• The Transactions of The Korean Institute of Electrical Engineers
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• v.59 no.2
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• pp.390-396
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• 2010

An 80MHz surface acoustic wave (SAW)-based gyroscope utilizing a progressive wave was developed on a piezoelectric substrate. The developed sensor consists of two SAW oscillators in which one is used for sensing element and has metallic dots in the cavity between input and output IDTs. The other is used for a reference element. Coupling of mode (COM) modeling was conducted to determine the optimal device parameters prior to fabrication. According to the simulation results, the device was fabricated and then measured on a rate table. When the device was subjected to an angular rotation, oscillation frequency differences between the two oscillators were observed because of the Coriolis force acting on the metallic dots. Depending on the angular rate, the difference of the oscillation frequency was modulated. The obtained sensitivity was approximately 52.35 Hz/deg.s within the angular rate range of 0~1000 deg/s. The performances of devices with three IDT structures for two kinds of piezoelectric substrates were characterized. Good thermal stability was also observed during the evaluation process.

• Journal of Sensor Science and Technology
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• v.8 no.1
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• pp.53-62
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• 1999

Micro polysilicon actuators, which are widely used in the field of MEMS (Microelectromechanical System) technology, were fabricated using polysilicon thin layers. Polysilicon deposition were carried out to have symmetrical layer structures with a LPCVD (Low Pressure Chemical Vapor Deposition) system, and we have measured physical characteristics by micro test patterns, such as bridges and cantilevers to verify minimal mechanical stress and stress gradient in the polysilicon layers according to the methods of mutilayer deposition, doping, and thermal treatment, also, analyzed the properties of each specimen, which have a different process condition, by XRD, and SIMS etc.. Finally, the fabricated planar polysilicon resonator, symmetrically stacked to $6.5{\mu}m$ thickness, showed Q of 1270 and oscillation ampitude of $5{\mu}m$ under DC 15V, AC 0.05V, and 1000 mtorr pressure. The developed micro polysilicon resonator can be utilized to micro gyroscope and accelerometer sensor.

• KIPS Transactions on Computer and Communication Systems
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• v.5 no.10
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• pp.331-338
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• 2016

In this paper, we propose a system for transmitting army hand signals using motion sensors. The proposed system consists of a squad commander device, squad member devices, and a server. The squad command device and squad member device have been implemented using a micro arduino, an accelerometer sensor, and a gyroscope sensor, and the server has been implemented using a Rasberry Pi 3. Because the devices are made in the form of band, they are lightweight and portable. The proposed system can transmit the hand signals through vibration in conditions of poor visibility. We have designed and implemented the squad member device to be able to recognize four military hand signals. Through experiments, the proposed system have shown 88.82% of correct recognition. In conclusion, we expect to increase effectiveness of army operations and survival rate of soldiers.

• International Journal of Aeronautical and Space Sciences
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• v.6 no.1
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• pp.27-43
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• 2005

An INS(Inertial Navigation System) is composed of a navigation computer and an IMU(Inertial Measurement Unit), and can be applied to estimate a vehicle's state. But the inertial sensors assembled in the IMU are too complicated and expensive to use for the general application purpose. In this study, a new concept of inertial sensor system using magnetic levitation is proposed. The proposed system is expected to replace one single-axis rate or position gyroscope, and one single-axis accelerometer concurrently with a relatively simple structure. A simulation of the proposed system is given to describe the capability of this new concept.

• Proceedings of the KIEE Conference
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• 2000.07d
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• pp.3136-3138
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• 2000

마이크로머시닝을 이용한 각속도 센서에서는 기계 구조체의 기준진동에 의한 캐패시턴스의 변화와 인가되는 각속도에 따른 캐패시턴스의 변화를 감지하야 한다. 이러한 캐패시턴스의 변화량을 전기적으로 감지하는데 있어서 기준진동을 위해 구조체에 인가되는 구동신호의 간섭이 최소화 되도록 구조체를 설계하여야 하고 회로적으로 간섭을 상쇄할 수 있어야 미소한 캐패시턴스의 변화량을 감지하여 각속도 센서의 감도를 극대화할 수 있다. 본 논문에서는 이러한 구동신호의 간섭을 상쇄하여 미소캐패시턴스 변화를 감지하는 회로를 설계 하였다.

• Journal of Navigation and Port Research
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• v.35 no.10
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• pp.785-791
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• 2011

This paper describes the evaluation and selection of MEMS(Micro-Elect Mechanical System) based inertial sensor to fit to implement the Inertial Measurement Unit(IMU) for a small-sized vessel at sea. At first, the error model and the noise model of the inertial sensors are defined with Euler's equations and then, the inertial sensor evaluation is carried out with Allan Variance techniques and Monte Carlo simulation. As evaluation results for the five sensors, ADIS16405, SAR10Z, SAR100Grade100, LIS344ALH and ADXL103, the combination of gyroscope and accelerometer of ADIS16405 is shown minimum error having around 160 m/s standard deviation of velocity error and around 35 km standard deviation of position error after 600 seconds. Thus, we select the ADIS16405 inertial sensor as a MEMS-based inertial sensor to implement IMU and, the error reducing method is also considered with the search for reference papers.

• Journal of Positioning, Navigation, and Timing
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• v.4 no.3
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• pp.141-150
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• 2015

In this study, a Global Navigation Satellite System (GNSS) / Inertial Navigation System (INS) / odometer / barometer integrated navigation system that uses a commercial navigation device including Micro Electro Mechanical Systems (MEMS) accelerometer and gyroscope in addition to GNSS, odometer information obtained from a vehicle, and a separate MEMS barometer sensor was implemented, and the performance was verified. In the case of GNSS and GNSS/INS integrated navigation system that are generally used in a navigation device, the performance would deteriorate in areas where GNSS signals are not available. Therefore, an integrated navigation system that calculates a better navigation solution in areas where GNSS signals are not available compared to general GNSS/INS by correcting the velocity error of GNSS/INS using an odometer and by correcting the cumulative altitude error of GNSS/INS using a barometer was suggested. To verify the performance of the navigation system, a commercial navigation device (Softman, Hyundai Mnsoft, http://www.hyundai-mnsoft.com) and a barometer sensor (ST Company) were installed at a vehicle, and an actual driving test was performed. To examine the performance of the algorithm, the navigation solutions of general GNSS/INS and the GNSS/INS/odometer/barometer integrated navigation system were compared in an area where GNSS signals are not available. As a result, a navigation solution that has a smaller position error than that of GNSS/INS could be obtained in the area where GNSS signals are not available.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.602-606
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• 2005

A systematic procedure of probability analysis for general distributions is developed based on the first four moments estimated from polynomial interpolation of the system response function and the Pearson system. The function approximation is based on a specially selected experimental region for accuracy and the number of function evaluations is taken equal to that of the unknown coefficient for efficiency. For this purpose, three error-minimizing conditions are proposed and corresponding canonical experimental regions are formed for popular probability. This approach is applied to study the stochastic properties of the performance functions of a MEMS structure, which has quite large fabrication errors compared to other structures. Especially, the vibratory micro-gyroscope is studied using the statistical moments and probability density function (PDF) of the performance function to be the difference between resonant frequencies corresponding to sensing and driving mode. The results show that it is very sensitive to the fabrication errors and that the types of PDF of each variable also affect the stochastic properties of the performance function although they have same the mean and variance.

• Advances in nano research
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• v.15 no.2
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• pp.155-163
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• 2023

Exercise is beneficial to the body in some ways. It is vital for people who have heart problems to perform exercise according to their condition. This paper describes how an Android platform can provide early warnings of fatigue during wushu exercise using Photoplethysmography (PPG) signals. Using the data from a micro-electro-mechanical system (MEMS) gyroscope to detect heart rate, this study contributes an algorithm to determine a user's fatigue during wushu exercise. It sends vibration messages to the user's smartphone device when the heart rate exceeds the limit or is too fast during exercise. The heart rate monitoring system in the app records heart rate data in real-time while exercising. A simple pulse sensor and Android app can be used to monitor heart rate. This plug-in sensor measures heart rate based on photoplethysmography (PPG) signals during exercise. Pulse sensors can be easily inserted into the fingertip of the user. An embedded microcontroller detects the heart rate by connecting a pulse sensor transmitted via Bluetooth to the smartphone. In order to measure the impact of physical activity on heart rate, Wushu System tests are conducted using various factors, such as age, exercise speed, and duration. During testing, the Android app was found to detect heart rate with an accuracy of 95.3% and to warn the user when their heart rate rises to an abnormal level.

• Journal of Advanced Navigation Technology
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• v.21 no.2
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• pp.200-205
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• 2017

Modern sports are developing into sports science that incorporates science and various analytical simulation systems for improving records are being developed, and they are helping to improve actual game records. Therefore golf which is one of various sports events, has been popularized among the hobbyists and the general public and there is an increasing demand for correcting the movement attitude of the person. In response to these demands, many systems have been developed to analyze and correct golf swing postures. The golf swing accuracy analysis system analyzes the moments that can not be seen with the naked eye and guides them to understand easily. It can improve the golf swing motion through immediate feedback due to the visual effect. Using the knowledge of golf swing motion collected from golf swing video, we improved reliability. In addition, it provides the ability to visually check and analyze your golf swing video, allowing you to analyze each segment based on various golf swing classification methods.