• Title/Summary/Keyword: Micro Parallel Manipulator

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초정밀작업을 위한 6자유도 마이크로 스테이지의 개발 (Development of a 6 degrees-of-freedom micro stage for ultra precision positioning)

  • 김경찬;김수현;곽윤근
    • 대한기계학회논문집A
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    • 제22권2호
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    • pp.372-379
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    • 1998
  • A new 6 degrees-of-freedom micro stage, based on parallel mechanisms and actuated by using piezoelectric elements, has been developed for the application of micro positioning such as semiconductor manufacturing devices, high precision optical measurement systems, and high accurate machining. The micro stage structure consists of a base platform and an upper platform(stage). The base platform can effectively generates planar motion with yaw motion, while the stage can do vertical motion with roll and pitch motions with respect to the base platform. This separated structure has an advantage of less interference among actuators. The forward and inverse kinematics of the micro stage are discussed. Also, through linearization of kinematic equations about an operating point on the assumption that the configuration of the micro stage remains essentially constant throughout a workspace is performed. To maximize the workspace of the stage relative to fixed frame, an optimal design procedure of geometric parameter is shown. Hardware description and a prototype are presented. The prototype is about 150mm in height and its base platform is approximately 94mm in diameter. The workspace of the prototype is obtained by computer simulation. Kinematic calibration procedure of the micro stage and its results are presented.

3차원 평형 마이크로조정장치 : 설계 고려사항 (3-DOF Parallel Micromanipulator : Design Consideration)

  • 이정익;이동찬;한창수
    • 한국공작기계학회논문집
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    • 제17권2호
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    • pp.13-22
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    • 2008
  • For the accuracy correction of the micro-positioning industrial robot, micro-manipulator has been devised. The compliant mechanisms using piezoelectric actuators is necessary geometrically and structurally to be developed by the optimization approaches. The overall geometric advantage as the mechanical efficiencies of the mechanism are considered as objective functions, which respectively art the ratio of output displacement to input force, and their constraints are the vertical notion of supporting leg and the structural strength of manipulation. In optimizing the compliant mechanical amplifier, the sequential linear programming and an optimality criteria method are used for the geometrical dimensions of compliant bridges and flexure hinges. This paper presents the integrated design process which not only can maximize the mechanism feasibilities but also can ensure the positioning accuracy and sufficient workspace. Experiment and simulation are presented for validating the design process through the comparisons of the kinematical and structural performances.

차량 시물레이터의 운전석 시스템 개발 (Development of a Driving Operation System for Vehicle Simulator)

  • 유성의;박민규;유기성;이민철
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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    • pp.291-291
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    • 2000
  • A vehicle driving simulator is a virtual reality device which a human being feels as if the one drives a vehicle actually. Driving Operation System acts as an interface between a driver and a driving simulator. This paper suggests the driving operation system for a driving simulator. This system consists of a controller, DC geared motor, MR brake, rotary encoders, steeping motor and bevel gear box. Reaction force and torque on the steering system were made by DC_Motor and MR_Brake. Reaction force and torque on the steering system were compare between real car and a driving simulator. The controller based on the 80C196KC micro processor that manage and transfer signal.

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공리적 설계를 이용한 공간형 3자유도 기구의 최적설계 (The Optimum Design of a Spatial 3-DOF Manipulator Using Axiomatic Design)

  • 한석영;이병주;김선정;김종오;정구봉
    • 한국공작기계학회논문집
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    • 제14권6호
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    • pp.52-60
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    • 2005
  • Ultra-precision positioning systems basically require high natural frequency and sufficient workspace. To cope with this requirement, flexure hinge mechanisms have been developed. However, previous designs are difficult to satisfy the functional requirements of the system due to difficulty in modeling and optimization process applying fur the independent axiomatic design. Therefore, this paper suggests a new design and design procedure based on semi-coupled, axiomatic design. A spatial 3-DOF parallel type micro mechanism is chosen aa an exemplary device. Based on preliminary kinematic analysis and dynamic modeling of the system, an optimum design is conducted. To check the effectiveness of the optimal parameters obtained by theoretical approach, simulation has been performed by FEM.