• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.976-979
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• 2002

This research presents the new method to fabricate small features through applying chemical mechanical micro machining(C3M) for Al5052 and single crystal silicon. To improve machinability of ductile and brittle material, reacted layer was formed on the surface before micro-drilling process by chemical reaction with $HNO_3$(10wt%) and KOH(10wt%). And then workpieces were machined to compare conventional micro-drilling process with newly suggested one. To evaluate whether or not the machinability was improved by the effect of chemical condition, surface defects such as burr, chipping and crack generation were measured. Finally, it is confirmed that C3M is one of the feasible tools for micro machining with the aid of effect of the chemical reaction.

• Korean Journal of Metals and Materials
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• v.46 no.6
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• pp.390-401
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• 2008

The objective of this study is to evaluate various machining characteristics of AlN-hBN machinable ceramics in micro end-milling process for its further application. First, AlN based machinable ceramics with hBN contents in the range of 10 to 20vol% were prepared by hot-pressing. Material properties of the composites, such as relative density, Vickers hardness, flexural strength, Young's modulus and fracture toughness were measured and compared. Then, micro end-milling experiments were performed to fabricate micro channels using prepared system. During the process, cutting forces, vibrations and AE signals were measured and analyzed using applied sensor system. Machined micro channel shapes and surface roughness were measured using 3D non-contact type surface profiler. From the experimental results, it can be observed that the cutting forces, vibrations and AE signal amplitudes decreased with increasing hBN contents. Also, measured surface roughness and profiles were improved with increasing hBN contents. As a result of this study, optimum machining conditions can be determined to fabricate desired products with AlN-hBN machinable ceramics based on the experimental results of this research.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.21 no.4
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• pp.77-83
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• 2022

Amorphous alloys exhibit excellent mechanical properties; therefore, application technology development is being attempted in various fields. However, industrial use of application technology is limited owing to the limitations in fabrication. In this study, micropattern fabrication of an amorphous alloy was conducted using laser beam machining. Although microhole fabrication is possible without the deformation of the amorphous phase through nanosecond pulsed laser beam machining, there are limitations in the generation of recast layers and spatters. In cover plate laser beam machining (c-LBM), a cover plate is used to reduce the thermal deformation and processing area. Therefore, it is possible to fabricate holes at the level of several micrometers. In this study, it was confirmed that recast layers are hardly generated in c-LBM. Furthermore, square-shaped micropatterns were successfully fabricated using c-LBM.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.598-603
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• 2005

Recently, the advanced industries using micro parts are rapidly growing. The appearance of ultra-precision feed mechanism and the development of control system make it possible to process parts in sub millimeter scale by mechanical methods. Micro endmilling is one of the prominent technology that has wide spectrum of application field ranging from macro parts to micro products. So, micro stairs have been trying to cut by using high revolution air turbine spindle and micro-endmill, and studying for magnitude of cutting force. This investigation deals removal characteristics of burr generated by micro endmilling process. Also, decreasing of burr is significant problem in making smooth and precise parts in micro endmilling. In micro endmilling, the material removal rate(MRR) and cutting forces are very small. This paper presents an investigation on the machining characteristics for micro stairs by using ultrahigh-speed air turbine spindle in machining.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.8
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• pp.834-839
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• 2012

Recently, mechanical components with miniaturized size, complex shape and fine surface are on demand from industries such as mobile electronics, medical devices and defense. The size of them is smaller than several millimeters, the shape has micro-holes, curve, or multi-step and the surface is mirror-like. This features are not able to be machined with the conventional machining, therefore electro-discharge machining (EDM), cutting, and laser machining have been applied. If the technologies are assisted by vibration, high aspect ratio and good surface are to be achieved. In this paper, prior and current researches of vibration-assisted machining are reviewed. Machining mechanisms with vibration-assisting are explained, their effects are shown, and vibrating apparatuses are discussed. Especially, comparison between with and without vibration assisting is presented. This review shows the vibration-assisted machining is effectively fabricate the components with small and complicated shape and fine surface finish.

• International Journal of Precision Engineering and Manufacturing
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• v.2 no.3
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• pp.41-46
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• 2001

This paper discusses the feasibility of improving micro-machining accuracy by using two-dimensional(2-D) vibration cutting. Vibration cutting is generated by two piezo actuators arranged orthogonally : one is actuated by a sine curve voltage input, and the other is actuated by a phase-shifted sine curve voltage. A tool attached to the vibrator oscillates in a 2-D elliptical motion, depending on the frequencies, amplitudes, and the phase shifts of two input signals and the workpiece feedrate. Along the elliptical tool locus, cutting is done in the lower part, and non-cutting is done in the upper part. By this way a unique feature of 2-D vibration cutting, that is, air lubrication between a tool and chips, is caused. Another unique feature of 2-D vibration cutting was experimentally verified, that is, some negative thrust force occurs as the direction of chip movement on a tool rake face is reversed. Those features not only help chips flow smoothly and continuously but also reduce cutting force, which results in a higher quality machined surface. Through tool path simulations and experiments under several micro-machining conditions, the 2-D vibration cutting, compared to conventional cutting, was found to result in a great decrease in the cutting force, a much smoother surface, and much less burr.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.4
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• pp.97-101
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• 2002

Recently, the need for transporting and manipulating minute amount of fluids in microscale channels (so-called micro-fluidics) has been increasing, especially in biotechnology and biochemical processing. This work demonstrates that the so-called mechano-chemical process which consists of mechanical abrasive action combined with chemical process can be used to f뮤ricate micro-fluidic channels more rapidly and cost effectively than other methods. In this work, capillary filling of fluids in micro-channels was investigated by theoretical approaches and experiments. From the experimental results, it is expected that a complex micro-fluidic system can be fabricated using the micro-fabrication technique and microsystem packaging method described in this work.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1052-1058
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• 2003

The possibility of micro/nano machining through electro-chemical process is discussed in this research. Electro-chemical dissolution region is localized within 1 ${\mu}m$ by applying ultra short pulses with tens of nanosecond duration. The effects of voltage, pulse duration, and pulse frequency on the localization distance are investigated. Localization distance can be manipulated by controlling the voltage and pulse duration, and various hole shapes are produced including stepped holes and taper free hole. High quality micro-hole with 8 ${\mu}m$ diameter with 20 ${\mu}m$ depth and micro-groove with 9 ${\mu}m$ width with 10 ${\mu}m$ depth are machined on 304 stainless steel.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.6
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• pp.3-9
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• 2013

Aluminum Oxide($Al_2O_3$) ceramics are excellent candidates for such applications due to their outstanding mechanical, thermal, and tribological properties. However, they are difficult to machine using conventional mechanical methods. Carbon fillers, such as carbon nanotubes(CNT) and graphene nanoplatelets(GNP)can be dispersed in a ceramic matrix to improve the mechanical and electrical properties. In this study, CNT and Graphene reinforced hybrid ceramic composites were fabricated using the spark plasma sintering method at a temperature of $1,500^{\circ}C$, pressure of 40 MPa, and soaking time of 10min. Besides this, the material properties such as microstructure, crystal structure, hardness, and electrical conductivity were analyzed using FE-SEM, XRD, Vickers, and the 4-point probe method. A micro machining test was carried out to compare the effects of the material properties and the machining performance for CNT and Graphene reinforced ceramic composites.

• Transactions of the Korean Society of Mechanical Engineers
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• v.5 no.4
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• pp.338-346
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• 1981

Honing, lapping, polishing and superfinishing are applied for a precision machining to finish the metal surface, but these precision machining are micro-cutting by hard and micro-abrasive grains. Frictional machining is the new method to finish mirrorlike surface without using those abrasive grains. The frictional machining produces high pressure and high temperature instantly by compressing a tool material against the metal surface in sliding motion. The metal surface is given plastic deformation and plastic flow by the above mentioned frictional motion, but the surface roughness of the metal surface is influenced by physical and chemical reaction in surrounding atmosphere. Therefore, the atmosphere around the metal optimum atmosphere in the frictional machining. The part 1 of the study was performed in liquid atmospheres. Diesel oil, lubricant, grease, lard oil, bean oil and cutting fluid were used as such atmospheres. Medium carbon steel SM 50 C was used as a workpiece and ceramic tip was applied as a frictional tool. The result of the experiment showed characteristic machining conditions to generate the best surface roughness in each atmospheres.