• Title/Summary/Keyword: Micro flow sensor

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Development of a constant pressure feed system using a constant pressure proportional control mode (정압비례제어방식을 적용한 정압급수장치의 개발)

  • 김주명;김광열;이건기
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.7 no.5
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    • pp.1026-1031
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    • 2003
  • Automatic feed pumps are operated and stopped by a pressure switch. Thus, because of repeated operations and stops of the pumps according to fluctuations of water volume, operation with constant rate and pressure is impossible. Moreover, because of repeated running of the pump, keeping up of constant pressure is impossible and damage and energy loss are weak points of the pimps. To make up for defects of an automatic feed pump, this paper designed and made a static pressure feed system which was composed of a feed water control valve, a flow sensor and a control system. The valve device plays an important part in reducing load of pumps by constant water supply regardless of outflow of water. Outflow of water is determined by infrared diode of the flow sensor. The control system is made of a 8 bit micro-processor and the pump was controled by a specific control algorithm. With the constant pressure feed system, discharge pressure was kept at fixed pressure, accurate operations and stops were smoothly accomplished and the pump was operated with constant pressure. Thus, the constant pressure feed system can be considered as an advanced system which made up for the weak points in the current automatic feed systems.

Analysis in Capacitor of Microaccelerometer Sensor Using Tunnelling Current Effect (턴널링 전류효과를 이용한 마이크로가속도 센서의 축전기부 해석)

  • Kim, O.S.
    • Journal of Power System Engineering
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    • v.3 no.4
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    • pp.57-62
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    • 1999
  • The microaccelerometer using a tunnelling current effect concept has the potential of high performance, although it requires slightly complex signal-processing circuit for servo-system. The paddle of micro accelerometer is pulled to have the gap width of about 2nm which almost allows the flow tunnelling current. This paper demonstrates at capacitor of microaccelerometer the use of the coupled thermo-electric analysis for voltage, current, heat flux and Joule heating then tunnelling current flows. Two electrodes are applied to the microaccelerometer producing a unform difference of temperature gradient and electric potential between the paddle and the substrate.

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Characterization of degree of alignment of polymer microfibers electrospun on a rotating water collector

  • Li, Shichen;Lee, Bong-Kee
    • Journal of Sensor Science and Technology
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    • v.30 no.3
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    • pp.125-130
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    • 2021
  • In this study, the degree of alignment of polymer microfibers produced by electrospinning using a rotating water collector was evaluated. Aligned micro- and nano-fibers are required in various practical applications involving anisotropic properties. The degree of fiber alignment has many significant effects; hence, and accurate quantitative analysis of fiber alignment is necessary. Therefore, this study developed a simple and efficient method based on two-dimensional fast Fourier transform, followed by ellipse fitting. As a demonstrative example, the polymer microfibers were electrospun on the rotating water collector as the alignment of microfibers can be easily controlled. The analysis shows that the flow velocity of the liquid collector significantly affects the electrospun microfiber alignment, that is, the higher the flow velocity of the liquid collector, the greater is the degree of microfiber alignment. This method can be used for analyzing the fiber alignment in various fields such as smart sensors, fibers, composites, and textile engineering.

The Deposition and Characteristics of Ni Thin Films according to Annealing Conditions for the Application of Thermal Flow Sensors

  • Noh, Sang-Soo;Lee, Eung-Ahn;Lee, Sung-Il;Jang, Wen-Teng
    • Transactions on Electrical and Electronic Materials
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    • v.8 no.4
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    • pp.161-165
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    • 2007
  • In this work, Ni thin films with different thickness from $1,523{\AA}\;to\;9,827{\AA}$ were deposited for the application of micro thermal flow sensors by a magnetron sputtering and oxidized through annealing at $450^{\circ}C$ with increasing annealing time. The initial variation of resistivity decreased radically with increasing films thickness, then gradually stabilizes as the thickness increases. The resistivity of Ni thin films with $3,075{\AA}$ increased suddenly with increasing annealing time at $450{\circ}C$, then gradually stabilizes as the thickness increases after the annealing time 9 h. In case of $3,075{\AA}\;and\;9,827{\AA}$ films, the average of TCR values, measured for the operating temperature range of $0^{\circ}C\;to\;180^{\circ}C$, were $2,413.1ppm/^{\circ}C\;and\;4,438.5ppm/^{\circ}C$, respectively. Because of their high resistivity and very linear TCR, Ni oxide thin films are superior to pure Ni and Pt thin films for flow and temperature sensor applications.

Study on super-hydrophobic electro-spray micro thruster and measurement of micro scale thrust (초소수성 전기 분무 마이크로 추진 장치 및 마이크로 추력 측정)

  • Lee, Young-Jong;Yoo, Yong-Hoon;Tran, Si Bui Quang;Kim, Sang-Hoon;Park, Bae-Ho;Buyn, Do-Young
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.37 no.2
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    • pp.175-180
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    • 2009
  • In this article, we fabricated polytetrafluoroethylene(PTFE) nozzle treated by ion beam, in order to fabricate polymer based electrospray micro thruster with super hydrophobic nozzle. To obtain the super hydrophobic surface, PTFE surface is treated by argon and oxygen plasma treatment process. The optimal condition is investigated argon and oxygen flow rate as well as the paalied energy level for the treatment process. Fabricated nozzle was evaluated by measuring contact angle, and the surface morphology was examined by using scanning electron microscope(SEM) and atomic force microscope(AFM). We observe that jetting becomes more stable and repeatable on the treated nozzle. And to evaluate performance of fabricated nozzle, we measure micro scale thrust using a cantilever and a nozzle treated by ion beam laser displacement sensor.

Spatiotemporal Routing Analysis for Emergency Response in Indoor Space

  • Lee, Jiyeong;Kwan, Mei-Po
    • Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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    • v.32 no.6
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    • pp.637-650
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    • 2014
  • Geospatial research on emergency response in multi-level micro-spatial environments (e.g., multi-story buildings) that aims at understanding and analyzing human movements at the micro level has increased considerably since 9/11. Past research has shown that reducing the time rescuers needed to reach a disaster site within a building (e.g., a particular room) can have a significant impact on evacuation and rescue outcomes in this kind of disaster situations. With the purpose developing emergency response systems that are capable of using complex real-time geospatial information to generate fast-changing scenarios, this study develops a Spatiotemporal Optimal Route Algorithm (SORA) for guiding rescuers to move quickly from various entrances of a building to the disaster site (room) within the building. It identifies the optimal route and building evacuation bottlenecks within the network in real-time emergency situations. It is integrated with a Ubiquitous Sensor Network (USN) based tracking system in order to monitor dynamic geospatial entities, including the dynamic capacities and flow rates of hallways per time period. Because of the limited scope of this study, the simulated data were used to implement the SORA and evaluate its effectiveness for performing 3D topological analysis. The study shows that capabilities to take into account detailed dynamic geospatial data about emergency situations, including changes in evacuation status over time, are essential for emergency response systems.

The study of direct ${\mu}c$-Si:H film growth using RPCVD system in low temperature (RPCVD system을 이용한 ${\mu}c$-Si:H의 저온 직접 성장 연구)

  • Ahn, Byeong-Jae;Kim, Do-Young;Lim, Dong-Gun;Yi, Jun-Sin
    • Proceedings of the KIEE Conference
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    • 1999.07d
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    • pp.1818-1820
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    • 1999
  • This paper presents direct ${\mu}c$-Si:H thin film growth on the glass substrates using RPCVD system (remote plasma chemical vapor deposition) in low temperature. Hydrogenated micro-crystalline silicon deposited by RPCVD system in low temperature is very useful material for photovoltaic devices, sensor applications, and TFTs (thin film transistors). Varying the deposition conditions such as substrate temperature, gas flow rate, reactive gas ratio $(SiH_4/H_2)$, total chamber pressure, and rf power, we deposited ${\mu}c$-Si:H thin films on the glass substrates (Corning glass 1737). And then we measured the structural and electrical properties of the films.

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Fabrication of a buckling micro MCA valve (버클링 마이크로 적층형 압전밸브의 제작)

  • Lee, Jong-Hwa;Chung, Gwiy-Sang
    • Journal of Sensor Science and Technology
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    • v.15 no.1
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    • pp.47-52
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    • 2006
  • This paper describes the design, fabrication and characteristics of a buckling microvalve using a MCA (multilayer ceramic actuator). The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed microvalve using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a small piezoelectric actuator. The flow rate of the fabricated MCA valve was 0-8.13 ml/min at the applied pressure of 0-50 kPa. Maximum non-linearity was 2.24 % FS at a duty cycle of 50 %. The maximum pressure was 230 kPa and the leak rate was $3.03{\times}10^{-8}\;Pa{\cdot}m^{3}/cm^{2}$ at a supply voltage of 100 V.

Thermal Transfer Analysis of Micro Flow Sensor Based on Excel (Excel을 이용한 마이크로 흐름센서의 열전달 해석)

  • Kim Tae-Yong;Chung Wan-Young
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2006.05a
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    • pp.251-254
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    • 2006
  • 마이크로 흐름센서는 종래의 반도체 집적회로 공정기술을 이용하여 소형으로 제작이 가능하며, 빠른 응답특성을 가지는 장점이 있어 다양한 응용이 기대되고 있다. 본 연구에서는 넓은 흐름의 세기영역에서 정밀한 감도를 가지는 2차원 마이크로 흐름센서를 실리콘 기판위에 설계하여 왔다. 이러한 흐름센서의 정확한 온도특성을 분석하고 이 결과로부터 최적을 온도 감지막 위치를 결정할 필요가 있다. 설계방법으로서 표계산 소프트웨어 Excel을 이용하여 열운송방정식의 차분 방정식을 매크로 기능을 이용하여 적용하고 워크시트 내에서 셀 참조방식을 활용하여 자동 계산을 수행하도록 구현하였다. 본 연구에서는 Excel을 활용한 효율적인 설계방법을 제시하고 하나의 히터와 양측에 한 쌍의 온도 감지막을 가진 마이크로 흐름센서에 대해서 열전달 특성을 계산하고 이로부터 최적을 온도 감지막 위치를 결정할 수 있었다.

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Flapper-nozzle Valve Fabrication Using Silicon Micromachining and Flow Characterization (실리콘 마이크로머시닝을 이용한 플래퍼-노즐 밸브의 제작 및 특성 실험)

  • Kwon, Young-Shin;Kim, Tae-Hyun;Cho, Dong-Il
    • Journal of Sensor Science and Technology
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    • v.6 no.1
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    • pp.72-80
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    • 1997
  • One of the concerns in micro fluidic valve designs is that of reverse direction leakage. This paper designs and fabricates a new fluidic valve to achieve zero leakage. The design uses flapper and nozzle elements. In the forward direction the working fluid pushes the flapper upward to allow flow. In the reverse direction, the flapper pushes against the orifice seat, and thus, no flow can be generated, unless the flapper or nozzle element breaks. The nozzle element fabrication involves fabricating an orifice by wet etching of (100) wafer, The flapper element fabrication involves $20{\mu}m$ deep patterning of the negative image of the flapper, followed by wet etching from backside. Flow experiments were conducted with DI water as the working fluid, and the results are compared to analytical predictions. The results show that the developed flapper-nozzle valve achieves a true diodic flow characteristic.

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