• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.6
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• pp.717-725
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• 2004

A power generation systems are proposed to convert ambient mechanical vibration into electrical energy using cantilever-type piezoelectric materials. The vibration-based power device can be used for self-powered systems without batteries. This paper presents the theoretical analysis for the coupled equations of piezoelectric and structural motions and investigates the dynamic characteristics of the self-power system using transfer function method. The theoretical model is verified by the finite element analysis of the resonance frequency, the dynamic response of the structure and the sensor sensibility. Experimental results measured using a prototype system agree with the theoretical predictions. The system is shown to produce 34.5 ㎼ in average. Finally, we perform the optimal design for system variables to maximize output power.

• The Journal of the Acoustical Society of Korea
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• v.34 no.2
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• pp.108-116
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• 2015

An acoustic vector sensor is a device that is capable of measuring the direction of wave propagation and the acoustic pressure. In this paper, the modeling of micro-cantilever sensor for the vector sensor are proposed by consideration of acoustic phenomenon in water. Two models based on unimorph structure are proposed in this paper and corresponding transfer function which describes the relation between input pressure wave and output voltage depending on incidence angle and frequency of pressure wave is derived based on lumped model. It has been shown that very thin and flexible micro-cantilever can be used to measure directly the particle velocity component in water.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.5
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• pp.416-421
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• 2011

Nowadays, the increasing demands upon mobile devices such as wireless sensor networks and the recent advent of low power electrical devices such as MEMS make such renewable power sources attractive. A vibration-driven MEMS lead zirconate titanate $Pb(Zr,Ti)O_3$ (PZT) cantilever device is developed for energy harvesting application. This paper presents a piezoelectric based energy harvester which is suitable for power generating from conventional vibration and has in providing energy for low power electron ic devices. The PZT cantilever is used d33 mode to get the electrical power. The PZT cantilever based energy harvester with the dimension of 7 mm${\times}$3 mm${\times}$0.03 mm is fabricated using micromachining technologies. This PZT cantilever has the mechanical resonance frequency with a 900 Hz. With these conditions, we get experimentally the 37 uW output power from this device with the application of 1g acceleration using the 900 Hz vibration. From this study, we show the feasibility of one of energy harvesting candidates using PZT based structure. This PZT energy harvester could be used for various applications such a batteryless micro sensors and micro power generators.

• Proceedings of the KIEE Conference
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• 2007.11a
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• pp.152-153
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• 2007

This paper describes a resonant driving piezoelectric micro cantilever practicable to ultrasound thrombolysis device for the treatment of ischemic stroke. The proposed piezoelectric cantilever was designed to be a unimorph structure of Si/$SiO_2$/Ti/Pt/PZT/Pt, and fabricated by top-down sequence etching process. The red blood cell (RBC) lysis experiment was carried out to confirm the usability of the proposed cantilever. Total 87.76 % of RBCs were ruptured using the ultrasound generated by up-down actuations of the fabricated cantilever with AC voltage having the frequency of 19.36 Hz and the magnitude of $30V_{p-p}$.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.1059-1066
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• 2003

A power generation system are proposed to convert ambient mechanical vibration into electrical energy using cantilever-type piezoelectric materials. The vibration-based power device can be used for self-powered systems without batteries. This paper presents the theoretical analysis for the coupled equations of piezoelectric and structural motions and investigates the dynamic characteristics of the self-power system using transfer function method. The theoretical model is verified by the finite element analysis of the resonance frequency, the dynamic response of the structure and the sensor sensibility. Experimental results measured using a prototype system agrees with the theoretical predictions. The system is shown to produce 2.53㎼ in average. Finally, we perform the optimal design for system variables to maximize output power.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.7 no.6
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• pp.132-140
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• 1998

Recently, precision machining technology has been developed continuously in order to make high productivity and quality assurance of the precision parts of several industrial fields. Waviness may occur on the surface of the machined parts due to the table motion error and the dynamic cutting mechanism between the tool and the workpiece. The waviness may fall off the form accuracy of the precision machine parts. In the research, a micro cutting device with piezoelectric actuator has been developed to control precise depth of cut and compensate the waviness on the surface of the workpiece. Experiments have been carried out in the precision lathe. The characteristics of the surface profile and cause of the waviness profile have been analyzed and waviness profiles of some cause have been compared with those of experiments.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.11
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• pp.52-58
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• 2007

A cutting device capable of generating various shapes of the cyclic elliptical trajectory of a cutting tool was proposed and micro v-grooving experiments were performed to investigate the characteristics of elliptical vibration cutting (EVC). The proposed cutting device is comprised of a pair of parallel piezoelectric actuators with which harmonic voltages of varying phase difference and magnitude are supplied, creating various shapes of the elliptical tool path. The attributes of the elliptical locus involving the direction of the axis of an ellipse, the rotational direction and amplitudes of a trajectory were fine-tuned for stable operation of the EVC. The EVC characteristics performed with brass and copper revealed reduction in the cutting resistance and suppression of burr formation, resulting in the enhancement of form accuracy of machined micro-features. While the effect of the EVC increases with the increase of excitation frequency and the amplitude, it is found that a change in the cutting force decreases as the amplitude of an elliptical locus increases.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.59 no.2
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• pp.390-396
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• 2010

An 80MHz surface acoustic wave (SAW)-based gyroscope utilizing a progressive wave was developed on a piezoelectric substrate. The developed sensor consists of two SAW oscillators in which one is used for sensing element and has metallic dots in the cavity between input and output IDTs. The other is used for a reference element. Coupling of mode (COM) modeling was conducted to determine the optimal device parameters prior to fabrication. According to the simulation results, the device was fabricated and then measured on a rate table. When the device was subjected to an angular rotation, oscillation frequency differences between the two oscillators were observed because of the Coriolis force acting on the metallic dots. Depending on the angular rate, the difference of the oscillation frequency was modulated. The obtained sensitivity was approximately 52.35 Hz/deg.s within the angular rate range of 0~1000 deg/s. The performances of devices with three IDT structures for two kinds of piezoelectric substrates were characterized. Good thermal stability was also observed during the evaluation process.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.11
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• pp.831-835
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• 2013

In this study, we fabricated a micro $Pb(Zr,Ti)O_3$ (PZT) film piezoelectric cantilever with a Si proof mass and dual beams through MEMS process. The size of the beam and the integrated Si proof mass were about $4,320{\mu}m{\times}290{\mu}m{\times}12{\mu}m$ and $1,380{\mu}m{\times}880{\mu}m{\times}450{\mu}m$ each. To reduce the air damping and have the larger displacement of dual beams was used for design. After mounting micro PZT film piezoelectric cantilever on shaker, we measured the resonance frequency and a output voltage while making resonant frequency changed. The resonant frequency and the highest average power of the cantilever device were 110.2 Hz and 0.36 ${\mu}W$ each, at 0.8 g acceleration and 23.7 $k{\Omega}$ load resistance, respectively.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.11a
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• pp.368-371
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• 2008

Cellulose based Electroactive Paper (EAPap) has been developed as a new smart material due to its advantages of piezoelectricity, large displacement, low power consumption, low cost and flexibility. EAPap can be used fur a surface acoustic wave (SAW) device using the piezoelectric property of EAPap, resulting in the cost effective and flexible SAW device. In this paper, inter digit transducer (IDT) structure using lift-off technique with a finger gap of $10{\mu}m$ was used for micro fabrication of the cellulose EAPap SAW devices. The performance of IDT patterned SAW device was characterized by a Network Analyzer. The feasibility of cellulose EAPap as a potential acoustic device was presented and explained.