• 제목/요약/키워드: Micro lens array

검색결과 65건 처리시간 0.024초

광소자용 미소렌즈 제작을 위한 GaAs/AlGaAs계 액상식각 및 에피택시 (LPE meltaback-etch and re-epitaxy of GaAs/AlGaAs for optical micro-lenses fabrication)

  • 함성호;권영세
    • 전자공학회논문지D
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    • 제34D권9호
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    • pp.64-71
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    • 1997
  • A new etching technique of meltback was investigated for GaAs lensed optical devices with selective windows opending in the LPE (liquid phase epitaxy) system. In the meltback process, the etch depth and the etch shape were controlled by the degree of under-saturation, etch time and other parameters. A GaAs/AlGaAs DH layer was grown on the selectively etched hemispherical well for optical device application such as lensed surface emitting LED. The regrowth process were related with the coolin grate and the well to well spacing. A novel surface emitting LED with hemispherical AlGaAs lens was fabricated using the meltbakc and regrowth as the key process for AlaAs lens array. The light emitting efficiency of the LED was upto three times higher than the similar structure LED without lens. The meltback and regrowth technique was applicable to manufacture the optical device in LPE.

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DPSS UV Laser와 습식 식각을 이용한 금형강 미세 가공 (Micromachining for plastic mold steel using DPSS UV laser and wet etching)

  • 민경익;김재구;조성학;최두선;황경현
    • 한국레이저가공학회지
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    • 제12권3호
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    • pp.1-6
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    • 2009
  • This paper describes the method for the fabrication of micro dot array on a plastic mold steel using DPSS (diode pumped solid-states) UV laser and wet etching process. We suggest the process of the ablation of a photoresist (PR) coated on plastic mold steel and wet etching process using solutions of various concentrations of $FeCl_3$, $HNO_3$ in water as etchant. This method makes it possible to fabricate metallic roller mold because the microstructures are directly fabricated on the metal surface. In the range of operating conditions studied, $17\;{\mu}J$ laser pulse energy and 50 ms laser exposure time, an etchant containing 40wt% $FeCl_3$, 5wt% $HNO_3$ and etch time for 45 s gave the $10\;{\mu}m$ of micro dot pattern on plastic mold steel.

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다이아몬드 미세형상가공에서 자려진동의 발생경향과 안전성 평가

  • 이언주;임한석;안중환
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1995년도 추계학술대회 논문집
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    • pp.71-74
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    • 1995
  • Diamond shaping is one of the machining strategies to make the optical micro-groove molds,and it is especially useful when rhe component is an assembly of the linear micro-groove array. A mirror-like surface and arbitrary crose-sectional curve can be easily made by diamond. Howerver, the cutting speed of shaping is relatively lower than that of the other cutting methods, and there exist an unstable cutting conditions that generate the chatter. This study is focused on the modeling of the simplified self-induced chatter of the diamond shapping. Form the chatter model and experiments, it is found that the unstable cutting conditions exist wwhen the depth of cut is low and cutting speed is high.

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CCD를 이용한 미세렌즈의 MTF 측정 (CCD Scanning type MTF Measuring System for Microlens Arrays)

  • 이윤우;조현모;이인원;박태호;윤성균;서형원
    • 한국광학회지
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    • 제5권3호
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    • pp.364-371
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    • 1994
  • 미세렌즈 배열의 실시간 분해능 평가를 위하여 CCD를 이용한 MTF 측정장치를 제작하였다. 현미경 대물렌즈로 상을 확대한 후 CCD를 사용하여 직접 광세기 분포함수를 측정하였으며 사용된 CCD의 화소 크기와 간격, 그리고 감도의 균질성 등을 고려하여 측정한 MTF를 보정하였다. 마이크로 컴퓨터를 사용하여 측정자동화 하였으며 자세한 보정방법과 측정장치에 대하여 설명하였다.

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Integral-floating Display with 360 Degree Horizontal Viewing Angle

  • Erdenebat, Munkh-Uchral;Baasantseren, Ganbat;Kim, Nam;Kwon, Ki-Chul;Byeon, Jina;Yoo, Kwan-Hee;Park, Jae-Hyeung
    • Journal of the Optical Society of Korea
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    • 제16권4호
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    • pp.365-371
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    • 2012
  • A three-dimensional integral-floating display with 360 degree horizontal viewing angle is proposed. A lens array integrates two-dimensional elemental images projected by a digital micro-mirror device, reconstructing three-dimensional images. The three-dimensional images are then relayed to a mirror via double floating lenses. The mirror rotates in synchronization with the digital micro-mirror device to direct the relayed three-dimensional images to corresponding horizontal directions. By combining integral imaging and the rotating mirror scheme, the proposed method displays full-parallax three-dimensional images with 360 degree horizontal viewing angle.

Wire bonding 자동 전단력 검사를 위한 wire의 3차원 위치 측정 시스템 개발 (3D Measurement System of Wire for Automatic Pull Test of Wire Bonding)

  • 고국원;김동현;이지연;이상준
    • 제어로봇시스템학회논문지
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    • 제21권12호
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    • pp.1130-1135
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    • 2015
  • The bond pull test is the most widely used technique for the evaluation and control of wire bond quality. The wire being tested is pulled upward until the wire or bond to the die or substrate breaks. The inspector test strength of wire by manually and it takes around 3 minutes to perform the test. In this paper, we develop a 3D vision system to measure 3D position of wire. It gives 3D position data of wire to move a hook into wires. The 3D measurement method to use here is a confocal imaging system. The conventional confocal imaging system is a spot scanning method which has a high resolution and good illumination efficiency. However, a conventional confocal systems has a disadvantage to perform XY axis scanning in order to achieve 3D data in given FOV (Field of View) through spot scanning. We propose a method to improve a parallel mode confocal system using a micro-lens and pin-hole array to remove XY scan. 2D imaging system can detect 2D location of wire and it can reduce time to measure 3D position of wire. In the experimental results, the proposed system can measure 3D position of wire with reasonable accuracy.

RIE 공정을 이용한 유기발광다이오드의 광 산란층 제작 (Fabrication of Scattering Layer for Light Extraction Efficiency of OLEDs)

  • 배은정;장은비;최근수;서가은;장승미;박영욱
    • 반도체디스플레이기술학회지
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    • 제21권1호
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    • pp.95-102
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    • 2022
  • Since the organic light-emitting diodes (OLEDs) have been widely investigated as next-generation displays, it has been successfully commercialized as a flexible and rollable display. However, there is still wide room and demand to improve the device characteristics such as power efficiency and lifetime. To solve this issue, there has been a wide research effort, and among them, the internal and the external light extraction techniques have been attracted in this research field by its fascinating characteristic of material independence. In this study, a micro-nano composite structured external light extraction layer was demonstrated. A reactive ion etching (RIE) process was performed on the surfaces of hexagonally packed hemisphere micro-lens array (MLA) and randomly distributed sphere diffusing films to form micro-nano composite structures. Random nanostructures of different sizes were fabricated by controlling the processing time of the O2 / CHF3 plasma. The fabricated device using a micro-nano composite external light extraction layer showed 1.38X improved external quantum efficiency compared to the reference device. The results prove that the external light extraction efficiency is improved by applying the micro-nano composite structure on conventional MLA fabricated through a simple process.

Tilt Aberration Compensation Using Interference Patterns in Digital Holography

  • Cho, Hyung-Jun;Kim, Doo-Cheol;Yu, Young-Hun;Shin, Sang-Hoon;Jung, Won-Gi
    • Journal of the Optical Society of Korea
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    • 제13권4호
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    • pp.451-455
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    • 2009
  • We present a numerical procedure that compensates for tilt phase aberration in in-line digital holography by computing the period of interference patterns in the reconstructed phase image. This method enables the reconstruction of correct and accurate phase information, even if strong tilt aberrations exist. Example applications of tilt aberration compensation are shown for a tilted plate, a micro-lens array, and a thin film transistor. This method is convenient because it uses only one hologram and no hardware to minimize the tilt aberration.

Combination Treatment of Nd:YAG Picosecond-domain Laser and Fractional CO2 Laser for Contracted Neck Scar with Hyperpigmentation

  • Choi, Woo Jung;Park, Eun Soo;Tak, Min Sung;Kang, Sang Gue
    • Medical Lasers
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    • 제10권1호
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    • pp.52-54
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    • 2021
  • There is growing interest in minimizing postoperative scarring after a thyroidectomy. Among the many treatment types, laser therapy, especially picosecond-domain laser therapy, is accepted as a standard method. In the present case, a patient with a pigmented, contracted scar was treated using the combination of a picosecond laser and ablative fractional (AF) CO2 laser. After 15 sessions of 1,064-nm picosecond with micro lens array (MLA) and AF CO2 laser application, the patient showed significant improvement in their pigmented lesions and scar contracture with no noticeable side effects for 16 months. These results suggest that a combination of picosecond laser with MLA and AF CO2 laser can treat pigmented, contracted scars safely and effectively.

압전구동기를 이용한 정밀 가공용 초음파 진동장치 설계 (Design of Ultrasonic Vibration Device using PZT Actuator for Precision Laser Machining)

  • 김우진;;조성학;박종권;이문구
    • 한국레이저가공학회지
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    • 제14권2호
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    • pp.8-12
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    • 2011
  • As the aged population grows around the world, many medical instruments and devices have been developed recently. Among the devices, a drug delivery stent is a medical device which requires precision machining. Conventional drug delivery stent has problems of residual polymer and decoating because the drug is coated on the surface of stent with the polymer. If the drug is impregnated in micro hole array on the surface of the stent, the problem can be solved. Micro sized holes are generally fabricated by laser machining; however, the fabricated holes do not have an enough aspect ratio to contain the drug or a good surface finish to deliver it to blood vessel tissue. To overcome these problems, we propose a vibration-assisted machining mechanism with PZT (Piezoelectric Transducers) for the fabrication of micro sized holes. If the mechanism vibrates the eyepiece of the laser machining head, the laser spot on the workpiece will vibrate vertically because objective lens in the eyepiece shakes by the mechanism's vibration. According to the former researches, the vibrating frequency over 20kHz and amplitude over 500nm are preferable. The vibration mechanism has cylindrical guide, hollowed PZT and supports. In the cylinder, the eyepiece is mounted. The cylindrical guide has upper and low plates and side wall. The shape of plates and side wall are designed to have high resonating frequency and large amplitude of motion. The PZT also is selected to have high actuating force and high speed of motion. The support has symmetrical and rigid characteristics.

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