• International Journal of Precision Engineering and Manufacturing
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• 제6권2호
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• pp.55-60
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• 2005

In order to develop the hydrostatic guideways driven by a core less linear motor for ultra precision machine tools, a prototype of guideway is designed and tested. A coreless linear DC motor with a continuous force of 156 N and a laser scale with a resolution of 0.01 ㎛ are used in the system. Experimental analysis on the static stiffness, motion errors, positioning error and its repeatability, micro step response and velocity variation of the guideway are performed. The guideway shows infinite stiffness within 50 N applied load in the feed direction, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ㎛ linear motion error and 0.1 arcsec angular motion error are acquired. The guideway also reveals 0.21 ㎛ positioning error and 0.09 ㎛ repeatability, and it shows stable responses following a 0.01 ㎛ resolution step command. The velocity variation of feeding system is less than 0.6 ％. From these results, it is estimated that the hydrostatic guideway driven by a coreless linear motor is very useful for the ultra precision machine tools.

• 한국정밀공학회지
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• 제27권7호
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• pp.94-100
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• 2010

This paper describes the design and evaluation procedure of an ultra-precision rotary table for freeform generating machined tools. Design of the thrust and journal hydrostatic bearings and experimental evaluation of the table were performed. To get the compact size and less lost motion direct drive servomotor with ultra precision encoder. From the considered design, following performance were confirmed by experiment. The total stiffness of the prototype rotary table was 483.6 $N/{\mu}m$ and 97.6 $N/{\mu}m$ for axial and radial direction, respectively. Rotational accuracy of the table was investigated by capacitive sensor and reversal measurement technique, and 0.10 ${\mu}m$ radial direction and 0.05 ${\mu}m$ axial direction of the rotational accuracy were confirmed. The micro resolution of the table was also investigated with displacement of capacitive sensor, and $0.5/10000^{\circ}$ of micro resolution was confirmed. Index accuracy of the table was evaluated by the autocollimator and polygon mirror, and the $\pm0.39$ arcsec accuracy and $\pm0.16$ arcsec repeatability of the table were confirmed. Those are under the general requirements of ultra precision rotary tables for freeform generating machined tools.

• 한국정밀공학회지
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• 제31권3호
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• pp.189-197
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• 2014

Diffractive optical elements (DOEs) - in general a complex pattern of micro- and nano-scale structures - can modulate and transform light in a predetermined way. Their importance is being increased nowadays because they can be designed to handle a number of simultaneous tasks. In view point of machining DOEs, it is a big challenge to fabricate micro- and nano-scale structures on a free-form surfaces. In this paper, the state-of-the-art of the ultra-precision machine tools is reviewed. Also some technical issues which determine the machine tool accuracy are discussed.

• Smart Structures and Systems
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• 제13권6호
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• pp.959-974
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• 2014

Hand-Arm Vibration Syndrome (HAVS) is a group of diseases caused by exposure of the hands to vibration while operating the hand held power tools such as road breaker, drilling machine, demolition hammer in construction works. In this paper, area-changed capacitive micro-accelerometer is designed to measure the vibration exposure on worker's hand when operating a drilling machine on various blocks such as clay block, paver block and solid cement block. The design process includes mathematical modelling of micro-accelerometer and simulations are done using INTELLISUITE 8.6. Experimental results are taken for various blocks surfaces using conventional and micro-accelerometer. Comparisons show that usage of area-changed micro-accelerometer for Hand-arm vibration monitoring provides better sensitivity, which in turn reduces the risk of HAVS in workers.

• 한국공작기계학회논문집
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• 제10권5호
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• pp.31-38
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• 2001

This paper deals with the micro turning property of setting angle using diamond tool. The bed of the system has used the granite which has the thermal and vibrational characteristics superior to the cast iron bed for the common machine tool. To minimize the inner and outer vibration of the fuming system, an air pad system was manufactured and tested. The aero-static spindle system which has the excellent rotation accuracy was designed and manufactured. As a result of the micro-cutting test on aluminum alloy, tool setting angel have effected on surface roughness. From the results, the micro-cutting conditions hope to provide the useful actual data using in industrial fields.

• 한국기계가공학회지
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• 제11권5호
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• pp.76-81
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• 2012

The continuing demand for increasingly slimmer and brighter liquid crystal display(LCD) panels has led to an increased focus on the role of the light guide panels(LGPs) or optical films that are used to obtain diffuse, uniform light from the backlight unit(BLU). And the most basic process in the production of such BLU components is the micromachining. LCD BLUs comprise various optical elements such as a LGP, diffuser sheet, prism sheet, and protector sheet with micro patterns. High aspect ratio patterns are required to reduce the number of sheets and enhance light efficiency, but there is a limit to the aspect ratio achievable for a given material and cutting tool. Therefore, this study comprised a series of experimental evaluations conducted to determine the machining feasibility in microcutting various aspect ratio patterns on electroless nickel plated die materials when using single-crystal diamond tools. Cutting performance was evaluated at various cutting speeds and depths of cut using different machining methods and machine tools.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.977-980
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• 1997

Ultraprecision machining process and MEMS technology have been taken more and more important position in machining of micro parts such as PDP and IT components, as the application field of micro parts increases. A micro machining center is very effective equipment for the fabrication of micro parts, because of its benefits such as lower power consumption, high precision and lower machining cost. Therefore, we study the possibility of application to the micro machining of barrier ribs used in PDP and also analyse the machining characteristics. The fabricated barrier rib has 30~$200\mu\textrm{m}$ pitch and was made by the flat endmill with the diameter of 0.2mm, 40, 000rpm condition.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1998년도 추계학술대회 논문집
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• pp.48-53
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• 1998

In this paper, the new electrochemical machining method is proposed for the micro unit fabrication by using the point electrode tools. The precision shape control capacity is improved by using the point electrode method. It was observed that an electric discharge phenomenon occurs during the electrochemical machining process by using the spraying and torrent type electrolyte supply method.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.27-33
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• 2004

Electro-theological fluid is recently used for the micro polishing of 3-dimensional micro-aspherical lens. It's also used for polishing small area defects on the wide flat wafer. Since ER fluid shows a behavior of viscosity changing under certain electric fields. micro polishing efficiency may be enhanced for certain cases. In this paper, a perfluorinated carbonyl fluoride oil based ER fluids was used to improve surface polishing rate and submicron-scale accuracy. As the polishing electrodes, micro size cylindrical tools had been used for maximizing the electric field. An experimental device, which was applied for micro polishing a number of wafers of 4inches in size and other workpiece. was made on a precision polishing system. It consisted of a steel electrode. a wafer fixture. l0㎃ current and DC 5㎸ power supply unit, and a controller unit. From the Experiments. the ER fluid is applicable for micro polishing of small parts.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.91-92
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• 2008