• Journal of the Optical Society of Korea
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• v.20 no.6
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• pp.669-677
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• 2016

A miniaturized FTIR spectrometer based on lamellar grating interferometry is being developed for passive remote-sensing. Consisting of a pair of micro-mirror arrays, the lamellar grating can be fabricated using MEMS technology. This paper describes a method to compute the optical field in the interferometer to optimize the design parameters of the lamellar grating FTIR spectrometer. The lower limit of the micro-mirror width in the grating is related to the formation of a Talbot image in the near field and is estimated to be about $100{\mu}m$ for the spectrometer to be used for the wavelength range of $7-14{\mu}m$. In calculating the far field at the detection window, the conventional Fraunhofer equation is inadequate for detection distance of our application, misleading the upper limit of the micro-mirror width to avoid interference from higher order diffractions. Instead, the far field is described by the unperturbed plane-wave combined with the boundary diffraction wave. As a result, the interference from the higher order diffractions turns out to be negligible as the micro-mirror width increases. Therefore, the upper limit of the micro-mirror width does not need to be set. Under this scheme, the interferometer patterns and their FT spectra are successfully generated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.04b
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• pp.75-79
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• 1995

A cutting experiment using diamond tool was performed to make the die cabity which is composed of micro groove with mirror surface. Fine cutting depth was generated by the elastic recovery of the modified tool holder on the conventional M/C. Surface roughness and profile were investigated with cutting speed and depth and through the low cutting speed of 10mm/min, Rmax 0.005 .mu. m or less of machined surface could be achieved.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.97-100
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• 2004

In recent years, a demand for micro-structure machining is increasing by the development of information and optics industries. Micro machining technology is in general well known in the field of lithograghy. However, the requirement of producing micro machine and/or micro mechanism with metal materials will be increased since a variety of workpiece configurations can be easily made. In this paper, ultra precision machine is developed to obtain micro groove and mirror surface using single crystal diamond tool. According to the cutting experiment, no burr was found at the edge of V-grooves, and the surface roughness of copper is about 1～3nm Ra. It is verified that ultra precision machine is effective to high precision machining.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2257-2259
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• 2000

This paper reports on the design, fabrication and driving experiment of micro mirror array(MMA) for lithography process to apply to biochip fabrication Photolithography technology is applied to activate specific area on the surface of modified glass surface, DNA monomers are bound on the activated area of the glass surface. After repeat of DNA monomer synthesizing process, DNA single strand probes could be solid-synthesized on the glass substrate. Without using photomask, photolithography process is tried using micro mirror array(MMA). Photomask or mask alignment is not required in maskless photolithography process using micro mirror array.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.367-368
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• 2012

• Journal of Electrical Engineering and Technology
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• v.5 no.2
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• pp.337-341
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• 2010

In this paper, an extremely low voltage operated micro corner cube retroreflector (CCR) was fabricated for free-space optical communication applications by using bulk silicon micromachining technologies. The CCR was comprised of an orthogonal vertical mirror and a horizontal actuated mirror. For low voltage operation, the horizontal actuated mirror was designed with two PZT cantilever actuators, torsional bars, hinges, and a mirror plate with a size of $400{\mu}m{\times}400{\mu}m$. In particular, the torsional bars and hinges were carefully simulated and designed to secure the flatness of the mirror plate by using a finite element method (FEM) simulator. The measured tilting angle was approximately $2^{\circ}$ at the applied voltage of 5 V. An orthogonal vertical mirror with an extremely smooth surface texture was fabricated using KOH wet etching and a double-SOI (silicon-on-insulator) wafer with a (110) silicon wafer. The fabricated orthogonal vertical mirror was comprised of four pairs of two mutually orthogonal flat mirrors with $400{\mu}m4 (length) $\times400{\mu}m$ (height) $\times30{\mu}m$ (thickness). The cross angles and surface roughness of the orthogonal vertical mirror were orthogonal, almost $90^{\circ}$ and 3.523 nm rms, respectively. The proposed CCR was completed by combining the orthogonal vertical and horizontal actuated mirrors. Data transmission and modulation at a frequency of 10 Hz was successfully demonstrated using the fabricated CCR at a distance of approximately 50 cm.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.599-602
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• 2000

A new dressing technique with utilizes electrolytic phenomenon for realizing effective mirror surface grindings with metal bonded super-abrasive wheels is called “Electrolytic In-process Dressing Grinding”. This technique enabled metal bonded micro-grain wheels, such as micro-grain cast iron fiber bonded wheels, to be used for mirror surface finish processes effectively. But this technique requires a lot of knowledge and experience to perform. And the condition of dressing is variable according to the time. Therefore adaptation of Monitoring and Control technique is needed.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1735-1737
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• 1996

Using a modified Michelson interferometer configuration, the flatness of micro mirror cell surface was probed. Interferograms were captured at CCD camera plane by defocusing object beam onto the micro mirror with microscope objective lens. And these were compared with the interferograms made with the flat metallic mirror. Also, the theoretical analysis is presented.

• International Journal of Precision Engineering and Manufacturing
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• v.4 no.3
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• pp.48-54
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• 2003

This paper deals with mirror grinding of a small-sized aspherical lens by a resin bonded diamond spherical wheel. Up to now, a spherical lens has been used for the lens of the optical communication optical part. However, recently, aspherical optical parts are mainly used in order to attempt the improvement in image quality and miniaturization of the optical device. It is possible to manufacture the aspherical lens which is presently being used in optical instrument through ultra-precision machining technology. Also, to realize compactness, efforts are being made to produce a micro aspherical lens, fur which the development of a high-precision, micro molding die is inevitable. Therefore, extensive research is being done on methods of producing a micro aspherical surface by high-precision grinding. In this paper, the spherical wheel was trued by cup-shaped truer and tool path was calculated by the radius of curvature of the wheel after truing and dressing. Then in the aspherical grinding experiment, WC material which is used as a melding die for the small-sized aspherical lens was ground. The results showed that a form accuracy of 0.1918 $\mu\textrm{m}$ P-V and a surface roughness of 0.064 $\mu\textrm{m}$ Rmax could be achieved.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.12
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• pp.82-87
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• 2001

This paper deals with mirror grinding of a small-sized aspherical lens by the resin bonded diamond spherical wheel. Up to now, a spherical lens has been used for the lens of the optical communication optical part. However, recently, the aspherical optical parts are mainly used in order to attempt the improvement in image quality and miniaturization of the optical device. It is possible to manufacture the aspherical lens which is presently being used in optical instrument through ultra-precision machinery technology. Also, to realize compactability, efforts are being made to produce a micro aspherical lens, for which the development of a high-precision, micro molding die is inevitable. Therefore, extensive research is being done on methods of producing an micro aspherical surface by high-precision grinding. In this paper, the spherical wheel was trued by cup-type truer and tool path was calculated by the radius of curvature of wheel after truing and dressing. And then in the aspherical grinding experiment, WC material which is used as a molding die for the small-sized aspherical lens was ground. It results was that a form accuracy of 0.1918${\mu}m$ P-V and a surface roughness of 0.064${\mu}m$ Rmax.