• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.5
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• pp.178-182
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• 2007

This study represents the efficient depth measurement for 3-dimensional microsystems using the disparity histogram from stereo images. Implementation of user-friendly Windows program written in C++ involves the various methods for the stereo-image processing in which the minimization of matching-pixel error upon the unique point for stereo images was carried out as a pre-processing method. Even though MPC among various methods was adopted in the present measurement, the resulting measurements seem to require optimizations of the windows sizes and corrections of post-manipulation for stereo images. The present work using Windows program is promising to measure the 3-dimensional depth of micro-system efficiently in implementing the 3-dimensional structure of micro-systems.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.14 no.5
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• pp.80-86
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• 2005

High velocity oxy-fuel thermally sprayed coating of the WC-Co cermet material is a well-established process for modifying the surface properties of the structural components exposed to the corrosive and wear attacks. The hard WC phase in the coating resists to the wear while the soft metallic Co increases the adhesive and cohesive bonding properties. The coating properties deposited by the HVOF process are greatly dependent on the feedstock materials and processing parameters. The effects of the feedstock material and process coating parameters including the in-flight particle parameters and resultant coating microstructures were observed in this paper.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.6
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• pp.49-54
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• 2007

Electropolishing, the anodic dissolution process without contact with tools, is a surface treatment method to make a surface planarization using an electrochemical reaction with low current density. Nitinol is a metal alloy composed of Ni and Ti around 50% respectively which has shape memory effect. Nitinol can be put various applications which require purity and high pricision surface of products. The aim of this study is to investigate the characteristic of electropolishing effect for nitinol workpieces. In order to analyze the characteristics of electropolishing effect, surface roughness and micro-burr size were measured in terms of machining conditions such as current density, machining time and electrode gap. The tendencies about improvement of surface roughness and deburring effect by electropolishing for nitinol workpieces were determined.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.2
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• pp.13-22
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• 2008

For the accuracy correction of the micro-positioning industrial robot, micro-manipulator has been devised. The compliant mechanisms using piezoelectric actuators is necessary geometrically and structurally to be developed by the optimization approaches. The overall geometric advantage as the mechanical efficiencies of the mechanism are considered as objective functions, which respectively art the ratio of output displacement to input force, and their constraints are the vertical notion of supporting leg and the structural strength of manipulation. In optimizing the compliant mechanical amplifier, the sequential linear programming and an optimality criteria method are used for the geometrical dimensions of compliant bridges and flexure hinges. This paper presents the integrated design process which not only can maximize the mechanism feasibilities but also can ensure the positioning accuracy and sufficient workspace. Experiment and simulation are presented for validating the design process through the comparisons of the kinematical and structural performances.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.660-665
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• 2002

Mirror surface finish of Si-wafers has been achieved by rotary in-feed machining with cup-type wheels in ELID grinding. But the diameter of the workpiece is limited with the diameter of grinding wheel in the in-feed machining method. In this study, grinding experiments by the rotary surface grinding machine with straight type wheels ware conducted, by which the possible grinding area of the workpiece is independent of the diameter of the wheels. For the purpose of investigating the grinding characteristics of large scale diametrical silicon wafer, grinding conditions such as rotation speed of grinding wheels and revolution of workpieces are varied, and grinding machine used in this experiment is rotary type surface grinding n/c equipment with an ELID wit. The surface ground using the SD8000 wheels showed that mirror like surface roughness can be attained near 2 - 6 nm in Ra.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.8 s.197
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• pp.89-96
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• 2007

In this paper, a new air bearing stage with magnetic preload and a linear motor has been developed for the small precision machine systems. The new air bearing stage is unique in the sense that permanent magnets attached bottom of the iron core of table are used not only for preloading air bearings in vertical direction but also for generating thrust force by current of the coil at base. The characteristics of air bearings using porous pads were analyzed with numerical method, and the magnetic circuit model was derived for linear motor for calculating required preload force and thrust force. A prototype of single axis miniature stage with size of $120(W){\times}120(L){\times}50(H)\;mm^3$ was designed and fabricated and examined its performances, vertical stiffness, load capacity, thrust force and positioning resolution.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.12
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• pp.105-114
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• 2003

In this study, a dicing machine with vision system was built and an algorithm for automatic alignment was developed for dual camera system. The system had a macro and a micro inspection tool. The algorithm was formulated from geometric relations. When a wafer was put on the cutting stage within certain range, it was inspected by vision system and compared with a standard pattern. The difference between the patterns was analyzed and evaluated. Then, the stage was moved by x, y, $\theta$ axes to compensate these differences. The amount of compensation was calculated from the result of the vision inspection through the automatic alignment algorithm. The stage was moved to the compensated position and was inspected by vision for checking its result again. Accuracy and validity of the algorithm was discussed from these data.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.4
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• pp.112-118
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• 2008

In order to meet the optical performance in the process of the micro lens manufacturing with plastics, it is important to embody accuracy in shape and surface roughness to the intended design. Since it is difficult to machine exactly the mold core of lens fit to the designed shape, in this paper, a simple program using MATLAB is developed for shape correction of the mold core after first machining it. This program evaluates correction parameters(aspheric coefficients and curvature) and generates aspheric NC data for compensating the core surface in prior machining process. The program provides the way to manufacture plastic injection molding lens with aspheric shape of high precision, and is expected to be effective for correction and to shorten the processing time.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.5
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• pp.95-100
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• 2008

An active micro-mixer, which is composed of an oscillating micro-stirrer in the micro-channel to provide effective mixing was optimized. The effects of molecular diffusion and disturbance by the stirrer were considered with regard to two types of mixer models: the simple straight micro-channel and micro-channel with an oscillating stirrer. Two types of mixer models were studied by analyzing mixing behaviors such as their interaction after the stirrer. The mixing was calculated by Lattice Boltzmann methods using the D2Q9 model. In this study, the time-averaged mixing index formula was used to estimate the mixing performance of time-dependent flow. The mixing indices of the two models were compared. From the results, it was found that the mixer with an oscillating stirrer was much more enhanced and stabilized. Therefore, an approximate optimization of an active micro-mixer with an oscillating stirrer was performed using Kriging method with OLHD(Optimal Latin Hypercube Design) in order to determine the optimal design variables. The design parameters were established as the frequency, the length and the angle of the stirrer. The optimal values were obtained as 1.0346, 0.66D and $\pm45^{\circ}$, respectively. It was found that the mixing index of the optimal design increased by 88.72% compared with that of the original design.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.04a
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• pp.326-331
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• 2000

In this study, residual stress was investigated experimentally to evaluate damaged layer in high-sped machining. In machining difficult-to-cut material, residual stress remaining in machined surface was mainly speared as compressive stress. The scale of this damaged layer depends upon cutting speed, feed per tooth and radial cutting depth. Damaged layer was measured by optical microscope. The micro-structure of damaged layer was a mixed maternsite and austenite. depth of damaged layer is increased with increasing of cutting temperature, cutting force and radial depth. On the other hand, that is slightly decreased with decreasing of cutting force. The increase of tool wear causes a shift of the maximum residual stress in machined surface layer.