• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.285-290
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• 2005

Micro On-Off valves are currently recognized as the core technology in the fields of the micro fluid chip fur medical applications and production lines of semi-conduct chip. Micro valves that operate by compressed air need the high-speed responsibility, repeatability, the absorbability and the uniform pressure by the poppet. In this study, Micro On-Off valves that posses the high-speed responsibility and the high rate of flow have designed and analyzed through the law of equivalent magnetic circuit and Finite Element Method (FEM) respectively. In case of poppet, Flow field characteristic was analyzed by the variation of poppet and it was able to display flow field by changing the location of the poppet. Also, we verified possibility of the design through the static and dynamic pressure and the 3D distribution curve of the force by working the front poppet.

• Proceedings of the KIEE Conference
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• 2006.07b
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• pp.657-658
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• 2006

Recently, the micro on-off valves have been focused on core technology in the fields of the production line of semi-conductor chips and the micro fluid chips for bio-medical applications. A key characteristics for micro valve, operated by compressed air, are high speed response and great repeatability. Indeed, it is also important to keep the pressure on the cross-sectional area of the poppet to be constant regardless of the fluctuation of the pressure exerted on the ports. In this study, we have designed and analysed the high-speed and high flow rate micro on-off valve using the analogy of equivalent magnetic circuit and Finite Element Method(FEM) respectively. In case of poppet, flow field characteristic was analyzed by the variation of poppet and it was able to display flow field by changing the location of the poppet. Also, we verified possibility of the design through the static and dynamic pressure and the 3D distribution curve of the force by working the front poppet.

• Transactions of The Korea Fluid Power Systems Society
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• v.3 no.4
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• pp.14-20
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• 2006

Recently, the on-off solenoid valves have been focused on core technology in the fields of the production line of semi-conductor chips and the micro fluid chips for bio-medical applications. A key characteristics for on-off solenoid valve, operated by compressed air, are high speed response and great repeatability. Indeed, it is also important to keep the pressure on the cross-sectional area of the poppet to be constant regardless of the fluctuation of the pressure exerted on the ports. In this study, we have designed and analysed the high-speed and high flow rate on-off solenoid valve using the analogy of equivalent magnetic circuit and Finite Element Method (FEM) respectively. In case of poppet, flow field characteristics was analyzed by the variation of poppet and it was able to display flow field by changing the location of the poppet. Also, we verified possibility of the design through the static and dynamic pressure and the 3D simulation using distribution curve of the force by working the front poppet.

• Journal of Biosystems Engineering
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• v.27 no.2
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• pp.79-88
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• 2002

This study was conducted to develop system for high speed rice transplanting machines. The control system includes a sensor detecting the tilt angle of the seedling bed, a micro-controller and a hydraulic system consisting of a double acting cylinder, a four-way three-position solenoid valve, a relief valve and a hydraulic pump. The levelling system shared the pump with the existing steering control, resulting in a tandem center circuit for the steering and levelling control systems. Using the input signal from the sensor, the micro-controller determined and generated the output signal to control the cylinder through the solenoid valve to keep the seedling bed always parallel to the water surface regardless of soil unevenness during the transplanting operations. Both an ON/OFF and a PWM control schemes were tested. When the flow rate was more than 1 ι/min in the ON/OFF control, the system showed unstable rolling. However, in the PWM control, the system worked stably although the flow rate was more than 1 ι/min. The PWM control showed a better performance when a large difference between the angle and the dead band of the control system occurred. The characteristics of tile system response to given tilt angles were predicted by a computer simulation. Both the ON/OFF and the PWM control systems worked well providing that the operating and waiting times were properly adjusted.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.876-881
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• 2004

In this study, A special quality analysis and experiment for low power consumption type pneumatic on-off micro valve was performed. And flow characteristics of the micro valve by stroke change was numerically investigated. As a result, it is shown that magnetic force(2.4N) is exerted enough to move poppet with 0.3mm stroke with 0.01 seconds of response time, and that there is no magnetic force emitted by yoke. Under the condition of poppet stroke smaller than about 0.8mm, dynamic pressure acts to poppet wall up to supply pressure level. But, that is decreasing to 40% when poppet stroke is 0.8mm.

• Transactions of The Korea Fluid Power Systems Society
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• v.1 no.2
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• pp.15-19
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• 2004

In this study, Design and simulation for low power consumption type pneumatic on-off micro valve was performed. And flow characteristics of the micro valve by stroke change was numerically investigated. As a result, it is shown that magnetic force(6.8N) is exerted enough to move poppet with 0.438mm stroke with 0.01 seconds of response time, and that there is no magnetic force emitted by yoke. Under the condition of poppet stroke smaller than about 0.4mm, dynamic pressure acts to poppet wall up to supply pressure level. But, that is decreasing to 40% when poppet stroke is 0.8mm.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.1051-1054
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• 2000

We developed the micro CSF (celebrospinal fluid) shunt valve with surface and bulk micromachining technology in polymer MEMS. This micro CSF shunt valve was formed with four micro check valves to have a membrane connected to the anchor with the four bridges. The up-down movement of the membrane made the CSF on & off and the valve characteristic such as open pressure was controlled by the thickness and shape of the bridge and the membrane. The membrane, anchor and bridge layer were made of the $O_2$ RIE (reactive ion etching) patterned Parylene thin film to be about 5~10 microns in thickness on the silicon wafer. The dimension of the rectangular nozzle is 0.2＊0.2 $\textrm{mm}^2$ and the membrane 0.45 mm in diameter. The bridge width is designed variously from 0.04 mm to 0.12 mm to control the valve characteristics. To protect the membrane and bridge in the CSF flow, we developed the packaging system for the CSF micro shunt valve with the deep RIE of the silicon wafer. Using this package, we can control the gap size between the membrane and the nozzle, and protect the bridge not to be broken in the flow. The total dimension of the assembled system is 2.5＊2.5 $\textrm{mm}^2$ in square, 0.8 mm in height. We could precisely control the burst pressure and low rate of the valve varing the design parameters, and develop the whole CSF shunt system using this polymer MEMS fabricated CSF shunt valve.

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.663-664
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• 2008

In this study, A special quality analysis and experiment for low power consumption type pneumatic on-off micro valve was performed. And flow characteristics of the micro valve by stroke change was numerically investigated. As a result, it is shown that magnetic force(2.4N) is exerted enough to move poppet with 0.3mm stroke with 0.01 seconds of response time, and that there is no magnetic force emitted by yoke.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.154-155
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• 2007

Put Recently, development of micro valves that operate by compressed air has received significant attention in the fields of the micro fluid chip for medical applications or production lines of semi-conduct chip for electronic goods. Especially it is required that high-speed responsibility and lower power in optimal design of these micro valves. The primary objective of this study is to compare the optimally designed Solenoid Valve with the actually produced one which can highly improve the efficiency by providing optimal current according to mechanical load.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.10
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• pp.194-199
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• 2001

In this paper, we propose a new locomotive mechanism using impulsive force for microcapsule-type endoscope. It has the compact size for movement in the colon and actuating mechanisms for hi-directional movement. The actuating mechanism resembles a pneumatic cylinder and consists of body, inertia mass(piston). spring. pneumatic source and calve. When valve is ON, the pneumatic impulsive force between piston and body drives them in two opposite direction. As the air in the body is passed away, the contrary movements are occurred by spring reaction. Therefore, the direction of body's motion is determined by the relative magnitude of two opposite impulsive forces, i.e., pneumatic and spring force. The effect of two impulsive forces can simply be controlled by On-Off time of solenoid valve.