• 제목/요약/키워드: Micro deposition

검색결과 465건 처리시간 0.022초

Electrical and Mechanical Properties of Indium-tin-oxide Films Deposited on Polymer Substrate Using Organic Buffer Layer

  • Han, Jeong-In;Lee, Chan-Jae;Rark, Sung-Kyu;Kim, Won-Keun;Kwak, Min-GI
    • Journal of Information Display
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    • 제2권2호
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    • pp.52-60
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    • 2001
  • The electrical and mechanical properties in indium-tin-oxide films deposited on polymer substrate were examined. The materials of substrates were polyethersulfone (PES) which have gas barrier layer and anti-glare coating for plastic-based devices. The experiments were performed by rf-magnetron sputtering using a special instrument and buffer layers. Therefore, we obtained a very flat polymer substrate deposited ITO film and investigated the effects of buffer layers, and the instrument. Moreover, the influences of an oxygen partial pressure and post-deposition annealing in ITO films deposited on polymer substrates were clarified. X-ray diffraction observation, measurement of electrical property, and optical microscope observation were performed for the investigation of micro-structure and electro-mechanical properties, and they indicated that as-deposited ITO thin films are amorphous and become quasi-crystalline after adjusting oxygen partial pressure and thermal annealing above $180^{\circ}C$. As a result, we obtained 20-25 ${\Omega}/sq$ of ITO films with good transmittance (above 80 %) of oxygen contents with under 0.2 % and vacuum annealing. Furthermore, using organic buffer layer, we obtained ITO films which have a rather high electrical resistance (40-45 ${\Omega}/sq$) but have improved optical (more than 85 %) and mechanical characteristics compared to the counterparts. Consequently, a prototype reflective color plastic film LCD was fabricated using the PES polymer substrates to confirm whether the ITO films could be realized in accordance with our experimental results.

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조성변조 Co/Pd 초격자 박막의 Ar가스 압력변화에 따른 자기 및 자기광학적 특성 (Effects of Sputtering Ar Pressure on Magnetic and Magneto-optical Propwrties in Compositionally Modulated Co/Pd Supwrlattice Thin Films)

  • 김진홍;신성철
    • 한국자기학회지
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    • 제2권2호
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    • pp.119-124
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    • 1992
  • 조성변조 Co/Pd 초격자 박막 제조시 스퍼터링 Ar기압이 박막의 미세조직에 미치는 방향과 이로 인한 자기 및 자기광학적 특성에 미치는 영향을 조사하였다. 초격자 박막은 dc-magnetron 스퍼터링 방법으로 각 sublayer의 두께가 $2\;\AA-Co/9\;\AA-Pd$일때, 스퍼터링 Ar가스압력을 2에서 30 mTorr 까지 변화시키면서 제조하였다. Ar기압이 10 mTorr 이상에서 초 격자 박막은 주상구조(columnar structure)를 형성시키면서 성장됨이 관측되었다. Ar기압의 증가에 따라 포화자화값, 자기이방성에너지 및 Kerr 회전각등은 감소하고 보자력은 증가함을 보였다. 이러한 자기 및 자기광학적 특성의 변화는 Ar압력에 따른 초격자 박막의 미세구조 변화에 기인되는 현상으로 설명될 수 있다.

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R-F magnetron sputtering 법으로 제조된 SrBi$_2$Ta$_2$O$_9$ 강유전성 박막의 미세구조 특성 및 전기적 특성 (Microstructure and Electrical Properties of SrBi$_2$Ta$_2$O$_9$ Ferroelectric Thin Films Prepared by RF Magnetron Sputtering Method)

  • 김효영;박상준;장건익
    • 마이크로전자및패키징학회지
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    • 제6권2호
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    • pp.51-61
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    • 1999
  • R.f. magnetron sputtering법에 의해 $SrBi_2Ta_2O_9$ 박막을 $Pt/SiO_2$/Si p-tyPp (100) 기판 위에 제조하였다. 제조된 박막을 $800^{\circ}C$에서 열처리한 후 증착 조건에 따라 미세구조와 전기적 특성을 측정하였다. $800^{\circ}C$에서 열처리된 박막은 (006), (111), (200) 및 이차상인 BiPt 피크가 XRD 분석 결과 나타났으며, 가스 압력의 감소와 기판 온도의 증가에 따라 결정입자는 성장하였다. 50mtorr, $100^{\circ}C$에서 증착 후 $800^{\circ}C$에서 열처리한 박막의 두께는 200nm이었다. 이 박막의 잔류분극과 항전계 값은 각각 20.07 $\mu$C/$\textrm {cm}^2$, 79kV/cm이었다.

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MEMS 응용을 위한 $Ar^+$ 이온 레이저에 의한 단결정/다결정 실리콘 식각 특성 (Characteristics of single/poly crystalline silicon etching by$Ar^+$ ion laser for MEMS applications)

  • 이현기;한승오;박정호;이천
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권5호
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    • pp.396-401
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    • 1999
  • In this study, $Ar^+$ ion laser etching process of single/poly-crystalline Si with $CCl_2F_2$ gas is investigated for MEMS applications. In general, laser direct etching process is useful in microelectronic process, fabrication of micro sensors and actuators, rapid prototyping, and complementary processing because of the advantages of 3D micromachining, local etching/deposition process, and maskless process with high resolution. In this study, a pyrolytic method, in which $CCl_2F_2$ gasetches molten Si by the focused laser, was used. In order to analyze the temperature profile of Si by the focused laser, the 3D heat conduction equation was analytically solved. In order to investigate the process parameters dependence of etching characteristics, laser power, $CCl_2F_2$ gas pressure, and scanning speed were varied and the experimental results were observed by SEM. The aspect ratio was measured in multiple scanning and the simple 3D structure was fabricated. In addition, the etching characteristics of $6\mum$ thick poly-crystalline Si on the insulator was investigated to obtain flat bottom and vertical side wall for MEMS applications.

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Superhydrophobic nano-hair mimicking for water strider leg using CF4 plasma treatment on the 2-D and 3-D PTFE patterned surfaces

  • Shin, Bong-Su;Moon, Myoung-Woon;Kim, Ho-Young;Lee, Kwang-Ryeol
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.365-365
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    • 2010
  • Similar to the superhydrophobic surfaces of lotus leaf, water strider leg is attributed to hierarchical structure of micro pillar and nano-hair coated with low surface energy materials, by which water strider can run and even jump on the water surface. In order to mimick its leg, many effort, especially, on the fabrication of nanohairs has been made using several methods such as a capillarity-driven molding and lithography using poly(urethane acrylate)(PUA). However most of those effort was not so effective to create the similar structure due to its difficulty in the fabrication of nanoscale hairy structures with hydrophobic surface. In this study, we have selected a low surface energy polymeric material of polytetrafluoroethylene (PTFE, or Teflon) assisted with surface modification of CF4 plasma treatment followed by hydrophobic surface coating with pre-cursor of hexamethyldisiloxane (HMDSO) using a plasma enhanced chemical vapor deposition (PE-CVD). It was found that the plasma energy and duration of CF4 treatment on PTFE polymer could control the aspect ratio of nano-hairy structure, which varying with high aspect ratio of more than 20 to 1, or height of over 1000nm but width of 50nm in average. The water contact angle on pristine PTFE surface was measured as approximately $115^{\circ}$. With nanostructures by CF4 plasma treatment and hydrophobic coating of HMDSO film, we made a superhydrophobic nano-hair structure with the wetting angle of over $160^{\circ}C$. This novel fabrication method of nanohairy structures has been applied not only on 2-D flat substrate but also on 3-D substrates like wire and cylinder, which is similarly mimicked the water strider's leg.

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개인안전 제품을 위한 3 차원 다공성 폴리머 프린팅의 최적화 공정조건에 대한 연구 (Study of Optimal Process Conditions of 3D Porous Polymer Printing for Personal Safety Products)

  • 유찬주;김혜수;박준한;윤단희;신종국;신보성
    • 한국정밀공학회지
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    • 제33권5호
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    • pp.333-339
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    • 2016
  • In this paper, a fundamental experiment regarding the formation of porous 3D structures for personal safety products using 3D PPP (Porous Polymer Printing) was introduced for the first time. The filament was manufactured by mixing PP (Polypropylene) and CBA (Chemical Blowing Agent) with polymer extruder, and the diameter of the filament was approximately 1.75mm. The proposed 3D PPP method, combined with the conventional FDM (Fused Deposition Modeling) procedure, was influenced by process parameters, such as the nozzle temperature, printing speed and CBA density. In order to verify the best processing conditions, the depositing parameters were experimentally investigated for the porous polymer structure. These results provide parameters under which to form a multiple of 3D porous polymer structures, as well as various other 3D structures, and help to improve the mechanical shock absorption for personal safety products.

Anti-obesity effects of Tenebrio molitor larvae powder in high-fat diet-induced obese mice

  • Park, Bo Mi;Lim, Hyung Ju;Lee, Bong Joo
    • Journal of Nutrition and Health
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    • 제54권4호
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    • pp.342-354
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    • 2021
  • Purpose: Obesity is a serious public health issue for the modern society and is considered a chronic health hazard. There are many surgical and pharmacological approaches to treat obesity. However, various potentially hazardous side effects remain the biggest challenge. Therefore, diets based on foods derived from natural products have gained increasing attention compared to anti-obesity drugs. Recently, research on edible insects as a food source has been a topic of considerable interest in the scientific communities. This study examined the anti-obesity effects of ingesting an edible insect by feeding a high-fat diet (HFD)-induced obese mouse models with a diet containing Tenebrio molitor larvae powder (TMLP). Methods: Six-week-old female C57BL/6J mice were divided into 4 groups according to treatment: 100% normal diet (ND), 100% HFD (HFD), HFD 99% + TMLP 1% (TMLP), and HFD 97% + TMLP 3% (TMLP 3%). TMLP was added to the HFD for 6 weeks for the latter two groups. Results: Compared to the HFD group, mice in the TMLP group showed weight loss, and micro-computed tomographic imaging revealed that the volume of the adipose tissue in the abdominal area also showed significant reduction. After an autopsy, the fat weight was found to be significantly reduced in the TMLP group compared to the HFD group. In addition, the degree of fat cell deposition in the liver tissue and the size of the adipocytes significantly decreased in the TMLP group. Reverse transcription polymerase chain reaction analysis for the mRNA expression of adipogenesis-related genes namely CCAAT-enhancer-binding proteins (C/EBP-β, C/EBP-δ), and fatty acid-binding protein 4 (FABP4) showed that the expression levels of these genes were significantly reduced in the TMLP group compared to the HFD group. Serum leptin level also decreased significantly in the TMLP group in the comparison with the HFD group. In addition, total cholesterol, triglyceride, and glucose levels in mouse serum also decreased in the TMLP group. Conclusion: Taken together, our results showed that TMLP effectively inhibited adipocyte growth and reduced body weight in obese mice.

Measurement of the Thermal Conductivity of a Polycrystalline Diamond Thin Film via Light Source Thermal Analysis

  • Kim, Hojun;Kim, Daeyoon;Lee, Nagyeong;Lee, Yurim;Kim, Kwangbae;Song, Ohsung
    • 한국재료학회지
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    • 제31권12호
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    • pp.665-671
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    • 2021
  • A 1.8 ㎛ thick polycrystalline diamond (PCD) thin film layer is prepared on a Si(100) substrate using hot-filament chemical vapor deposition. Thereafter, its thermal conductivity is measured using the conventional laser flash analysis (LFA) method, a LaserPIT-M2 instrument, and the newly proposed light source thermal analysis (LSTA) method. The LSTA method measures the thermal conductivity of the prepared PCD thin film layer using an ultraviolet (UV) lamp with a wavelength of 395 nm as the heat source and a thermocouple installed at a specific distance. In addition, the microstructure and quality of the prepared PCD thin films are evaluated using an optical microscope, a field emission scanning electron microscope, and a micro-Raman spectroscope. The LFA, LaserPIT-M2, and LSTA determine the thermal conductivities of the PCD thin films, which are 1.7, 1430, and 213.43 W/(m·K), respectively, indicating that the LFA method and LaserPIT-M2 are prone to errors. Considering the grain size of PCD, we conclude that the LSTA method is the most reliable one for determining the thermal conductivity of the fabricated PCD thin film layers. Therefore, the proposed LSTA method presents significant potential for the accurate and reliable measurement of the thermal conductivity of PCD thin films.

Assessment of radionuclides from coal-fired brick kilns on the outskirts of Dhaka city and the consequent hazards on human health and the environment

  • M.M. Mahfuz Siraz;M.D.A. Rakib;M.S. Alam;Jubair Al Mahmud;Md Bazlar Rashid;Mayeen Uddin Khandaker;Md. Shafiqul Islam;S. Yeasmin
    • Nuclear Engineering and Technology
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    • 제55권8호
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    • pp.2802-2811
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    • 2023
  • In a first-of-its-kind study, terrestrial radionuclide concentrations were measured in 35 topsoil samples from the outskirts of Dhaka using HPGe gamma-ray spectrometry to assess the radiological consequences of such a vast number of brick kilns on the plant workers, general as well as dwelling environment. The range of activity concentrations of 226Ra, 232Th, and 40K is found at 19 ± 3.04 to 38 ± 4.94, 39 ± 5.85 to 57 ± 7.41, and (430 ± 51.60 to 570 ± 68.40) Bq/kg, respectively. 232Th and 40K concentrations were higher than the global averages. Bottom ash deposition in lowlands, fly ash buildup in soils, and the fallout of micro-particles are all probable causes of the elevated radioactivity levels. 137Cs was found in the sample, which indicates the migration of 137Cs from nuclear accidents or nuclear fallout, or the contamination of feed coal. Although the effective dose received by the general public was below the recommended dose limit but, most estimates of hazard parameters surpass their respective population weighted global averages, indicating that brick kiln workers and nearby residents are not safe due to prolonged exposures to terrestrial radiation. In addition, the soil around sampling sites is found to be unsuitable for agricultural purposes.

비정형 기둥 형상을 가진 나노구조에서의 가스 투과성 실험 연구 (Permeability of the Lateral Air Flow through Unstructured Pillar-like Nanostructures)

  • 김혜원;임혜원;박정우;이상민;김형모
    • Tribology and Lubricants
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    • 제39권5호
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    • pp.197-202
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    • 2023
  • Recently, research on experimental and analytical techniques utilizing microfluidic devices has been pursued. For example, lab-on-a-chip devices that integrate micro-devices onto a single chip for processing small sample quantities have gained significant attention. However, during sample preparation, unnecessary gases can be introduced into the internal channels, thus, impeding device flow and compromising specific function efficiency, including that of analysis and separation. Several methods have been proposed to mitigate this issue, however, many involve cumbersome procedures or suffer from complexities owing to intricate structures. Recently, some approaches have been introduced that utilize hydrophobic device structures to remove gases within channels. In such cases, the permeability of gases passing through the structure becomes a crucial performance factor. In this study, a method involving the deposition and sintering of diluted Ag-ink onto a silicon wafer surface is presented. This is followed by unstructured nano-pattern creation using a Metal Assisted Chemical Etching (MACE) process, which yields a nanostructured surface with unstructured pillar shapes. Subsequently, gas permeability in the spaces formed by these surface structures is investigated. This is achieved by experiments conducted to incorporate a pressure chamber and measure gas permeability. Trends are subsequently analyzed by comparing the results with existing theories. Finally, it can be confirmed that the significance of this study primarily lies in its capability to effectively evaluate gas permeability through unstructured pillar-like nanostructures, thus, providing quantitative values for the appropriate driving pressure and expected gas removal time in practical device operation.