• 마이크로전자및패키징학회지
• /
• 제10권4호
• /
• pp.53-60
• /
• 2003

CCD(Charge-Coupled Device) wafer와 같이 표면이 polymer 성분의 micro lens로 구성되어있는 경우 passivation 막을 도포하지 않는 것이 보통인데, 이때 particle이 lens 표면에 쉽게 달라붙는 현상이 나타나게 된다. 특히 sawing 하면서 발생하는 particle은 치명적인 불량을 유발한다. 본 연구에서는 sawing에서 발생한 particle을 효과적으로 flushing하기위한 방안으로 측면노즐과 중심노즐의 분사위치, 분사각도, 퍼짐각도를 최적화 하고, 아울러 flushing 노즐을 추가한 새로운 형태의 wafer saw를 도입하였다. 개선된 saw를 적용하여 실험한 결과 particle로 인한 CCD chip의 불량률이 9.l%로부터 0.63%로 현격하게 개선되었음을 확인할 수 있었다.

• JSTS:Journal of Semiconductor Technology and Science
• /
• 제8권2호
• /
• pp.121-127
• /
• 2008

This paper presents design and fabrication of optimized geometry structure of electrostatic inkjet head. In order to verify effect of geometry shape, we simulate electric field intensity according to the head structure. The electric field strength increases linearly with increasing height of the micro nozzle. As the nozzle diameter decreases, the electric field along the periphery of the meniscus can be more concentrated. We design and fabricate the electrostatic inkjet heads, hole type and pole type, with optimized structure. It was fabricated using thick-thermal oxidation and silicon micromachining technique such as the deep reactive ion etching (DRIE) and chemical wet etching process. It is verified experimentally that the use of the MEMS inkjet head allows a stable and sustainable micro-dripping mode of droplet ejection. A stable micro dripping mode of ejection is observed under the voltages 2.5 kV and droplet diameter is $10\;{\mu}m$.

• 센서학회지
• /
• 제15권3호
• /
• pp.153-157
• /
• 2006

This paper presents the method for three-dimensional micro structure with photoresist spray coating system. The system consists of a high temperature rotational chuck, ultrasonic spray nozzle module, angle control module and nozzle moving module. Spray coating system is effected by several parameters such as the solid contents, the dispensed volume, the scanning speed of the spray nozzle and the wafer of dimension. The photoresist (AZ 1512) has been coated on the three-dimensional micro structure by spray coating system and the characteristics have been evaluated.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2007년도 춘계학술대회B
• /
• pp.2862-2867
• /
• 2007

The steady non-reacted compressible flow field in a symmetric micro-thruster, which is used for the accurate attitude control of a satellite, is analyzed varying the nozzle pressure ratio (NPR) to investigate the plume characteristics. The nozzle throat diameter is 0.06 inch and the area ratio is 56. The recirculation region is found just behind the normal shock at the several NPRs due to the locally adverse pressure gradient along the nozzle centerline when the environmental pressure is atmospheric. This phenomenon, the cause of flow loss, is similar to the flow behind a blunt body. As NPR increases the location of Mach disk, characteristics of the normal shock, moves downstream and its strength increases. The Mach number distribution appears in a wave-type patter after the normal shock because oblique shocks are reflected on the shock boundaries especially when NPRs are very high.

• 한국추진공학회:학술대회논문집
• /
• 한국추진공학회 2006년도 제27회 추계학술대회논문집
• /
• pp.15-18
• /
• 2006

최근 미소기전시스템(MEMS)를 개발함에 있어 마이크로 크기의 유동가시화는 중요한 문제이다. 특히 유체와 고체표면의 상호작용에 있어 표면의 친수성과 소수성의 성질은 미소유체를 조절 가능케 하는 핵심적인 역할이다. 본 연구에서는 마이크로 채널 내 표면을 개질하여 친수성 및 소수성의 벽면 경계조건 습윤도를 측정하였고, 또한 micro-PIV를 이용하여 벽면 근처에서의 속도 분포를 분석하였다.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2001년도 추계학술대회논문집B
• /
• pp.952-957
• /
• 2001

The objectives of this investigation were to obtain an excellent spray by cavitation under the low injection pressure. When cavitation occurs in the nozzle hole, the atomization of the liquid jet enhanced considerably. In this experiments, a acrylic nozzle made the gap and installed the bypass in the nozzle hole was used to enhance the atomization of the liquid jet at the low injection pressure. The liquid flow in the nozzle hole was photographed by a transmitted light using a micro flash. The spray angle was measured macroscope images of PMAS and the Sauter mean diameter was measured PDA system. To measure the pressure of the nozzle hole, pressure transducer was used. The results of this study indicated that enhanced atomization of the liquid jet at the low injection pressure was obtained by making the gap and installing the bypass at the single hole nozzle.

• 한국추진공학회:학술대회논문집
• /
• 한국추진공학회 2008년 영문 학술대회
• /
• pp.877-880
• /
• 2008

In this article, in order to fabricate polymer based electrospray device with super hydrophobic nozzle we use PTFE(polyfluorotetraethylene) plate and PMMA(polymethylmethacrylate). To obtain the super hydrophobic surface nozzle, PTFE surface is treated by argon and oxygen plasma treatment process. And evaluate the treated surface, perform measuring contact angle, SEM(Scanning Electron Microscope) and AFM(Atomic Force Microscope). We compare the performance of the super hydrophobic PTFE surface nozzle with raw PTFE and PMMA surface nozzle. For the ion beam treated PTFE nozzle, the liquid doesn't overflow and it keeps initial position and meniscus shape. From these results, we expect in cease of superhydrophobic surface nozzle jetting becomes more stable and repeatable.

• 한국정밀공학회지
• /
• 제31권1호
• /
• pp.83-90
• /
• 2014

EHD (electro-hydro-dynamics) patterning was performed under atmospheric pressure at room temperature in a single step. The drop diameter smaller than nozzle diameter and applied high viscosity conductive ink in EHD patterning method provide a clear advantage over the piezo and thermal inkjet printing techniques. The micro electrode pattern was printed by continuous EHD patterning method using 3-type control parameters (input voltage, patterning speed, nozzle pressure). High viscosity (1000cps) conductive ink with 75wt% of silver nanoparticles was used. EHD cone type nozzle having an internal diameter of $50{\mu}m$ was used for experimentation. EHD jetting mode by input voltage and applied 1st order linear regression in stable jet mode was analyzed. The stable jet was achieved at the amplitude of 1.4~1.8 kV. $10{\mu}m$ micro electrode pattern was created at optimized parameters (input voltage 1.6kV, patterning speed 25mm/sec and nozzle pressure -2.3kPa).

• 한국분무공학회지
• /
• 제7권1호
• /
• pp.36-42
• /
• 2002

The objective of this investigation was to obtain an excellent spray at the low injection pressure. When cavitation occurred in the nozzle hole the atomization of the liquid jet enhanced considerably. In this experiments, a acrylic nozzle which was installed the gap and installed the bypass in the nozzle hole was used to enhance the atomization of the liquid jet at the few injection pressure. The liquid flow in the nozzle hole was photographed by a transmitted light using a micro flash. The spray angle was measured by macroscope images of PMAS and the Sauter mean diameter was measured by PDA system. The pressure of the notate hole was measured by pressure transducer. It was found that enhanced atomization of the liquid jet at the low injection pressure was obtained by installing the gap and the bypass at the single hole nozzle.

• 한국추진공학회:학술대회논문집
• /
• 한국추진공학회 2006년도 제27회 추계학술대회논문집
• /
• pp.323-326
• /
• 2006

This paper presents the computational results for the two-dimensional compressible non-reacted flow in a converging-diverging micro thrust nozzle of which the ratio of exit to throat width (0.541 in.) is 1.8. The RNG model is applied to calculate the turbulence by loading the standard coefficients. The results agreed very well with the experiments in the view of the shock structure and the pressure distribution at the various pressure ratios between the stagnation and the environmental states. The plume structures are also discussed on the view of the shock-cell structure.