• 제목/요약/키워드: Micro Polymer Fabrication

검색결과 133건 처리시간 0.026초

마이크로 압축성형 공정을 이용한 굴절/회절용 마이크로 광부품 성형 (Fabrication of Refractive/Diffractive Micro-Optical Elements Using Micro-Compression Molding)

  • 문수동;안수호;강신일
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2001년도 추계학술대회 논문집
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    • pp.200-203
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    • 2001
  • Micromolding methods such as micro-injection molding and micro-compression molding are most suitable for mass production of plastic micro-optics with low cost. In this study, plastic micro-optical components, such as refractive microlenses and diffractive optical elements(DOEs) with various grating patterns, were fabricated using micro-compression molding process. The mold inserts were made by ultrapricision mechanical machining and silicon etching. A micro compression molding system was designed and developed. Polymer powders were used as molded materials. Various defects found during molding were analyzed and the process was optimized experimentally by controlling the governing process parameters such as histories of mold temperature and compression pressure. Mim lenses of hemispherical shape with $250{\mu}m$ diameter were fabricated. The blazed and 4 stepped DOEs with $24{\mu}m$ pitch and $5{\mu}m$ depth were also fabricated. Optical and geometrical properties of plastic molded parts were tested by interferometric technique.

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Condensation of Nano-Size Polymer Aggregates by Spin Drying

  • Ishikawa, Atsushi;Kawai, Akira
    • 접착 및 계면
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    • 제6권1호
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    • pp.7-10
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    • 2005
  • Condensation control of nano-particles has become important in order to fabricate minute condensed structures. In this study, we focus our attention on condensation mechanism of polymer aggregates in a resist film. The polymer aggregate is structural component of a resist material which is used in lithography process. The condensation nature of polymer aggregates in the resist film surface is observed by using atomic force microscope (AFM). By using the AFM, the condensation of polymer aggregates can be observed clearly. The condensation of polymer aggregate strongly affects to precise fabrication of resist pattern below 100nm size. The interaction force among polymer aggregates can be analyzed based on Derjaguin approximation. We also discuss about condensation nature of polymer aggregates in the resist film surface with the help of micro sphere model.

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Micro-Nano 시스템 제조를 위한 소형 차세대 사출기 개발과 이를 위한 Micro meld의 개발 (Development of micro-mold for New Injecton Molder to fabricate Micro-Nano system)

  • 황교일;류경주;김훈모
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2002년도 춘계학술대회 논문집
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    • pp.910-913
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    • 2002
  • Recently, the sensor and actuator are developed with EAP(Electro Active Polymer). Common used of they is close at hand, the bio chip and Lab on a chip are researched. For developed bio and micro system, a researcher applies semiconductor fabrication or make it by his hand. But, this method takes long time and a tolerance is large So they are problem of common used. So In this paper we propose the new inject ion molder and micro mold. The micro mold is different from exist ing mold. In this paper, the fabration of micro mold is introduced to inject.

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열방식 마이크로 임프린트 공정을 위한 고분자 재료의 수치적 모델링과 해석 (Numerical Investigation of Micro Thermal Imprint Process of Glassy Polymer near the Glass Transition Temperature)

  • 란 슈하이;이수훈;이혜진;송정한;성연욱;김무종;이문구
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2009년도 추계학술대회 논문집
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    • pp.45-52
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    • 2009
  • The research on miniature devices based on non-silicon materials, in particular polymeric materials has been attracting more and more attention in the research field of the micro/nano fabrication in recent years. Lost of applications and many literatures have been reported. However, the study on the micro thermal imprint process of glassy polymer is still not systematic and inadequate. The aim of this research I to obtain a numerical material model for an amorphous glassy polymer, polycarbonate (PC), which can be used in finite element analysis (FEA) of the micro thermal imprint process near the glass transition temperature (Tg). An understanding of the deformation behavior of the PC specimens was acquired by performing tensile stress relaxation tests. The viscoelastic material model based on generalized Maxwell model was introduced for the material near Tg to establish the FE model based on the commercial FEA code ABAQUS/Standard with a suitable set of parameters obtained for this material model form the test data. As a result, the feasibility of the established viscoelastic model for PC near Tg was confirmed and this material model can be used in FE analysis for the prediction and improvement of the micro thermal imprint process for pattern replication.

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극미세 점 구조체 제작을 위한 열간나노압입공정에서 평판형 폴리머소재의 기계적 특성 평가 (Evaluation of Mechanical Characteristic of Plate-Type Polymer in Thermal-Nanoindentation Process for Hyperfine Pit Structure Fabrication)

  • 이은경;이상매;강충길
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2007년도 추계학술대회 논문집
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    • pp.108-111
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    • 2007
  • It's important to measure quantitative properties about thermal-nano variation conduct of polymer for producing high quality components using NIL process. NanoScale indents can be used ad cells for molecular electronics and drug deliver, slots for integration into nanodevices, and defects for tailoring the structure and properties. In this study, it's to evaluate mechanical characteristic of polymer such as PMMA and PC at high temperature for manufacture of nano/micro size of polymer using indenter at high temperature. At high temperature mechanical properties of polymer have extreme variation. Because heating the polymer, it becomes softer than room temperature. In this case it is especially important to study for mechanical properties of polymer at high temperature.

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마이크로 UV 성형을 통한 초소형 광픽업용 마이크로 미러 어레이 제작 (Fabrication of micro mirror array for small form factor optical pick-up by micro UV-molding)

  • 최용;임지석;김석민;손진승;김해성;강신일
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2005년도 춘계학술대회 논문집
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    • pp.47-50
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    • 2005
  • In this study, micro mirror array for small form factor optical pick-up was replicated by micro UV-molding. First, mold for micro mirror array was fabricated using micromachining. Also, to analyze the characteristics of the surface quality, flatness of replicated mirror surface were measured by white light scanning inteferometry system. The results show that the micro mirror array with a sufficient surface quality can be obtained by polymer replication process.

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마이크로/나노 트라이볼로지 기반 기계-화학적 미세가공기술 : 발전과정 및 전망 (Mechano-Chemical Microfabrication Technology Based on Micro/Nano-Tribology : Development Process and Prospect)

  • 성인하;김대은
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2002년도 추계학술대회 논문집
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    • pp.274-279
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    • 2002
  • In this paper, the development process of an unique and creative micro/nano-structure fabrication technique based on micro/nano-tribology are reviewed and discussed. The so-called Mechano-Chemical Process(MCP), which has been developed since 1995 by Tribology Research Laboratory at Yonsei University with the motivation to overcome the demerits of the conventional photolithographic techniques, is based on the fundamental understanding of the interaction between the tool tip and the workpiece surface. This process is a maskless process which offers tremendous flexibility in surface patterns that can be created on a workpiece surface without using any capital intensive equipment. It Is capable of fabricating the prototypes of micro/nano-components, micro- structured surface with various geometries, micro-molds for making polymer or metal parts, and micro-fluidic channels for lab-on-a- chip

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금속 3D 프린팅 소재와 폴리머 레이저접합에 관한 연구 (A Study on Laser Welding for 3D Printed Metal Plate and Polymer)

  • 예강현;김성욱;박거동;최해운
    • Journal of Welding and Joining
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    • 제34권4호
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    • pp.23-27
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    • 2016
  • A 3D printed metal part and thermal plastic polymer part were joined by direct laser irradiation. The 3D metal part was fabricated by using DED(Direct Energy Deposition) with STS316 material. The experiment was carried out through no patterned metal surface, 3D metal printed surface and micro laser patterned surface. The most secure joining quality was obtained at the laser micro patterned surface specimen and the counterparts of polymers were PLA and PE based thermo plastics. The applied laser power was 350Watt and the distance of patterns was maintained at $150{\mu}m$. The laser line width was optimized at $450{\mu}m$ and the laser micro pattern depth was $180{\mu}m$ for the best joining quality. Based on the result analysis, the possibility of laser material joining for metal to polymer was proposed and multi-material joining will be possible in 3D laser direct material fabrication.

초발수 표면을 만들기 위한 마이크로-나노 몰드 제작 공정 (Manufacturing process of micro-nano structure for super hydrophobic surface)

  • 임동욱;박규백;박정래;고강호;이정우;김지훈
    • Design & Manufacturing
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    • 제15권4호
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    • pp.57-64
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    • 2021
  • In recent materials industry, researches on the technology to manufacture super hydrophobic surface by effectively controlling the wettability of solid surface are expanding. Research on the fabrication of super hydrophobic surface has been studied not only for basic research but also for self-cleaning, anti-icing, anti-friction, flow resistance reduction in construction, textile, communication, military and aviation fields. A super hydrophobic surface is defined as a surface having a water droplet contact angle of 150 ° or more. The contact angle is determined by the surface energy and is influenced not only by the chemical properties of the surface but also by the rough structure. In this paper, maskless lithography using DMD, electro etching, anodizing and hot embossing are used to make the polymer resin PMMA surface super hydrophobic. In the fabrication of microstructure, DMDs are limited by the spacing of microstructure due to the structural limitations of the mirrors. In order to overcome this, maskless lithography using a transfer mechanism was used in this paper. In this paper, a super hydrophobic surface with micro and nano composite structure was fabricated. And the wettability characteristics of the micro pattern surface were analyzed.