Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Micro Machining by EDM and ECM

방전 가공과 전해 가공을 이용한 미세 가공

  • Published : 2006.10.01
Download PDF
⟨ Previous Next ⟩

Abstract

Micro electrical discharge machining (EDM) and micro electrochemical machining (ECM) were studied for the fabrication of micro structures. Micro EDM has been used to machine micro structures from metals. However, since the tool wear is inevitable during the machining, the tool wear is drawback for the precision machining. Micro ECM is also used for micro machining and produces better surface quality than that of micro EDM. Moreover, since tool electrodes are not worn out, micro ECM is suitable for the precision micro machining. However, the machining rate is lower than that of micro EDM. In this paper, therefore, the hybrid machining process which uses micro EDM as roughing and micro ECM as finishing is introduced. By using this hybrid machining, a hemisphere with $100\;{\mu}m$ radius was fabricated and the efficiency of the process was investigated experimentally.

Keywords

References

  1. Masuzawa, T, Fujimoto, M. and Kobayashi, K., 'Wire Electro-Discharge Grinding for Micro Machining,' Annals of the CIRP, Vol. 34, No. 1, pp. 431-434, 1985 https://doi.org/10.1016/S0007-8506(07)61805-8
  2. Yu, Z. Y, Masuzawa, T and Fujino, M., 'Micro-EDM for Three-Dimensional Cavities - Development of Uniform Wear Method,' Annals of the CIRP, Vol. 47, No.1, pp. 169-172, 1997
  3. Schuster, R., Kirchiner, V., Allongue, P. and Etrl, G., 'Electrochemical Micromachining,' Science, Vol. 289, pp. 98-101, 2000 https://doi.org/10.1126/science.289.5476.98
  4. Masuzawa, T, Tsukanoto, J. and Fujimoto, M., 'Drilling of Deep Microholes by EDM,' Annals of the CIRP, Vol. 38, pp. 195-198, 1989 https://doi.org/10.1016/S0007-8506(07)62683-3
  5. Chen, S. L., Yan, B. H. and Huang, F. Y, 'Influence of kerosene and distilled water as dielectrics on the electric discharge machining characteristics of Ti-6AI-4A,' Journal of Materials Processing Technology, Vol. 87, pp. 107-111, 1999 https://doi.org/10.1016/S0924-0136(98)00340-9
  6. Ahn, S. H., Ryu, S. H., Choi, D. K. and Chu, C. N., 'Localized Electrochemical Micro Drilling Using Ultra Short Pulses,' Journal of the KSPE, Vol. 20, No.8, pp. 213-220, 2003
  7. McGeough, J. A., 'Principles of Electrochemical Machining,' Chapman and Hall, London, 1974
  8. Kozak, J., Rajurkar, K. P. and Makkar, Y, 'Selected problems of micro-electrochemical machining,' Journal of Materials Processing Technology, Vol. 149, pp. 426-431, 2004 https://doi.org/10.1016/j.jmatprotec.2004.02.031