• 제목/요약/키워드: Micro electrochemical machining

검색결과 87건 처리시간 0.022초

전기화학 가공을 이용한 마이크로 홈 가공 (Micro Groove Machining for Electrochemical Micro-Machining)

  • 김영민;이은상
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.1844-1847
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    • 2003
  • Electrochemical micro-machining(EMM) is used to achieve a desired workpiece surface by dissolving the metal workpiece with an electrochemical reaction. This machining method can be applied to metal that is difficult to machining using other methods. The workpiece dissolves when it is positioned close to the tool electrode in electrolyte and current is applied. This aim of this work is to develop electrochemical micro-machining(EMM) technique for micro groove shape by establishing appropriate electrochemical parameters of machining

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미세 전해가공 기술 동향 (Review of Micro Electro-Chemical Machining)

  • 신홍식
    • 융복합기술연구소 논문집
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    • 제2권2호
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    • pp.25-29
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    • 2012
  • Micro machining technologies have been required to satisfy various conditions in a high-technology industry. Micro electrochemical process is one of the most precision machining methods. Micro electrochemical process has been divided into electrochemical etching through protective layer and electrochemical machining using ultrashort voltage pulses. Micro shaft can be fabricated by electrochemical etching. The various protective layers such as photo-resist, oxide layer and oxidized recast layer have been used to protect metal surface during electrochemical etching. Micro patterning on metal surface can be machined by electrochemical etching through protective layer. Micro hole, groove and structures can be easily machined by electrochemical machining using ultrashort voltage pulses. Recently, the groove with subnanometer was machined using AFM.

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점 전극을 이용한 마이크로 전해현상의 고찰 (A Study on the micro-electrochemical phenomenon using point electrode method)

  • 김봉규;박규열
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2001년도 춘계학술대회 논문집
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    • pp.1093-1096
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    • 2001
  • Eletrochemical phenomenon are employed in the manufacturing of micro-electrochemical machining(micro-ECM). The application of controlled electrochemical metal removal in the fabrication of microstructures and microcomponents is refer to as micro-electrochemical machining. In this paper, we introduce a new method named $\ulcorner$point-electrode electro chemical machining method$\lrcorner$ was proposed to establish micro fabrication technology by use of electrochemical machining. And we find effect of the electrochemical phenomenon in several conditions.

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미세 전해 가공에서 반경 방향 오버컷 예측을 위한 시뮬레이션 (Simulation of the Radial Overcut in Micro Electrochemical Machining)

  • 김보현;신홍식;오영탁;이강희;주종남
    • 한국정밀공학회지
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    • 제28권2호
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    • pp.251-256
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    • 2011
  • The radial overcut in micro electrochemical machining was investigated. The prediction of overcut is important not only for the machining accuracy but also for the shape control of micro structures. In micro ECM, machining gap or overcut depends on electrolyte, pulse voltage, pulse duration and dissolution time etc. Understanding of electrochemical dissolution rate is necessary for the overcut prediction. In this paper, the radial overcut of micro electrochemical machining according to pulse duration and dissolution time was simulated using electrochemical principles and also experimentally estimated.

미세 전해 구멍 가공에서의 가긍 조건에 따른 가공 간극 변화 특성 (Effect of Machining Conditions on machining gap in Micro Electrochemical Drilling)

  • 김보현;박병진;주종남
    • 한국정밀공학회지
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    • 제22권12호
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    • pp.163-169
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    • 2005
  • Micro hole is ode of basic elements for micro device or micro parts. Micro electrochemical machining (ECM) can be applied to the machining of micro holes less than 50 ${\mu}m$ in diameter, which it is not easy to apply other techniques to. For the machining of passivating metals such as stainless steel, machining conditions should be chosen carefully to prevent a passive layer. The machining conditions also affect the machining resolution, In this paper, machining characteristics of micro ECM were investigated according to machining conditions such as electrolyte concentration and pulse conditions. From the investigation, optimal machining conditions were suggested for micro ECM of stainless steel.

전해 가공을 위한 미세 전극 제작 (Fabrication of Micro Electrodes for Electrochemical Machining)

  • 김보현;박병진;주종남
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2005년도 춘계학술대회 논문집
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    • pp.407-412
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    • 2005
  • For micro electrochemical machining (ECM), tool electrodes with various sizes and shapes are necessary. In this paper, tool electrodes were fabricated by micro electrical discharge machining (EDM). Electrode material is tungsten carbide which has high rigidity and good conductivity for micro electrochemical machining. Disk-type and sphere-type electrodes were fabricated to prevent taper shape of side walls or to produce spherical features. Various 3D micro structures were fabricated by electrochemical milling with developed electrodes.

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와이어 펄스 전해 가공을 이용한 미세 홈 제작 (Micro-groove Fabrication by Wire Electrochemical Machining with Ultra Short Pulses)

  • 나찬욱;박병진;김보현;최덕기;주종남
    • 한국정밀공학회지
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    • 제22권5호
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    • pp.37-44
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    • 2005
  • In this paper, wire electrochemical machining (Wire ECM) with ultra short pulses is presented. Platinum wire with $10{\mu}m$ diameter was used as a tool and 304 stainless steel was locally dissolved by electrochemical machining in 0.1M $H_{2}SO_4$ electrolyte. Wire ECM can be easily applied to the fabrication of arbitrarily shaped micro-grooves without tool wear. The change of machining gap according to applied pulse voltage, pulse on-time and pulse period was investigated and the optimal pulse condition for stable machining was obtained. Using this method, various micro-grooves with less than $20{\mu}m$ width were fabricated.

미세 전해 구멍 가공에서의 가공 특성과 시뮬레이션 (Machining Characteristics in Micro Electrochemical Drilling and Simulation)

  • 김보현;이영수;최덕기;주종남
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1202-1205
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    • 2005
  • Micro hole is one of basic elements for micro device or micro parts. By micro ECM, micro holes less than $50\mu{m}$ in diameter can be machined easily. Machining characteristics of micro ECM were investigated according to machining conditions such as electrolyte concentration and pulse conditions. From the investigation, optimal machining conditions were suggested for micro ECM of stainless steel. For the micro machining with high resolution, the change of machining gap should be predicted. By using electrochemical principle equations, the change of machining gap was simulated.

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텅스텐 와이어 초단 펄스 미세 전해가공 (Tungsten Wire Micro Electrochemical Machining with Ultra Short Pulses)

  • 신홍식;김보현;주종남
    • 한국정밀공학회지
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    • 제24권6호
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    • pp.105-112
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    • 2007
  • Tungsten wire micro electrochemical machining (W-wire micro ECM) with ultra-short pulses enables precise micro machining of metal. In wire micro ECM, platinum wire has been used because it is electrochemically stable. However, the micro metal wire with low strength is easily deformed by hydrogen bubbles which are generated during the machining. The wire deformation decreases the machining accuracy. To reduce the influence of hydrogen bubbles, in this paper, the use of tungsten wire was investigated. To improve machining accuracy, suitable pulse conditions which affect generation of bubbles were also investigated. The tungsten wire micro ECM can be applied to the fabrication of various shapes. Using this method, various micro-parts and shapes were fabricated.

방전 가공과 전해 가공을 이용한 미세 가공 (Micro Machining by EDM and ECM)

  • 전동훈;김보현;주종남
    • 한국정밀공학회지
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    • 제23권10호
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    • pp.52-59
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    • 2006
  • Micro electrical discharge machining (EDM) and micro electrochemical machining (ECM) were studied for the fabrication of micro structures. Micro EDM has been used to machine micro structures from metals. However, since the tool wear is inevitable during the machining, the tool wear is drawback for the precision machining. Micro ECM is also used for micro machining and produces better surface quality than that of micro EDM. Moreover, since tool electrodes are not worn out, micro ECM is suitable for the precision micro machining. However, the machining rate is lower than that of micro EDM. In this paper, therefore, the hybrid machining process which uses micro EDM as roughing and micro ECM as finishing is introduced. By using this hybrid machining, a hemisphere with $100\;{\mu}m$ radius was fabricated and the efficiency of the process was investigated experimentally.