• Title/Summary/Keyword: Micro mechanical device

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Large Displacement Polymer Bimorph Actuator for Out-of-Plane Motion

  • Jeung Won-Kyu;Choi Seog-Moon;Kim Yong-Jun
    • Journal of Electrical Engineering and Technology
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    • v.1 no.2
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    • pp.263-267
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    • 2006
  • A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a significant deflection with relatively small temperature rise. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. Additionally, we can achieve response time of 14.6 ms, resonance frequency of 12 Hz, and reliability ability of $10^5$ cycles. The proposed actuator can find applications where a large vertical displacement is needed while maintaining compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.

Design, Fabrication, and Performance Evaluation of a Sensorized Superelastic Alloy Microrobot Gripper (센서화된 초탄성 마이크로그리퍼의 설계, 제작 및 성능평가)

  • Kim, Deok-Ho;Kim, Byung-Kyu;Kang, Hyun-Jae;Kim, Sang-Min
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.27 no.10
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    • pp.1772-1777
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    • 2003
  • This paper presents the design, fabrication, and calibration of a piezoelectric polymer-based sensorized microgripper. Electro discharge machining technology is employed to fabricate super-elastic alloy based micro gripper. It is tested to present improvement of mechanical performance. For integration of force sensor on the micro gripper, the sensor design based on the piezoelectric polymer PVDF film and fabrication process are presented. The calibration and performance test of force sensor integrated micro gripper are experimentally carried out. The force sensor integrated micro gripper is applied to perform fme alignment tasks of micro opto-electrical components. It successfully supplies force feedback to the operator through the haptic device and plays a main role in preventing damage of assembly parts by adjusting the teaching command.

Servo control system of electrostatic micro-actuator for micro robots

  • Sim, Kwee-Bo;Hashimoto, Hideki;Fujita, Hiroyuki
    • 제어로봇시스템학회:학술대회논문집
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    • 1988.10b
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    • pp.964-968
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    • 1988
  • In mechanical systems in which the dynamics of armatures is dominated by electrostatic forces, motions will generally be unstable. This paper deals with the control problems of this kind of micro electrostatic device systems. In these systems, the mass of micro mechanical parts is so small that the inertia term in the equation of motion is negligible. However, nonlinear terms, such as friction and driving force, become dominant. The purpose of this paper is to realize the stable motion without delay and, overshoot etc. A micro-mechanical system used in this paper consists of a plane wafer with striped electrodes converted with an insulation layer and thin cylindrical roller is placed over on it. The performance of motions is confirmed by some simulations.

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Machining of The Micro Nozzle Using Focused Ion Beam (집속이온빔을 이용한 마이크로 노즐의 제작)

  • Kim G.H.;Min B.K.;Lee S.J.;Park C.W.;Lee J.H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1194-1197
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    • 2005
  • Micro nozzle is employed as a dynamic passive valve in micro fluidic devices. Micro nozzle array is used in micro droplet generation in bio-medical applications and propulsion device for actuating satellite and aerospace ship in vacuum environments. Aperture angle and the channel length of the micro nozzle affect its retification efficiency, and thus it is needed to produce micro nozzle precisely. MEMS process has a limit on making a micro nozzle with high-aspect ratio. Reactive ion etching process can make high-aspect ratio structure, but it is difficult to make the complex shape. Focused ion beam deposition has advantage in machining of three-dimensional complex structures of sub-micron size. Moreover, it is possible to monitor machining process and to correct defected part at simultaneously. In this study, focused ion beam deposition was applied to micro nozzle production.

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A Micro Cell Counter Integrated with Oxygen Micropump

  • Son, Sang-Uk;Choi, Yo-Han;Lee, Seung-S.
    • 제어로봇시스템학회:학술대회논문집
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    • 2003.10a
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    • pp.2441-2444
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    • 2003
  • This paper describes fabrication of a micro cell counter integrated with an oxygen micropump and Sephadex G-25 beads counting experiment. The device utilized a phototransistor, microwindow, and light source of microscope for beads detection. Microheater and microchannel were used for pumping and guiding of beads to the microwindow. Counting capability of the device was tested with a peristaltic pump and the measured signals (${\sim}10\;mV$) with oscilloscope showed peak shape when beads passed the microwindow. Pumping of beads by the oxygen micropump was carried out by heating paraffin, which enveloped manganese dioxide (catalyst), to trigger the decomposition of hydrogen peroxide into water and oxygen. It lasted for 5 min with $7\;{\mu}l$ of wt. 30 % hydrogen peroxide. Beads counting by oxygen micropump showed peaks ($2{\sim}20\;mV$) with $30\;{\mu}l$ of beads sample and the number of peaks by magnitude was acquired.

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Design and Development of Micro Combustor (II) - Design and Test of Micro Electric Spark discharge Device for Power MEMS - (미세 연소기 개발 (II) - 미세동력 장치용 미세 전극의 제작과 성능평가 -)

  • Gwon, Se-Jin;Lee, Dae-Hun;Park, Dae-Eun;Yun, Jun-Bo;Han, Cheol-Hui
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.26 no.4
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    • pp.524-530
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    • 2002
  • Micro electric spark discharge device was fabricated on a FOTURAN glass wafer using MEMS processing technique and its performance of electron discharge and subsequent formation of ignition kernel were tested. Micro electric spark device is an essential subsystem of a power MEMS that has been under development in this laboratories. In a combustion chamber of sub millimeter scale depth, spark electrodes are formed by electroplating Ni on a base plate of FOTURAN glass wafer. Optimization of spark voltage and spark gap is crucial for stable ignition and endurance of the electrodes. Namely, wider spark gaps insures stable ignition but requires higher ignition voltage to overcome the spark barrier. Also, electron discharge across larger voltage tends to erode the electrodes limiting the endurance of the overall system. In the present study, the discharge characteristics of the proptotype ignition device was measured in terms of electric quantities such as voltage and currant with spark gap and end shape as parameters. Discharge voltage shows a little decrease in width of less than 50㎛ and increases with electrode gap size. Reliability test shows no severe damage over 10$\^$6/ times of discharge test resulting in satisfactory performance for application to proposed power MEMS devices.

A Study on the Ultra-Precision Polishing Technique for the Upper Surface of the Micro-Channel Structure (미세채널 구조물 상부의 초정밀 연마 기술 연구)

  • 강정일;이윤호;안병운;윤종학
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2003.10a
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    • pp.313-317
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    • 2003
  • Micro-Channel ultra-precision polishing is a new technology used in magnetic field-assisted relishing. In this paper, an electromagnet or the i18 of test system was designed and manufactured. A size of magnetic abrasive is used on 25~75${\mu}{\textrm}{m}$ and for the polish a micro-channel upper part. A surface of channel which is not even is manufactured using magnetic abrasive finishing at upper surface of micro-channel. As a result, the surface roughness rose by 80% after upper surface of micro- channel was polished up 8 minutes by polishing.

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A STUDY ON THE SPATIAL LIGHT MODULATOR WITH PISTON PLUS TILT MODE OPERATION USING SURFACE MICROMACHINING TECHNOLOGY (표면 미세 가공 기술을 이용한 상하운동 및 회전운동을 하는 광 변조기에 관한 연구)

  • Jeong, Seok-Hwan;Kim, Yong-Gwon
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.49 no.2
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    • pp.140-148
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    • 2000
  • In this paper, using surface micromachining technology with thick photoresist and aluminum, an SLM(Spatial Light Modulator), which is applied to the fields of adaptive optics and pattern recognition system, was fabricated and the electromechanical properties of the fabricated micro SLM are measured. In order to maximize fill-factor and remove mechanical coupling between micro SLM actuators, the micro SLM is composed of three aluminum layers so that spring structure and upper electrode are placed beneath the mirror plate, and $10\times10$ each mirror plate is individually actuated. Also, the micro SLM was designed to be able to modulate phase and amplitude of incoming light in order to have a continuity of phase modulation of incoming light. In the case of amplitude and phase modulation, maximum vertical displacement is 4$\mum$, and maximum angular displacement is $\pm4.6^{\corc}$ respectively. The height difference of the fabricated mirror plate was able to be reduced to 1100A with mirror plate planarization method using negative photoresist(AZ5214). The electromechanical properties of the fabricated micro SLM were measured with the optical measurement system using He-Ne laser and PSD(position sensitive device).

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Development of A New Device for Controlling Infinitesimal Flows inside a Lab-On-A-Chip and Its Practical Application (랩온어칩 내부 미세유동 제어를 위한 새로운 장치의 개발 및 적용)

  • Kim, Bo-Ram;Kim, Guk-Bae;Lee, Sang-Joon
    • 유체기계공업학회:학술대회논문집
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    • 2006.08a
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    • pp.305-308
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    • 2006
  • For controlling micro-flows inside a LOC (lab-on-a-chip) a syringe pump or an electronic device for EOF(electro-osmotic flow) have been used in general. However, these devices are so large and heavy that they are burdensome in the development of a portable micro-TAS (total analysis system). In this study, a new flow control system employing pressure chambers, digital switches and speed controllers was developed. This system could effectively control the micro-scale flows inside a LOC without any mechanical actuators or electronic devices We also checked the feasibility of this new control system by applying it to a LOC of micro-mixer type. Performance tests show that the developed control system has very good performance. Because the flow rate in LOC is controlled easily by throttling the speed controller, the flows in complicate microchannels network can be also controlled precisely.

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A Study on Shield Wire Stripping of Micro Coaxial Cable for Medical Device Using Nd:YAG Laser (Nd:YAG 레이저를 이용한 의료기기용 마이크로 동축케이블의 실드선 탈피에 관한 연구)

  • Lee, Jeong-Wan;Kim, Jung-Hoon
    • Journal of Industrial Technology
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    • v.26 no.B
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    • pp.35-41
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    • 2006
  • Recently, as ultrasonic medical devices are gradually developed, many of those requires smaller and more precision coaxial cables in probe. So, the use of micro coaxial cable becomes an efficient solution for ultrasonic machine. However, there are many difficulties in stripping micro coaxial cable by traditional mechanical process. In this paper, we use the Nd-YAG laser for the efficient stripping of conduct wire of cable. We propose a new method to strip the shield wire of micro coaxial cable. Through some experiments, we found that there is a new possibility in the proposed method. Also, in order to enhance the performance, we propose a preprocess of the cable before stripping.

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