• KSTLE International Journal
• /
• v.8 no.2
• /
• pp.26-28
• /
• 2007

Si(100) surfaces were topographically modified i.e. the surfaces were patterned at micro-scale using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterned shapes included micro-pillars and microchannels. After the fabrication of the patterns, the patterned surfaces were chemically modified by coating a thin DLC film. The surfaces were then evaluated for their friction behavior at micro-scale in comparison with those of bare Si(100) flat, DLC coated Si(100) flat and uncoated patterned surfaces. Experimental results showed that the chemically treated (DLC coated) patterned surfaces exhibited the lowest values of coefficient of friction when compared to the rest of the surfaces. This indicates that a combination of both the topographical and chemical modification is very effective in reducing the friction property. Combined surface treatments such as these could be useful for tribological applications in miniaturized devices such as Micro-Electro-Mechanical-Systems (MEMS).

• Journal of the Korean Society for Precision Engineering
• /
• v.22 no.5 s.170
• /
• pp.37-44
• /
• 2005

In this paper, wire electrochemical machining (Wire ECM) with ultra short pulses is presented. Platinum wire with $10{\mu}m$ diameter was used as a tool and 304 stainless steel was locally dissolved by electrochemical machining in 0.1M $H_{2}SO_4$ electrolyte. Wire ECM can be easily applied to the fabrication of arbitrarily shaped micro-grooves without tool wear. The change of machining gap according to applied pulse voltage, pulse on-time and pulse period was investigated and the optimal pulse condition for stable machining was obtained. Using this method, various micro-grooves with less than $20{\mu}m$ width were fabricated.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2012.05a
• /
• pp.523-524
• /
• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2012.05a
• /
• pp.99-100
• /
• 2012

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2005.05a
• /
• pp.173-173
• /
• 2005

• Journal of the Korean Society for Precision Engineering
• /
• v.17 no.7
• /
• pp.5-13
• /
• 2000

지금까지의 기계산업의 발달은 대규모의 플랜트 혹은 대형기계 개발 등 대형화를 추구해왔다. 그러나, 최근 에너지와 환경에 대한 인식과 정보 통신, 전자산업, 생명산업의 발달로 소형화와 미세화의 기술 개발이 요구되고 있다. 그 예로 크기가 micron혹은 sub-millimeter 단위인 초소형기계 (Micro Machine)이 등장하게 되었고, 이러한 부품 및 시스템을 제작하는 미세 가공 기술을 Micro Machining이라고 할 수 있다.(중략)

• Transactions of Materials Processing
• /
• v.14 no.3 s.75
• /
• pp.245-250
• /
• 2005

Recently, micro machining technology for high precision mold becomes more interested for mass production of high performance optical parts micro-grooved on the surface, which is under very active development due to its effectiveness in the view point of optical performance. Mechanical micro machining technology now has more competitiveness on lithography, MEMS or LIGA processes which have some problems to fabricate especially cylinder type of groove in such as lenticular lens for illumination angle modulation system. In this study. a lenticular lens mold with U-type micro groove is fabricated making utilizing of the benefit of the mechanical micro machining technology. A shaping machining process is adapted using 3 axis degree of freedom micro machining system and single crystal natural diamond tool. A brass and a electroless nickel materials are used for mold fabrication. Machining force, chip shape and machined surface are investigated from the experiment and an optimal machining condition is found based on the examined problems from the micro cutting process.

• Transactions of Materials Processing
• /
• v.18 no.4
• /
• pp.310-316
• /
• 2009

Micro lens array(MLA) is widely used in information technology(IT) industry fields for various applications such as a projection display, an optical power regulator, a micro mass spectrometer and for medical appliances. Recently, MLA have been fabricated and developed by using a reflow method having the processes of micro etching, electroplating, micro machining and laser local heating. Laser thermal relaxation method is introduced in marking of microdots on the surface of densified glass. In this paper, we have proposed a new direct fabrication process using UV laser local thermal-expansion(UV-LLTE) and investigated the optimal processing conditions of MLA on the surface of negative photo-resist material. We have also studied the 3D shape of the micro lens obtained by UV laser irradiation and the optimal process conditions. And then, we made chrome mold by electroplating. After that, we made MLA using chrome mold by hot embossing processing. Finally, we have measured the opto-physical properties of micro lens and then have also tested the possibility of MLA applications.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.35 no.8
• /
• pp.899-904
• /
• 2011

This This study aims to verify burr formation and to remove the burrs in micro-channel fabrication using micro-machining tools. The machining processes are combined with micro-milling and magnetic abrasive deburring for AISI316 stainless steel. Depending on the micro-milling conditions that are applied, burrs are formed around the side walls. Magnetic abrasive deburring is used to remove these burrs. AISI316 stainless steel is a nonferrous material and its magnetic flux density, which is an important parameter for efficient magnetic abrasive deburring, is low. To enhance this magnetic flux density, we design and build a magnetic array table. The effect of removing burrs is evaluated via SEM and a surface tester.

• Tribology and Lubricants
• /
• v.36 no.5
• /
• pp.267-273
• /
• 2020

This study experimentally investigates hydrophobic surfaces fabricated via additive manufacturing. Additive manufacturing, commonly known as 3D printing, is the process of joining materials to fabricate parts from 3D model data, usually in a layer-upon-layer manner. Digital light processing is used to fabricate hydrophobic surfaces in this study. This method uses photo-curable resins and ultraviolet (UV) sources. Moreover, this technique generally has faster shaping speeds and is advantageous for the fabrication of small components because it enables the fabrication of one layer at a time. Two photo-curable resins with different compositions are used to fabricate micro-patterns of hydrophobic surfaces. The resins are composed of a photo-initiator, monomer, and oligomer. Experiments are conducted to determine suitable process conditions for the fabrication of hydrophobic surfaces depending on the type of resin. The most important factors affecting the process conditions are the UV exposure time and slice thickness. The fabrication capability according to the process conditions is evaluated using the side and top views of the micro-patterns observed using a microscope. The micro-patterns are collapsed and intertwined when the exposure time is short because sufficient light (heat) is not applied to cure the photo-curable resin with a given slice thickness. On the other hand, the micro-patterns are attached to each other when the exposure time is prolonged because the over-curing time can cure the periphery of a given shape. When the slice is thicker, the additional curing area is enlarged in each slice owing to the straightness of UV light, and the slice surface becomes rough.