• 소성∙가공
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• 제14권5호
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• pp.477-481
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• 2005

Wafer scale micro mirror array with high surface quality for small form factor (SFF) optical pick-up was fabricated by micro UV-molding. To replicate micro mirror array for SFF optical pick-up, a high- precision mold was fabricated using micro-machining technology. Wafer scale micro mirror array was UV-molded using the mold and then the process was optimized experimentally. The surface flatness and roughness of UV-molded micro mirror array were measured by white light scanning interferomety system and analyzed the transcribing characteristics. Finally, the measured flatness of UV-molded micro mirror away for SFF optical pick-up, which was fabricated in the optimum processing condition, was less than 70nm.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.371-376
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• 1997

A 100*100.mu.m$^{2}$ aluminum micro mirror is designed and fabricated using a thick photoresist as a sacrificial layer andas a mold for nickel electroplating. The micro mirror is composed of aluminum mirror plate, two nickel support posts, two aluminum hinges, two address eletrodes, and two landing electrodes. The aluminum mirror plate,which is supported by two nickel support posts, is overhung about 10.mu.m from the silicon substrate. THe aluminum mirror plate is actuated like a seesaw by electrostatic force generated by electic potential difference applied between the mirror plate and the address electrode. This paper presents some methods to measure the optical and the dynamic characteristics of the fabricated micro mirror.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1950-1953
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• 1996

A $1\;{\times}\;4$ micro mirror array is designed and fabricated. In contrast to other micro mirrors which utilize torsional flexure hinges or cantilevers for restoring torque and supporting purpose, we have placed a substrate hinge structure under each mirror. Each micro mirror consists of address electrode, substrate hinge consisting of pin and staple, supporter post, and mirror plate. Electrical connection between mirror plate and ground electrode is established by substrate hinge. Mirror undergoes a rotational motion due to electrostatic force when voltage difference is applied between address electrode and mirror plate. Micro mirrors with two different types of staple shape and two different pin sizes are designed and fabricated. Each mirror is designed to have ${\pm}\;10^{\circ}$ of deflection angle and have $100\;{\times}\;110\;{\mu}m^2$ of size.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 춘계학술대회 논문집
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• pp.47-50
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• 2005

In this study, micro mirror array for small form factor optical pick-up was replicated by micro UV-molding. First, mold for micro mirror array was fabricated using micromachining. Also, to analyze the characteristics of the surface quality, flatness of replicated mirror surface were measured by white light scanning inteferometry system. The results show that the micro mirror array with a sufficient surface quality can be obtained by polymer replication process.

• 한국정밀공학회지
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• 제19권11호
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• pp.211-220
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• 2002

Optical disk drives read information by replacing a laser beam on the disk track. As information has become larger, the more accurate position control of a laser beam is necessary. In this paper, we report the analysis and fabrication of the micro mirror for optical disk drivers. A coupled simulation of gas flow and structural displacement of the micro mirror using the Finite-Element-Method is applied to this. The mirror was fabricated by using MEMS technology. Especially, the process using the lapping and polishing step after the bonding of the mirror and electrode plates was employed for the Process reliability. The mirror size was 2.5mm${\times}$3mm and it needed about 35V for displacement of 3.2 ${\mu}$.

• 대한전자공학회논문지SD
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• 제40권8호
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• pp.543-548
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• 2003

본 논문에서는 큰 회전각을 갖는 2축 자유도 마이크로 미러를 제안하고 제작하였다. 이러한 마이크로 미러는 N×N 대용량 광 크로스 커넥트 스위치(optical cross-connect switch)를 구현하는 데 필수적인 요소이다. 스위치의 용량을 증가시키기 위해서는 각각의 마이크로 미러의 회전각을 크게 해야 한다. 이 미러가 큰 각도로 회전하기 위해서는 상부 전극인 미러 판과 하부전극 사이에 충분한 공간이 확보 되어야 한다. 제안된 구조는 기판미세 가공법 (bulk micromachining)을 이용하여 상부전극인 미러와 하부전극을 각각 다른 기판에 제작한 후, 두 기판을 접합함으로써 쉽게 미러의 회전 공간을 확보하였다. 따라서 미러의 회전공간 확보를 위한 별도의 구동기(actuator)를 도입할 필요가 없었다. 제작된 마이크로 미러의 성능을 측정한 결과를 살펴보면, x축과 y축 방향으로의 회전각은 각각 ±5.5°와 ±8.4°였으며, 이 때의 풀인 (pull-in)전압은 각각 380 V와 275 V였다. 이러한 회전각의 성능은 전 세계적으로 지금까지 보고된 연구결과 중에서 가장 우수한 결과이다.

• 한국광학회:학술대회논문집
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• 한국광학회 2001년도 하계학술발표회
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• pp.270-271
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• 2001

• Journal of Electrical Engineering and information Science
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• 제3권2호
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• pp.245-250
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• 1998

Novel fabrication process of vertical spring for micro mirror array is proposed. The proposed fabrication process adopts a shadow evaporation process using shielding screen structure on top of the sacrificial layer. The 50${\times}$50 micro mirror arrays are fabricated using the proposed process and ceramic packaged. The static and dynamic characteristics of mirror are measured. The mirror plate touches substrate at 16V and the response time of about 16.8 ${\mu}\textrm{s}$. The resonant frequency of mirror is 16kHz. The spring thickness is calculated from static characteristic to be 1075${\AA}$.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 제39회 하계학술대회
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• pp.1454-1455
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• 2008

This paper present a piezoelectric actuated mirror with PZT cantilevers, torsional bars and hinges for Micro-CCR (corner cube retroreflector). The actuated mirror with low voltage and large tilting angle is designed and simulated by using FEM (Finite Element Method) simulator (CoventorWare). The tilting angle of actuated mirror is 2.93$^{\circ}$ at low voltage of 5V.

• 한국정밀공학회지
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• 제25권3호
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• pp.56-62
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• 2008

The biocompatibility and the fatigue strength of Co-Cr-Mo alloy are excellent, so it is used well for the material of artificial joints. The head of artificial joint needs mirror surface for reduction of abrasive resistance. Mirror finishing of Co-Cr-Mo alloy with geometrically defined single crystal diamond cutting tools is handicapped by micro chipping of tool edge. In general, it is said that the micro chipping of diamond tool is caused by work hardening of Co-Cr-Mo alloy for the cut. In the present research, mirror finishing of Co-Cr-Mo alloy by applying ultrasonic elliptical vibration cutting was carried out. The experimental results show that the micro chipping of diamond tool was suppressed and the tool wear was remarkably reduced as compared with the ordinary diamond cutting without elliptical vibration motion. It was confirmed that the good mirror surface of maximum surface roughness of 25 nmP-V was obtained for the cutting length of about 14 m. It is expected that mirror finishing of Co-Cr-Mo alloy can be achieved by applying ultrasonic elliptical vibration cutting practically.