• Title/Summary/Keyword: Micro deposition

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The Composition of the Rare Earth Based Conversion Coating Formed on AZ91D Magnesium Alloy

  • Chang, Menglei;Wu, Jianfeng;Chen, Dongchu;Ye, Shulin
    • Corrosion Science and Technology
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    • v.17 no.1
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    • pp.1-5
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    • 2018
  • As structural materials, magnesium (Mg) alloys have been widely used in the fields of aviation, automobiles, optical instruments, and electronic products. There are few studies on the effect of coating conditions on the compositional variation during the formation process of the conversion coatings. Rare-earth based conversion coating on AZ91 magnesium alloy was prepared in ceric sulfate and hydrogen peroxide contained solution. The element composition and valence as well as their distribution in the coating were analyzed with energy dispersive X-ray spectroscopy (EDS), Electron probe micro-analyzer (EPMA), X-ray photoelectron spectroscopy (XPS). The effect of treating process on the element composition were also studied. It was found that the conversion coating surface consists of Mg, Al, O, Ce, and the weight content of Ce in the coating was affected by the treating solution concentration and immersion time; the Ce element was distributed in the coating non-uniformly and existed in the form of $Ce^{+3}$ and $Ce^{+4}$, while the O element existed in the form of $OH^-$, $O^{2-}$, $H_2O$. Based on microscopic analysis results, the electrochemical deposition mechanism on the micro-anode and micro-cathode in the process of the coating growth was suggested.

Micro-Raman Spectroscopy and Cathodoluminescence Study of Cross-section of Diamond Film

  • Wang, Chun-Lei;Akimitsu Hatta;Jaihyung Won;Jaihyung Won;Nan Jinang;Toshimichi Ito;Takatomo Sasaki;Akio Hiraki;Zengsun Jin
    • The Korean Journal of Ceramics
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    • v.3 no.1
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    • pp.1-4
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    • 1997
  • Diamond film (24$\mu\textrm{m}$) were prepared by Microwave Plasma Chemical Vapor Deposition method from a reactive CO/H$_2$ mixtures. Micro-Raman spectroscopy and micro-cathodoluminescence study were carried out along the crosssection and correlated to SEM observation. CL image of cross-section was also investigated. Peak position, FWHM of Raman spectrum were determined using Lorentzing fit. The stress in this sample is 0.4~0.7 GPa compressive stress, and along the distance the compressive stress reduced. The Raman peak broadening is dominated by phonon life time reduction at grain boundaries and defect sites. Defects and impurities were mainly present inside the film, not at Silicon/Diamond interface.

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A Study on The Fabrication and Electrochemical Characterization of Amorphous Vanadium Oxide Thin Films for Thin Film Micro-Battery (마이크로 박막 전지용 비정질 산화바나듐 박막의 제작 및 전기화학적 특성에 관한 연구)

  • 전은정;신영화;남상철;조원일;윤영수
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.05a
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    • pp.634-637
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    • 1999
  • The amorphous vanadium oxide as a cathode material is very preferable for fabricating high performance micro-battery. The amorphous vanadium oxide cathode is preferred over the crystalline form because three times more lithium ions can be inserted into the amorphous cathode, thus making a battery that has a higher capacity. The electrochemical properties of sputtered films are strongly dependent on the oxygen partial pressure in the sputtering gas. The effect of different oxygen partial pressure on the electrochemical properties of vanadium oxide thin films formed by r.f. reactive sputtering deposition were investigated. The stoichiometry of the as-deposited films were investigated by Auger electro spectroscopy. X-ray diffraction and atomic force microscopy measurements were carried out to investigate structural properties and surface morphology, respectively. For high oxygen partial pressure(>30% ), the films were polycrystalline V$_2$O$_{5}$ while an amorphous vanadium oxide was obtained at the lower oxygen partial pressure(< 15%). Half-cell tests were conducted to investigate the electrochemical properties of the vanadium oxide film cathode. The cell capacity was about 60 $\mu$ Ah/$\textrm{cm}^2$ m after 200 cycle when oxygen partial pressure was 20%. These results suggested that the capacity of the thin film battery based on vanadium oxide cathode was strongly depends on crystallinity.y.

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Design and Fabrication of Movable Micro-Fersnel Lens on XY-stage (XY-Stage에 의해 정적인 변위를 갖는 미세 프레넬 렌즈(Micro-Fresnel Lens)의 설계 및 제작)

  • Kim, Che-Heung;Ahn, Si-Hong;Lim, Hyung-Taek;Kim, Yong-Kweon
    • Proceedings of the KIEE Conference
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    • 1998.07g
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    • pp.2515-2517
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    • 1998
  • The micro fresnel lens(MFL) was modeled and fabricated on a XY-stage electrostatically driven by comb actuator. The modeled MFL was approximated as a step shape with 4-phase and 4-zone plate. The focal length and diameter of the MFL is 20mm and 912${\mu}m$, respectively. The XY-stage suspending the MFL is designed to generate a large static displacement up to about 20${\mu}m$. On SOI substrates, we first fabricated MFL using the RIE(reactive Ion etching) technology and then patterned and etched bulk silicon to make XY-stage. After the fabrication of all structures on top side of the SOI substrates. $Si_3N_4$ was deposited for passivation of all structures using PECVD(plasma enhanced chemical vapor deposition). All the MFL systems width comb drive actuator were released by KOH etching from the bottom side of the SOI wafer using double-sided alignment technique. In fabrication of MFL, a dry etching conditions is established in order to improve surface roughness and to control the etched depth.

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Electrodeposition and characterization of Ni-W-Si3N4 alloy composite coatings

  • Choi, Jinhyuk;Gyawali, Gobinda;Lee, Soo Wohn
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2015.05a
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    • pp.171-172
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    • 2015
  • $Ni-W-Si_3N_4$ alloy composite coatings were prepared by pulse electro-deposition method using nickel sulfate bath with different contents of tungsten source, $Na_2WO_4.2H_2O$, and dispersed $Si_3N_4$ nano-particles. The structure and micro-structure of coatings was separately analyzed by X-ray diffraction (XRD) and scanning electron microscope (SEM). Results indicated that nano $Si_3N_4$ and W content in alloy had remarkable effect on micro-structure, micro-hardness and scratch resistant properties. Tungsten content in Ni-W and $Ni-W-Si_3N_4$ alloy ranged from 7 to 14 at.%. Scratch test results suggest that as compared to Ni-W only, $Ni-W-Si_3N_4$ prepared from Ni/W molar ratio of 1:1.5 dispersed with 20 g/L $Si_3N_4$ has shown the best result among different samples.

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Fabrication and Electrochemical Characterization of All Solid State Thin Film Micro-Battery by in-situ sputtering (In-situ 스퍼터링을 이용한 마이크로 박막 전지의 제작 및 전지 특성 평가)

  • 전은정;신영화;남상철;조원일;손봉희;윤영수
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.11a
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    • pp.159-162
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    • 1999
  • All solid state thin film micro-batteries consisting of lithium metal anode, an amorphous LiPON electrolyte and cathode of vanadium oxide have been fabricated and characterized, which were fabricated with cell structure of Li/LiPON/V$_2$O$\sub$5/Pt. The vanadium oxide thin films were formed by d.c. reactive sputtering on Pt current collector. After deposition of vanadium oxide films, in-situ growths of lithium phosphorus oxynitride film were conducted by r.f. sputtering of Li$_3$PO$_4$ target in mixture gas of N$_2$ and O$_2$. The pure metal lithium film was deposited by thermal evaporation on thin film LiPON electrolyte. The cell capacity was about 45${\mu}$Ah/$\textrm{cm}^2$ $\mu\textrm{m}$ after 200 cycle. No appreciable degradation of the cell capacity could be observed after 50 cycles .

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A comprehensive study of spin coating as a thin film deposition technique and spin coating equipment

  • Tyona, M.D.
    • Advances in materials Research
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    • v.2 no.4
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    • pp.181-193
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    • 2013
  • Description and theory of spin coating technique has been elaborately outlined and a spin coating machine designed and fabricated using affordable components. The system was easily built with interdisciplinary knowledge of mechanics, fluid mechanics and electronics. This equipment employs majorly three basic components and two circuit units in its operation. These include a high speed dc motor, a proximity sensor mounted at a distance of about 15 mm from a reflective metal attached to the spindle of the motor to detect every passage of the reflective metal at its front and generate pulses. The pulses are transmitted to a micro-controller which process them into rotational speed (revolution per minute) and displays it on a lead crystal display (LCD) which is also a component of the micro-controller. The circuit units are a dc power supply unit and a PWM motor speed controlling unit. The various components and circuit units of this equipment are housed in a metal casing made of an 18 gauge black metal sheet designed with a total area of 1, $529.2cm^2$. To illustrate the use of the spin-coating system, ZnO sol-gel films were prepared and characterized using SEM, XRD, UV-vis, FT-IR and RBS and the result agrees well with that obtained from standard equipment and a speed of up to 9000 RPM has been achieved.

Defect Formation in Epitaxially Grown Silver Films (배향 성장시킨 은박막중의 결함생성)

  • Lee Ki-Seon;Kim Key-Soo
    • Applied Microscopy
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    • v.6 no.1
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    • pp.33-38
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    • 1976
  • Formation of crystal defects which may occur during and after the vacuum deposition of silver films on rocksalt substrates were studied by electron microscopy. To obtain defect free films, various evaporation conditions, such as evaporation rate, substrate temperature, substrate treatments and annealing of films were examined. Stacking faults and micro-twins are dominant defects in silver films.

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Stress Induced Gigantic Piezoelectricity of PZT thin films for Actuated Mirror Array

  • Suzuki, Hisao
    • 한국정보디스플레이학회:학술대회논문집
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    • 2006.08a
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    • pp.591-596
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    • 2006
  • Lead zirconate titanate(PZT) thin films have been attracting worldwide interests in exploring their potential properties [1-3] or the origins [4-6] of their excellent dielectic, ferroelectric and piezoelectric properties near the morphotropic phase boundary (MPB). PZT thin films are expected to apply to the memory devices, micro electro mechanical systems (MEMS), and display because of their superior ferroelectric, pyroelectric, piezoelectric and electron emission properties. In this study, high- performance piezoelectric PZT thin films for actuated mirror array and optical scanner were developed by controlling the several factors, such as molecular-designed precursor, seeding layer and the residual stress in films, by a chemical solution deposition (CSD).

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