• 한국정밀공학회지
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• 제23권10호
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• pp.52-59
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• 2006

Micro electrical discharge machining (EDM) and micro electrochemical machining (ECM) were studied for the fabrication of micro structures. Micro EDM has been used to machine micro structures from metals. However, since the tool wear is inevitable during the machining, the tool wear is drawback for the precision machining. Micro ECM is also used for micro machining and produces better surface quality than that of micro EDM. Moreover, since tool electrodes are not worn out, micro ECM is suitable for the precision micro machining. However, the machining rate is lower than that of micro EDM. In this paper, therefore, the hybrid machining process which uses micro EDM as roughing and micro ECM as finishing is introduced. By using this hybrid machining, a hemisphere with $100\;{\mu}m$ radius was fabricated and the efficiency of the process was investigated experimentally.

• International Journal of Precision Engineering and Manufacturing
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• 제6권2호
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• pp.5-11
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• 2005

Among the micro machining techniques, micro EDM is generally used for machining micro holes, pockets, and micro structures on difficult-cut-materials. Micro EDM parameters such as applied voltage, capacitance, peak current, pulse width, duration time are very important to fabricate the tool electrode and produce the micro structures. Developed micro EDM machine is composed of a 3-axis driving system and RC circuit equipped with pulse generator. In this paper, using micro EDM machine, the characteristics of micro EDM process are investigated and it is applied to micro holes, slots, and pockets machining. Through experiments, relations between machined surface and voltages and between MRR and feedrate are investigated. Also the trends of tool wear are investigated in case of hole and slot machining.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2003년도 춘계학술대회 논문집
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• pp.167-172
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• 2003

The machining method by using end-milling tool has been applying in machining structures of various shapes because of the availability. Recently, all kinds of industries based on the parts of micro shape are developing, and the demands of mechanical micro machining technology are Increasing suddenly to produce these parts. According to such changes, the technology of the micro end-milling machining is applying as one of the most important machining means. This research is to aim at developing machining technology for various micro structures using micro end-mill. This paper introduces micro mechanical machining system with ultra precision, and demonstrates methods manufacturing all sorts of parts and moldings for industry and examples of applicable machining by using micro end-milling tool of micro sizes from hundreds to tens in diameter.

• 한국기계가공학회지
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• 제4권4호
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• pp.7-13
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• 2005

In the case of fabricating micro pole structures such as column, square-pole and gear shaft by the micro end-milling process, it can be useful in the fields of industry, for example, micro parts, electrode for electrical discharge machining and micro mold for injection molding. In this study, machining factors and the process were analyzed. Machining experiments of various micro pole configurations were performed. Analysis of the change and effect of the cutting force according to the machining conditions was carried out. An analytical study of the deformation of the micro pole caused cutting conditions and cutting force through the finite element method and ANSYS program was carried out. As a result, this research presented a method of fabricating the column pole of below $100{\mu}m$ diameter with high aspect ratio by using micro end-milling process, and based on that, a method of fabricating a variety of applicable structures. Also the minimum size of the pole capable of fabricating through theory and experiment were demonstrated.

• Composites Research
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• 제21권1호
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• pp.30-39
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• 2008

본 논문에서는 기존의 유전자 알고리즘을 대신하여 병렬 마이크로 유전자 알고리즘을 사용한 복합재료 적층 구조물의 최적설계를 수행하였다. 마이크로 유전자 알고리즘은 한 세대 당 보통 5개의 개체로 해를 탐색한다 비록 세대를 구성하는 인구수는 적지만 공칭수렴 판단과 재초기화 과정을 통해 다양성을 제공하기 때문에 최적해 탐색이 가능하다. 2가지의 복합재 구조물의 최적화 문제를 가정하고 이를 마이크로 유전자 알고리즘을 사용하여 해를 구하였다. 효율성 판단을 위해서 기존의 유전자 알고리즘과 결과를 비교하였다. 두 문제 모두 마이크로 유전자 알고리즘이 비슷한 결과를 도출하면서도 약 70%의 계산량 감소를 보였다. 마이크로 유전자 알고리즘을 사용하여 일정 범위 내에서 변하는 하중을 받고 있는 복합재 적층 구조물의 최적설계를 수행하였다. 계산 결과 고정된 하중상태 하에서 얻은 최적해보다 하중 변화에 덜 민감한 설계변수를 얻을 수 있었다. 이상의 문제를 통해 다양한 설계변수를 갖는 복합재 적층 구조물의 최적설계의 한 방법으로서 마이크로 유전자 알고리즘이 효율적임을 확인하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1902-1906
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• 2003

Micro-milling is an efficient method for fabricating micro structures because of its high machining rate compared with other non-conventional micro machining processes. But it is not easy to make a micro milling tool with less than 50 $\mu\textrm{m}$ in diameter by conventional machining. In this study, the characteristics of a micro milling tool fabricated by wire electrical discharge machining (WEDM) were studied. The workpiece is copper and stainless steel. The effects of some machining conditions such as feed rate, depth of cut, and a shape of tool were studied. The tools with D-shape and square shape in cross section were tested for machining micro grooves and 3D structures.

• 한국정밀공학회지
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• 제29권12호
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• pp.1272-1278
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• 2012

The micro barrier rip array structures have been applied in a variety of areas including as privacy films, micro heat sinks, touch panel and optical waveguide. The increased aspect ratio (AR) of barrier rip array structures is required in order to increase the efficiency and performance of these products. There are several problems such as burr, defect of surface roughness and deformation and breakage of barrier rip structure with machining high-aspect ratio micro barrier rip array structure using orthogonal cutting method. It is essential to develop technological methods to solve these problems. The optimum machining conditions for machining micro barrier rip array structures having high-aspect ratio were determined according to lengths ($200{\mu}m$ and $600{\mu}m$) and shape angles ($2.89^{\circ}$ and $0^{\circ}$) of diamond tool, overlapped cutting depths ($5{\mu}m$ and $10{\mu}m$), feed rates (100 mm/s) and three machining processes. Based on the optimum machining conditions, micro barrier rib array structures having aspect ratio 30 was machined in this study.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.426-428
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• 2007

A simple method is presented for fabricating micro/nanoscale combined hierarchical structures using a two-step UV-assisted capillary molding technique. This lithographic method consists of two steps: (i) fabrication of partially cured polymer microstructures using a PDMS mold and (ii) subsequent nanofabrication using a high-resolution polyurethane acrylate (PUA) mold on top of the pre-formed microstructures. Using this technique, various micro/nano hierarchical structures were fabricated with minimum resolution down to 70 nm over a large area with very good reproducibility.

• 한국전기전자재료학회논문지
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• 제14권3호
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• pp.228-233
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• 2001

This paper presents the optimized design, fabrication and thermal characteristics of micro-heaters for thermal MEMS (micro elelctro mechanical system) applications usign SOI (Si-on-insulator) and trench structures. The micro-heater is based on a thermal measurement principle and contains for thermal isolation regions a 10㎛ thick Si membrane with oxide-filled trenches in the SOI membrane rim. The micro-heater was fabricated with Pt-RTD (resistance thermometer device) on the same substrate by suing MgO as medium layer. The thermal characteristics of the micro-heater wit the SOI membrane is 280$\^{C}$ at input power 0.9W; for the SOI membrane with 10 trenches, it is 580$\^{C}$ due to reduction of the external thermal loss. Therefore, the micro-heater with trenches in SOI membrane rim provides a powerful and versatile alternative technology for improving the performance of micro-thermal sensors and actuators.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2005년도 추계학술발표대회 논문집
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• pp.268-271
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• 2005

Researches based on genetic algorithms have been performed in composite laminated structures optimization since 1990. However, conventional genetic algorithms have a disadvantage that its augmentation of calculation costs. A lot of variations have been proposed to improve the performance and efficiency, and micro genetic algorithm is one of them. In this paper, micro Genetic Algorithm was employed in the optimization of laminated stiffened composite structures to maximize the linear critical buckling load and the results from both conventional genetic algorithm and micro genetic algorithm were compared.