• Journal of the Korean Society of Manufacturing Process Engineers
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• v.4 no.4
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• pp.7-13
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• 2005

In the case of fabricating micro pole structures such as column, square-pole and gear shaft by the micro end-milling process, it can be useful in the fields of industry, for example, micro parts, electrode for electrical discharge machining and micro mold for injection molding. In this study, machining factors and the process were analyzed. Machining experiments of various micro pole configurations were performed. Analysis of the change and effect of the cutting force according to the machining conditions was carried out. An analytical study of the deformation of the micro pole caused cutting conditions and cutting force through the finite element method and ANSYS program was carried out. As a result, this research presented a method of fabricating the column pole of below $100{\mu}m$ diameter with high aspect ratio by using micro end-milling process, and based on that, a method of fabricating a variety of applicable structures. Also the minimum size of the pole capable of fabricating through theory and experiment were demonstrated.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.275-280
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• 2001

Recently, the trends of industrial products grow more miniaturization, variety and mass production. Micro drilling which take high precision in cutting work is requested more micro hole and high speed working. Especially, Micro deep hole drilling is becoming more important in a wide spectrum of precision production industries, ranging from the production of automotive fuel injection nozzle, watch and camera parts, medical needles, and thick multi-layered Printed Circuit Boards(PCB) that are demanded for very high density electric circuitry. This paper shows the tool monitoring results of micro drill with tool dynamometer. And additionally, microscope with built-in monitor inspection show the relationship between burr in workpiece and chip form of micro drill machining.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.377-382
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• 2005

This paper describes the design of micro machine tools system for mechanical machining of micro/meso scale mechanical parts. The micro machining systems such as $\mu-Late$, $\mu-milling/drilling$ machine and $\mu-grinding$ machine are the basic elements constructing $\mu-factory$ which gains more attention recently because of increasing needs of mico and nano-parts in various industrial and medical area. A miniaturized 3-axis milling machine with VCM stage and air spindle and palm-top size micro-late are designed, and air bearing stage and stepwise linear motion system with PZT are studied for motion system. The micro cutting characteristics are investigated experimentally, and reconfigurable machine structures are also considered.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1907-1910
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• 2003

Miniaturized machine tool can be used to produce 3D features based on CNC and PC-NC technology in the micro/meso scale. Wide applications of CNC technology are developed and there are lots of know-hows in the cutting process and their CNC application. It helps micro/meso scale structure to machine components, which can be used directly for practical applications. In the present research, as the machine tool is miniaturized, the manufacturing machine tools costs less when compared to the equipment used in other micromachining technologies. Moreover, with advancement of micro tool technology, the cutting process can be used to produce micro/meso scale parts. In conclusion, the proposed system can reduce the cost by utilizing the current machining technology, and as a result, complex micro/meso parts can be produced efficiently with high productivity.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.8 no.1
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• pp.31-36
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• 2009

Micro-machining technology has been adopted for shape accuracy of micrometer and sub-micrometer scale, surface roughness of tens nanometer in industries. In micro-machining process the quality of machined surface is derived from machining condition and tooling. This paper investigates AE(acoustic emission) and cutting force signals according to machined surface quality related to machining condition. Machined surface quality was analyzed by the AE and cutting force parameter which reflect surface morphology. The characteristics of signal were extracted for process optimization by monitoring both the tool condition and the machined surface texture in micro end milling process.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.6
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• pp.71-75
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• 2006

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its usage in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. The target of this paper is the analysis of FIB sputtering process according to tilt angle, dwell time and overlap for application of 3D micro and pattern fabrication and to find the effective beam scanning conditions using Taguchi method. Therefore we make the conclusions that tilt angle is dominant parameter for sputtering yield. Burr size is reduced as tilt angle is higher.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.2
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• pp.180-186
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• 2011

This paper describes a micro electrical discharge machining (MEDM) technique that uses an insulated tool in combination with ultrasonic vibration to drill micro holes. As the machining depth becomes deeper, the dispersion of debris and circulation of the dielectric fluid are difficult to occur. Consequently, machining becomes unstable in the machining region and unnecessary electrochemical dissolution and secondary discharge sparking occur at the tool side face. To reduce the amount of unnecessary side machining, an insulated tool was used. Ultrasonic vibration was applied to the MEDM work fluid to better remove debris. Through these methods, a $1000\;{\mu}m$ thick stainless steel plate was machined by using a $73\;{\mu}m$ diameter electrode. The diameters of the hole entrance and exit were $96\;{\mu}m$ and $88\;{\mu}m$, respectively. It took only 351s to completely drill one hole.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.6
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• pp.50-57
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• 2006

The investigation of microscopic precision in high speed endmilling is necessary for machinability evaluation, and the environmentally conscious machining technology have more important position in recent machining process. The microscopic precision of workpiece is influenced by machining environments variation as cutting fluid type and lubricant method. In this study, the cutting forces according to variation of cooling and lubrication are investigated by specially designed tool dynamometer. And the surface roughness, micro hardness and residual stress are evaluated according to machining environment. The characteristics of damaged layer in environmentally conscious machining and conventional machining using cutting fluid are compared experimentally.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.209-214
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• 2002

Mechanical micro-engineering is an easy and cheap way to fabricate micro-structures. If the application of the conventional machining method using flat-end mill becomes available for the micro-manufacturing process, it will be advanced as an extension of the conventional machining process. In this study, micro-grooves cutting using flat-end mill(($\phi$8) was performed. The characteristics on flat-end milling was investigated to improve machinability of micro-grooves. The experiments were performed according to variations of spindle revolution, depth of cut, and feed rate. Machinability through various cutting conditions was evaluated by surface geometry, tool wear, and cutting force. The results show that micro V-grooves of width(pitch) 29${\mu}{\textrm}{m}$ were acquired by flat-end milling. The maximum and minimum roughness of the wall of grooves was 438 and 67nm, respectively

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.3
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• pp.370-375
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• 2010

Tungsten carbide microshaft is used as micro punch, electrode of micro electro discharge machining, and micro tool because of its high hardness and rigidity. In this research, tungsten carbide microshaft was fabricated using electrochemical machining. $H_2SO_4$ solution was used as the electrolyte because it can dissolve tungsten carbide and cobalt simultaneously. Experimentally studied were the effects of electrolyte concentration, machining time, and machining voltage on material removal rate and the shape of the microshaft. To eliminate the effects of bubbles and metal corrosion layer on microshaft shape, the machining was performed below the electrolysis voltage. Three step electrochemical process was suggested to fabricate the straight tungsten carbide microshaft. As a result, a straight tungsten carbide microshaft of $30{\mu}m$ in diameter and $500{\mu}m$ in length was obtained through the proposed three step electrochemical process.