• Journal of the Korean Society for Precision Engineering
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• v.25 no.1
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• pp.138-144
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• 2008

Micro-machining of a brittle material such as glass, silicon, etc., is important in micro fabrication. Particularly, micro-abrasive jet machining (${\mu}-AJM$) has become a useful technique for micro-machining of such materials. The ${\mu}-AJM$ process is mainly based on the erosion of a mask which protects brittle substrate against high velocity of micro-particle. Therefore, fabrication of an adequate mask is very important. Generally, for the fabrication of a mask in the ${\mu}-AJM$ process, a photomask based on the semi-conductor fabrication process was used. In this research a rapid mask fabrication technology has been developed for the ${\mu}-AJM$. By scanning the focused UV laser beam, a micro-mask pattern was fabricated directly without photolithography process and photomask. Two kinds of mask patterns were fabricated using SU-8 and photopolymer (Watershed 11110). Using fabricated mask patterns, abrasive-jet machining of Si wafer were conducted successfully.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1103-1106
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• 2008

For the current display process, the innovative micro pattern fabrication process using semiconductor process should be developed, which requires the expensive equipment, the limited process environment and the expensive optic-sensitive material. The effort of process innovation during past several years ends up the limit of cost reduction. The existing ink jet technologies such as a thermal bubble ink jet printing and a piezo ink jet printing are required to shorten the nozzle diameter in order to apply to the micro pattern fabrication. In this paper, as one way to cope these problems the micro pattern equipment based on the electrostatic ink jet has been developed and carried out some experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.547-548
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• 2007

• Korean Journal of Computational Design and Engineering
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• v.20 no.3
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• pp.291-297
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• 2015

A water jet cleaning robot system for micro drill bits is to refurbish micro drill bits used for the PCB manufacturing process. It can refurbish drill bits with the minimum diameter of ${\phi}0.15{\sim}0.075mm$ of which the total quantity have been discarded before. Micro drill bits with the minimum diameter of ${\phi}0.075mm$ can be cleaned by applying the water jet cleaning robot system out of the manual ultrasonic cleaning in the past for the cleaning equipment as the initial process in refurbishing. This study analyzed problems, while applying the apparatus mechanism for the workability such as the robot traces of Transfer Robot I and II, drill bit loading and unloading, and cleaning tasks in the water jet cleaning robot system in an effort to carry out simulations. In addition, the cleaning work process was optimized as the work process was verified in advance and the production quantity was analyzed through simulations.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2008.05a
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• pp.247-251
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• 2008

This paper presents a micro air pump actuated by PZT actuator (synthetic jet actuator) for air supply for micro fuel cells. The synthetic jet actuators are usually created by a traditional PZT-driven actuator, which consists of a small cylindrical cavity, in/outlet channel and PZT diaphragms. To design the micro air pump, a numerical analysis has been conducted for flow characteristics with respect to various geometries. A prototype of the micro air pump, with a size of $mm{\times}mm{\times}mm$, was fabricated by PDMS replication process and was conducted performance test. To control the PZT actuator, we used the SP4423 micro chips that can be amplified input voltage to reduce the controller size and the power consumption. With a voltage of 3V at 100Hz, the air pump's pumping pressure is 600pa and its power consumption is only 0.1mW.

• Proceedings of the KSME Conference
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• 2008.11b
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• pp.2834-2838
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• 2008

An free breathing proton exchange membrane fuel cell (PEMFC) was developed. This paper presents a study of the several effect on the performance of a fuel cell such as air flow rate, opening ratio, and cathode structures. Especially, an air flow rate is critical condition to improve the fuel cell performance. In this paper, we developed a synthetic jet micro air blower to supply high stoichiometric air. The synthetic jet actuation is usually generated by a traditional PZT-driven actuator, which consists of a small cylindrical cavity, orifices and PZT diaphragms. In comparison with free convection fuel cells, the forced-convection fuel cell which equipped synthetic jet micro air blower brings higher performance and stability for long term test. Also, power consumption of the synthetic jet micro air blower is under 0.3W. The results show that the maximum power density was $188mW/cm^2$ at $400mA/cm^2$. The maximum power density was higher 40% than power density of free convection fuel cell.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.583-584
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.10a
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• pp.215-216
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• 2009

• Journal of the Korean Society for Precision Engineering
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• v.27 no.8
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• pp.91-97
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• 2010

Micro-abrasive Jet Machining is one of the new technology which enables micro-scale machining on the surface of high brittle materials. In this technology it is very important to fabricate a mask that prevents excessive abrasives not to machine un-intend surface. Our previous work introduced the micro-stereolithography technology for the mask fabrication. And is good to not only planar material but also for non-planar materials. But the technology requires a 3 dimensional mask CAD model which is perfectly matched with the surface topology of parent material as an input. Therefore there is strong need to develop an automated modeling technology which produce adequate 3D mask CAD model in fast and simple way. This paper introduces a fast and simple mask modeling algorithm which represents geometry of models in voxel. Input of the modeling system is 2D pattern image, 3D CAD model of parent material and machining parameters for Micro-abrasive Jet Machining. And the output is CAD model of 3D mask which reflects machining parameters and geometry of the parent material. Finally the suggested algorithm is implemented as software and verified by some test cases.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.7
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• pp.87-93
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• 2010

This paper presents an evaluation of efficiency on glass precision machining by using abrasive water-jet machine. In this study, problems of conventional water-jet machining are examined experimentally and are analysized numerically. Especially, the reason of whitening on the machined surface of biochip glass is determined. It is found that the mass flow rate of abrasive input and transverse speed of water-jet are key parameters to control the direct machining of micro hole and channel on a glass substrate. Based on results of experimental analysis, possibility of direct fabrication of micro holes and channels on a glass substrate is successfully confirmed.