Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2008.07a
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- Pages.1454-1455
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- 2008
Design of Low Voltage Piezoelectric Actuated Mirror for Micro-CCR
마이크로 CCR구현을 위한 저전압 구동 압전 반사경 설계
- Lee, Duk-Hyun (Kwangwoon University) ;
- Yang, Chang-Soo (Kwangwoon University) ;
- Park, Jae-Y. (Kwangwoon University)
- Published : 2008.07.16
Abstract
This paper present a piezoelectric actuated mirror with PZT cantilevers, torsional bars and hinges for Micro-CCR (corner cube retroreflector). The actuated mirror with low voltage and large tilting angle is designed and simulated by using FEM (Finite Element Method) simulator (CoventorWare). The tilting angle of actuated mirror is 2.93
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