• 한국정밀공학회지
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• 제23권2호
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• pp.129-137
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• 2006

Polymer micro-fluidic devices were fabricated with laser processes. A UV laser and a femto laser were used to machine polymer micro-fluidic structures directly. This laser direct machining process suits the need of rapid prototyping, as in many applications changes from the original design are often required. As examples, two polymer micro-systems were developed: a micro-check valve and a micro diffuser pump. The micro fluidic devices can be applied for many applications such as clinical diagnostics and drug delivery. Advantages and disadvantages using polymers as a material for micro-fluidic applications are discussed.

• 한국정밀공학회지
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• 제21권1호
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• pp.87-93
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• 2004

Recently, with the development of bio-technology the interests in the micro-fluidic devices for analysis in the fields of biology and medical science have been steadily increasing. Although polymer is considered as one of the best materials for micro-fluidic devices. glass or silicon molds fabricated by photo-lithographic technique have been commonly used. However, it is generally perceived that the conventional photolithographic technique has the limitation for fabricating micro-channels for micro-fluidic devices. In this work, the possibility of fabrication of micro-fluidic channels on PDMS by using the mechano-chemical process and the effect of surface states on the fluid flow were investigated. Experimental results revealed that PDMS mold fabricated by the mechano-chemical process could be used effectively to replicate micro-fluidic channels with high reproducibility and dimensional accuracy. It was also found that the fluid flow generation and flow speed were largely affected by the hydrophilicity and the surface roughness of the micro-channel surfaces.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2005년도 춘계 학술대회
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• pp.134-138
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• 2005

Recently many researches related with biotechnology are processed and it is the situation that research about micro fluidic devices is active. Micro fluidic devices has been one of the most widely used devices for the analysis in biotechnology because they have many advantages, flexibility, transparency, thermal and electrical stability, nontoxic, etc. In this study, micro fluidic device with PDMS is developed for particle counter which separates a small quantity of particles, The principle of micro particle counter is electrical-impedance method, and it was also applied hydrodynamic flow focusing. It is more efficient method to analyzing particles furthermore it can be applied to cell count ins for biotechnology.

• 한국정밀공학회지
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• 제21권10호
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• pp.188-195
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• 2004

In this paper, we fabricated fluidic devices like micro-channel, pump, mixer and particular gas separator with the technology of stereolithouaphy using RP(rapid-prototyping). The fabricated fluidic devices are expected to be applied to develop Lab-on-a chip type liquid analyzer. Stereolithography technology seems effective for fabricating MEMS(Micro Electro Mechanical System) with complicated structure because it makes three dimensional fabrication possible but, exclusive devices are needed to be developed fur fabricating even more microscopic MEMS structure.

• 대한기계학회논문집A
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• 제31권9호
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• pp.910-914
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• 2007

We present a simple and an inexpensive method for the fabrication of a nano-fluidic filter and a nano-pore micromixer using self-assembly of nano-spheres and surface tension. Colloid-plug was formed by surface tension of liquid in a microchannel to fabricate nanofluidic filter. When colloid is evaporated, nano-spheres in a colloid are orderly stacked by a capillary force. Orderly stacked nano-spheres form 3-D nano-mesh which can be used as a mesh structure of a fluidic filter. We used silica nano-sphere whose diameter is $567{\pm}85nm$, and silicon micro-channel of $50{\mu}m$-diameter. Fabricated nano-fluidic filter in a micro-channel has median pore diameter of 158nm which was in agreement with expected diameter of the nano-pore of $128{\pm}19nm$. A nano-pore micromixer consists of $200\;{\mu}m-wide,\;100\;{\mu}m-deep$ micro-channel and self-assembled nano-spheres. In the nano-pore micromixer, two different fluids had no sooner met together than two fluids begin to mix at wide region. From the experimental study, we completely apply self-assembly of nano-spheres to nano-fluidic devices.

• 한국생산제조학회지
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• 제25권3호
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• pp.224-229
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• 2016

Recently, polymeric micro-fluidic biochips with numerous micro patterns on the surface were fabricated by injection molding for realizing low-cost mass production of devices. To evaluate the effects of process parameters on large-scale micro-structure replication, a $50{\times}50mm^2$ tool insert with surface structures having a patterns of trapezoidal shapes (height: $30{\mu}m$) was employed. During injection molding, PMMA was used; packing phase parameters and mold temperature were investigated. The replicated surface textures were quantitatively characterized by confocal laser microscopy with 10-nm resolution. The degree of replication at low mold temperatures was found to be higher than that at high mold temperature at the beginning of the packing stage. Thereafter, the degree of replication increased to a greater extent at higher mold temperatures; application of higher mold temperatures improved the degree of replication.

• 대한기계학회논문집A
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• 제29권7호
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• pp.998-1004
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• 2005

A nano-stereolithography (NSL) process has been developed for fabrication of 3D shell structures which can be applied to various nano/micro-fluidic devices. By the process, a complicated 3D shell structure on a scale of several microns can be fabricated using lamination of layers with a resolution of 150 nm in size, so it does not require the use of my sacrificial layer or any supporting structure. A layer was fabricated by means of solidifying liquid-state monomers using two-photon absorption (TPA) induced using a femtosecond laser processing. When the polymerization process is finished, unsolidified liquid state resins can be removed easily by dropping several droplets of ethanol fur developing the fabricated structure. Through this work, some 3D shell structures, which can be applied to various applications such as nano/micro-fluidic devices and MEMS system, were fabricated using the developed process.

• 한국가시화정보학회:학술대회논문집
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• 한국가시화정보학회 2007년도 추계학술대회
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• pp.109-113
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• 2007

Micro-PIV is a well-known method for measurement of two- dimensional, two-component velocity in the microfluidic devices. Lots of the micro fluidic devices generate three-dimensional flow and 3D measurement of velocity is helpful to understand the physics of micro flow phenomena. In this study, we developed new micro 3D measurement method by applying 2-frame PTV in stereoscopic micro system. In this study, we did the validation study of SMPTV by using the simulated flow model to verify the accuracy and the feasibility of measurement and compared with SMPIV method. The results showed that SMPTV provides better spatial resolution and measurement accuracy than SMPIV method.

• JSTS:Journal of Semiconductor Technology and Science
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• 제7권3호
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• pp.133-139
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• 2007

Future MEMS systems will be composed of larger varieties of devices with very different functionality such as electronics, mechanics, optics and bio-chemistry. Integration technology of heterogeneous devices must be developed. This article first deals with the current development trend of new fabrication technologies; those include self-assembling of parts over a large area, wafer-scale encapsulation by wafer-bonding, nano imprinting, and roll-to-roll printing. In the latter half of the article, the concept towards the heterogeneous integration of devices and functionality into micro/nano systems is described. The key idea is to combine the conventional top-down technologies and the novel bottom-up technologies for building nano systems. A simple example is the carbon nano tube interconnection that is grown in the via-hole of a VLSI chip. In the laboratory level, the position-specific self-assembly of nano parts on a DNA template was demonstrated through hybridization of probe DNA segments attached to the parts. Also, bio molecular motors were incorporated in a micro fluidic system and utilized as a nano actuator for transporting objects in the channel.

• 설비공학논문집
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• 제27권10호
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• pp.552-557
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• 2015

The nanostereolithography process using a femtosecond laser has been shown to have strong merits for the direct fabrication of 2D/3D micro structures. In addition, a femtosecond laser provides efficient tools for precise micromachining owing to the advantages of a small and feeble heat effect zone. In this paper, we report an effective fabrication process of 3D micro optical and fluidic devices using nanostereolithography process composed of a dual stage system. Process conditions for additive and subtractive fabrication are examined. The Piezo stage scanning system is used for 3D micro-fabrication in unit area of sub-mm scale, and the motor stage is employed in fabrication on the scale of several mm. The misalignment between the pizeo- and motor- stages is revised through rotational transformation of CAD data in the unit domain. Here, the effectiveness of the proposed process is demonstrated through examples using 3D optical and microfluidic structures.