• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 춘계학술대회논문집 - 한국공작기계학회
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• pp.591-596
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• 2000

The needs of ultra precision machined parts is increase every days. But the experimental data of nonferrous metal is insufficient. The cutting behavior in micro cutting area is different from that of traditional cutting because of the size effect. Al6061 is widely used as optical parts such as LASER reflector's mirror or multimedia instrument. Al6061 opper is machined by ultra precision machine with natural diamond tool. From the experiment and discussion on the cutting force and worked surface roughness as the variable spindle speed, feed rate and depth of cut. As a result, the cutting force increases as the increasing depth of cut, but the worked surface roughness does not increase so much. The surface roughness is good when spindle sped is above 1200rpm, and feed rate is small. The influence of depth of cut is very small.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.685-686
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• 2010

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.97-100
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• 2004

In recent years, a demand for micro-structure machining is increasing by the development of information and optics industries. Micro machining technology is in general well known in the field of lithograghy. However, the requirement of producing micro machine and/or micro mechanism with metal materials will be increased since a variety of workpiece configurations can be easily made. In this paper, ultra precision machine is developed to obtain micro groove and mirror surface using single crystal diamond tool. According to the cutting experiment, no burr was found at the edge of V-grooves, and the surface roughness of copper is about 1～3nm Ra. It is verified that ultra precision machine is effective to high precision machining.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2007년도 춘계학술대회 논문집
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• pp.55-59
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• 2007

Technologies of super-precision micro pattern mold machining and high-performance optical films manufacturing using thereof forms the basis of recent display industries which have developed remarkably. Especially, it is the light guide plates and high luminous intensity prism sheets at BLU or FLU in LCD and lenses at virtual keyboard's display to be manufactured by micro machining technology. One way the industry requires to do that is by developing high-performance light guide plates or films which are existing light guide plates, diffusion films and luminance enhancement prism films all in one. In this research effort, basic processing of the micro pyramid structure by shaping method is proposed. Experiments of mold machining of pitch $20{\mu}m$ tetrahedral pyramid and pitch $100{\mu}m$ trihedral pyramid using a $90^{\circ}$ diamond tool were conducted to identify a variety of machining features, such as cutting forces, conditions of the surface, shapes of chips, and influence of materials.

• Design & Manufacturing
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• 제14권2호
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• pp.56-61
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• 2020

Recently, research for machining next-generation micro semiconductor processes and micro patterns has been actively conducted. In particular, it is applied to various industrial fields depending on the machining method in the case of FIB (Focused ion beam) milling. In this study, intends to deal with FIB milling machining technology for ultra-precision diamond tool fabrication technology. Ultra-precision diamond tools require nano-scale precision, and FIB milling is a useful method for nano-scale precision machining. However, FIB milling has a problem of Gaussian characteristics that are differently formed according to the beam current due to the input of an ion beam source, and there are process conditions to be considered, such as a side clearance angle problem of a diamond tool that is differently formed according to the tilting angle. A series of process steps for fabrication a ultra-precision diamond tool were studied and analyzed for each process. It was confirmed that the effect on the fabrication process was large depending on the spot size of the beam and the current of the beam as a result of the experimental analysis.

• 한국표면공학회지
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• 제52권1호
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• pp.16-22
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• 2019

The structural change of DLC coatings during long-term wear test and dicing test under the low loading condition was investigated. DLC coatings were applied for the precision injection molds of a modified SNCM steel for the extension of life and the micro-diamond blades for the high cutting efficiency and the increase in life. A ball-on-disc wear tests in the mold steel and a dicing tests in the micro-diamond blades were conducted to understand degradation of DLC coatings. The degradation of DLC coatings for the injection mold steel and the micro-diamond blades during the wear and dicing tests were studied with Raman Spectroscopy. Raman peaks were divided two bands(D band and G band) to study the degradation process of DLC structure. By the wear test, polished condition of wear marks were observed to be maintained until 10 hrs of wear test period is given, but small striation marks appeared in 20 hours wear test. It was observed that $I_D/I_G$ ratios changed as the degradation of DLC coatings is proceeded during the wear tests and the dicing tests. It is suggested that the change in $I_D/I_G$ value possibly reflected from the composition of $sp^2$ and $sp^3$ bondings in DLC layers relevant to the change in mechanical and physical property.

• 한국기계가공학회지
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• 제11권2호
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• pp.1-6
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• 2012

Recent ultra-precision machining systems have nano-scale resolution, and can machine various shapes of complex structures using five-axis driven modules. These systems are also multi-functional, which can perform various processes such as planing, milling, turning et al. in one system. Micro machining technology using these systems is being developed for machining fine patterns, hybrid patterns and high aspect-ratio patterns on large-area molds with high productivity. These technology is and will be applied continuously to the fields of optics, display, energy, bio, communications and et al. Domestic and foreign trends of micro machining technologies for flat molds were investigated in this study. Especially, we focused on the types and the characteristics of ultra-precision machining systems and application fields of micro patterns machined by the machining system.

• 한국정밀공학회지
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• 제14권3호
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• pp.28-34
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• 1997

The side burrs and shape distortion resulting from the micromachining of an array of V-shape microgrooves in fresnel lens mould were experimentally invesigated. The focus of this study is on the influence of depth of cut and prism angle on the burr growing rate. The main experiments were con- ducted on the single prism cutting for the convinient of measuring the burr shape and cutting force. From the observation of the burr shape and burr growing rate, it was found that there exits a critical depth of cut below which the burrs are more or less irregular and weak. But above that critical value, the burrs are re- latively clear and stiff.

• 한국기계가공학회지
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• 제9권1호
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• pp.87-92
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• 2010

Micromachining technology using a ultra-precision micromachining system is widely applied in the fields of optics, biotechnology and analytical chemistry, etc. specially in microfabrication of fresnel lens, light guide panels of TFT-LED and PDP ribs with micro-patterns, machining errors have an effect on the performance of those products. The deflection of tool and tool holder is known to be one of the very important factors that is due to machining errors in micromachining. The deflections of diamond tool and tool holder used in micro-grooving are analysed by FEM. We analysed by FEM. With an linearity valuation of FEM, deflection of tool and tool holder is calculated by using the data of cutting force which is acquired from micro-V groove machining experiments in micromachining system.

• 한국정밀공학회지
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• 제17권12호
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• pp.68-75
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• 2000

This paper presents the construction of an ultra-precision machining system and machining experiments using the developed system. The system is composed of air bearing system, granite bed, air pad, and linear feeding mechanism. The cutting conditions have great effect on the surface quality in ultra-precision machining. the ultra-precision machining is mainly processed by several ${\mu}{\textrm}{m}$ depth of cut and feed rate. For this, tools with sharper cutting edge and less tool wear are needed. To satisfy these requirement, diamond is generally used as a tool material for ultra-precision machining. In order to evaluate the cutting characteristics of the PCD and MCD tools on the aluminum alloy, the machining experiments performed using the developed system.