고된 연구와 달리 환원된 금 입자 대신 $HAuCl_4$용액을 그대로 사용하였는데 이는 표면 조도(Surface roughness)를 가지는 Au 박막 상태로 존재하게 된다. 이 중 마루(Asperite) 부분에 PECVD로부터 발생된 실리콘 나노 입자가 상대적으로 높은 확률로 흡착하게 되어 실리콘 나노와이어의 표면성장을 유도하게 된다. 성장된 실리콘 나노와이어는 SEM과 EDS를 이용하여 직경, 길이 및 화학적 성분을 측정하였다. 직경은 약 100 nm, 길이는 약 10 ${\mu}m$ 정도로 나타났으며 Tree-like 실리콘 나노와이어가 성장되었다. 향후 전극이 형성된 기판위에 이를 직접 성장시킴으로써 이 물질의 I-V 특성을 파악 할 것이며 이는 센서 응용 분야에 도움이 될 것으로 기대된다.

• Journal of Sensor Science and Technology
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• v.11 no.1
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• pp.54-59
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• 2002

This paper describes a new process technique for batch process of SOI(Si-on-Insulator) structures with buried cavities for MEMS(Micro Electro Mechanical System) applications by SDB(Si-wafer Direct Bonding) technology and electrochemical etch-stop. A low-cost electrochemical etch-stop method is used to control accurately the thickness of SOI. The cavities were made on the upper handling wafer by Si anisotropic etching. Two wafers are bonded with an intermediate insulating oxide layer. After high-temperature annealing($1000^{\circ}C$, 60 min), the SDB SOI structure with buried cavities was thinned by electrochemical etch-stop. The surface of the fabricated SDB SOI structure have more roughness that of lapping and polishing by mechanical method. This SDB SOI structure with buried cavities will provide a powerful and versatile substrate for novel microsensors arid microactuators.

• Journal of the Korean institute of surface engineering
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• v.49 no.5
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• pp.431-438
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• 2016

This research investigated the relationship between the corrosion damage characteristics of offshore wind steel substructure and the time of current density application by electrochemical accelerated short-term corrosion test. The galvanostatic corrosion was conducted on the steel specimens in natural seawater with a constant current density ranging from $1mA/cm^2$ to $200mA/cm^2$ for 1 ~ 180 min. Macro and micro observation was carried out on the surface of the corrosion damaged area using SEM and 3-dimensional analysis microscope. The weight loss of the specimens before and after was calculated as the difference between the initial weight prior to corrosion and weight after removal of the corrosion product. It was shown that during galvanostaic corrosion process, the corrosion behavior could be characterized by the onset of pitting corrosion in the early stage and the uniform corrosion in the late stage, showing damage development in the depth direction with the time of current application. The result of the 3D analysis revealed that both damage depth and surface roughness increased with increasing time of current application. The weight loss curves with time showed that a coefficient of determination ($R^2$) was relatively high for the relationship between the time of current application and weight loss. As a result, the degree of corrosion can be controlled by simply varying the time of current application.

• Applied Microscopy
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• v.42 no.2
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• pp.95-103
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• 2012

The cell surface sculpture of the plant epidermis has received great interest recently. It has also been an active area of research, as the biological microstructures of the surface, such as papillae and waxes, exhibit several unique properties, including self-cleaning character; namely the "Lotus effect" first described in the leaves of the lotus, Nelumbo nucifera. The Lotus effect is the phenomenon in which the super-hydrophobic and water-repellent nature of lotus leaves allow water drops to run off easily on the surface in a rolling and sliding motion thereby facilitating the removal of dirt particles. It is well-known that surface roughness on the micro- and nanoscale is a primary characteristic allowing for the Lotus effect. This effect is common among plants and is of great technological importance, since it can be applied industrially in numerous fields. In the present study, Nelumbo nucifera leaf and stem epidermal surfaces have been examined with a focus on the features of papillae and wax crystalloids. Both young and mature Nelumbo nucifera leaf epidermis demonstrated the Lotus effect on their entire epidermal surface. The central area of the upper epidermis, in particular, formed extremely papillose surfaces, with an additional wax layer, enabling greater water repellency. Despite the presence of wax crystalloids, epidermal surfaces of the lower leaf and stem lacking papillae, were much more easily wetted.